JPS63132460U - - Google Patents
Info
- Publication number
- JPS63132460U JPS63132460U JP2458087U JP2458087U JPS63132460U JP S63132460 U JPS63132460 U JP S63132460U JP 2458087 U JP2458087 U JP 2458087U JP 2458087 U JP2458087 U JP 2458087U JP S63132460 U JPS63132460 U JP S63132460U
- Authority
- JP
- Japan
- Prior art keywords
- silicon film
- optical sensor
- insulating substrate
- soi optical
- junction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 239000012535 impurity Substances 0.000 claims description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 2
- 230000000694 effects Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2458087U JPS63132460U (mo) | 1987-02-20 | 1987-02-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2458087U JPS63132460U (mo) | 1987-02-20 | 1987-02-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63132460U true JPS63132460U (mo) | 1988-08-30 |
Family
ID=30823945
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2458087U Pending JPS63132460U (mo) | 1987-02-20 | 1987-02-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63132460U (mo) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06350122A (ja) * | 1993-06-08 | 1994-12-22 | Hamamatsu Photonics Kk | 半導体光検出素子 |
-
1987
- 1987-02-20 JP JP2458087U patent/JPS63132460U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06350122A (ja) * | 1993-06-08 | 1994-12-22 | Hamamatsu Photonics Kk | 半導体光検出素子 |
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