JPS63135976U - - Google Patents
Info
- Publication number
- JPS63135976U JPS63135976U JP1987028188U JP2818887U JPS63135976U JP S63135976 U JPS63135976 U JP S63135976U JP 1987028188 U JP1987028188 U JP 1987028188U JP 2818887 U JP2818887 U JP 2818887U JP S63135976 U JPS63135976 U JP S63135976U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- reaction tube
- carbon
- liquid phase
- cooling chambers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987028188U JPS63135976U (2) | 1987-02-27 | 1987-02-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987028188U JPS63135976U (2) | 1987-02-27 | 1987-02-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63135976U true JPS63135976U (2) | 1988-09-07 |
Family
ID=30830918
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987028188U Pending JPS63135976U (2) | 1987-02-27 | 1987-02-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63135976U (2) |
-
1987
- 1987-02-27 JP JP1987028188U patent/JPS63135976U/ja active Pending
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