JPS63147812U - - Google Patents

Info

Publication number
JPS63147812U
JPS63147812U JP3936787U JP3936787U JPS63147812U JP S63147812 U JPS63147812 U JP S63147812U JP 3936787 U JP3936787 U JP 3936787U JP 3936787 U JP3936787 U JP 3936787U JP S63147812 U JPS63147812 U JP S63147812U
Authority
JP
Japan
Prior art keywords
disc
shaped body
crystal growth
substrate holder
molecular beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3936787U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3936787U priority Critical patent/JPS63147812U/ja
Publication of JPS63147812U publication Critical patent/JPS63147812U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Description

【図面の簡単な説明】
第１図は、本考案の一実施例に係る基板保持器
の構造図である。第２図は、従来技術に係る基板
保持器の構造図である。第３図は、分子線結晶成
長装置の構造図である。 １……円板状体、１１……開口、１２……段差
を有するフランジ、２……ヒータ、３……シララ
ウド。

Claims (1)

  1. 【実用新案登録請求の範囲】 基板取り付け用開口１１を有する円板状体１よ
    りなる分子線結晶成長装置用基板保持器において
    、 前記円板状体１の周辺には１０mm以下の段差を
    有するフランジ１２が設けられている ことを特徴とする分子線結晶成長装置用基板保持
    器。
JP3936787U 1987-03-18 1987-03-18 Pending JPS63147812U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3936787U JPS63147812U (ja) 1987-03-18 1987-03-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3936787U JPS63147812U (ja) 1987-03-18 1987-03-18

Publications (1)

Publication Number Publication Date
JPS63147812U true JPS63147812U (ja) 1988-09-29

Family

ID=30852462

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3936787U Pending JPS63147812U (ja) 1987-03-18 1987-03-18

Country Status (1)

Country Link
JP (1) JPS63147812U (ja)

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