JPS63157924U - - Google Patents
Info
- Publication number
- JPS63157924U JPS63157924U JP1987048967U JP4896787U JPS63157924U JP S63157924 U JPS63157924 U JP S63157924U JP 1987048967 U JP1987048967 U JP 1987048967U JP 4896787 U JP4896787 U JP 4896787U JP S63157924 U JPS63157924 U JP S63157924U
- Authority
- JP
- Japan
- Prior art keywords
- ceiling
- processing apparatus
- prevention plate
- plasma processing
- deposition prevention
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987048967U JPS63157924U (2) | 1987-04-02 | 1987-04-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987048967U JPS63157924U (2) | 1987-04-02 | 1987-04-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63157924U true JPS63157924U (2) | 1988-10-17 |
Family
ID=30870990
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987048967U Pending JPS63157924U (2) | 1987-04-02 | 1987-04-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63157924U (2) |
-
1987
- 1987-04-02 JP JP1987048967U patent/JPS63157924U/ja active Pending
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