JPS63159826U - - Google Patents
Info
- Publication number
- JPS63159826U JPS63159826U JP5232087U JP5232087U JPS63159826U JP S63159826 U JPS63159826 U JP S63159826U JP 5232087 U JP5232087 U JP 5232087U JP 5232087 U JP5232087 U JP 5232087U JP S63159826 U JPS63159826 U JP S63159826U
- Authority
- JP
- Japan
- Prior art keywords
- air blowing
- foreign matter
- substrate
- blowing hole
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000007664 blowing Methods 0.000 claims 3
Landscapes
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5232087U JPS63159826U (2) | 1987-04-07 | 1987-04-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5232087U JPS63159826U (2) | 1987-04-07 | 1987-04-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63159826U true JPS63159826U (2) | 1988-10-19 |
Family
ID=30877385
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5232087U Pending JPS63159826U (2) | 1987-04-07 | 1987-04-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63159826U (2) |
-
1987
- 1987-04-07 JP JP5232087U patent/JPS63159826U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS63159826U (2) | ||
| JPH0187896U (2) | ||
| JPH0359926U (2) | ||
| JPS633142U (2) | ||
| JPS62114444U (2) | ||
| JPS63109065U (2) | ||
| JPS6147218U (ja) | 自動供給装置 | |
| JPS6263801U (2) | ||
| JPH0157902U (2) | ||
| JPS62287U (2) | ||
| JPS6371696U (2) | ||
| JPH028134U (2) | ||
| JPS61130541U (2) | ||
| JPS61139974U (2) | ||
| JPH0169000U (2) | ||
| JPS5978559U (ja) | Ｖｔｒ装置 | |
| JPS6380846U (2) | ||
| JPS6127643U (ja) | チツプコンベア兼用ク−ラントタンク | |
| JPH0478227U (2) | ||
| JPS6317132U (2) | ||
| JPS63168659U (2) | ||
| JPS62117705U (2) | ||
| JPH0266803U (2) | ||
| JPH02110040U (2) | ||
| JPS60171166U (ja) | 豚舎用スノコ |