JPS63159827U - - Google Patents
Info
- Publication number
- JPS63159827U JPS63159827U JP5303987U JP5303987U JPS63159827U JP S63159827 U JPS63159827 U JP S63159827U JP 5303987 U JP5303987 U JP 5303987U JP 5303987 U JP5303987 U JP 5303987U JP S63159827 U JPS63159827 U JP S63159827U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- etching
- liquid
- surface plate
- liquid supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims description 9
- 239000004744 fabric Substances 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Weting (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5303987U JPS63159827U (cs) | 1987-04-08 | 1987-04-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5303987U JPS63159827U (cs) | 1987-04-08 | 1987-04-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63159827U true JPS63159827U (cs) | 1988-10-19 |
Family
ID=30878741
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5303987U Pending JPS63159827U (cs) | 1987-04-08 | 1987-04-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63159827U (cs) |
-
1987
- 1987-04-08 JP JP5303987U patent/JPS63159827U/ja active Pending
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