JPS63160557U - - Google Patents
Info
- Publication number
- JPS63160557U JPS63160557U JP1987052851U JP5285187U JPS63160557U JP S63160557 U JPS63160557 U JP S63160557U JP 1987052851 U JP1987052851 U JP 1987052851U JP 5285187 U JP5285187 U JP 5285187U JP S63160557 U JPS63160557 U JP S63160557U
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- pattern data
- alignment mark
- directions
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims 1
- 239000002131 composite material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987052851U JPS63160557U (2) | 1987-04-08 | 1987-04-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987052851U JPS63160557U (2) | 1987-04-08 | 1987-04-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63160557U true JPS63160557U (2) | 1988-10-20 |
Family
ID=30878393
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987052851U Pending JPS63160557U (2) | 1987-04-08 | 1987-04-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63160557U (2) |
-
1987
- 1987-04-08 JP JP1987052851U patent/JPS63160557U/ja active Pending
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