JPS63164217U - - Google Patents
Info
- Publication number
- JPS63164217U JPS63164217U JP5761487U JP5761487U JPS63164217U JP S63164217 U JPS63164217 U JP S63164217U JP 5761487 U JP5761487 U JP 5761487U JP 5761487 U JP5761487 U JP 5761487U JP S63164217 U JPS63164217 U JP S63164217U
- Authority
- JP
- Japan
- Prior art keywords
- rotating shaft
- container
- motor
- chuck
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 229920002120 photoresistant polymer Polymers 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000011553 magnetic fluid Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5761487U JPS63164217U (cs) | 1987-04-16 | 1987-04-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5761487U JPS63164217U (cs) | 1987-04-16 | 1987-04-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63164217U true JPS63164217U (cs) | 1988-10-26 |
Family
ID=30887485
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5761487U Pending JPS63164217U (cs) | 1987-04-16 | 1987-04-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63164217U (cs) |
-
1987
- 1987-04-16 JP JP5761487U patent/JPS63164217U/ja active Pending
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