JPS6316703U - - Google Patents
Info
- Publication number
- JPS6316703U JPS6316703U JP1986110524U JP11052486U JPS6316703U JP S6316703 U JPS6316703 U JP S6316703U JP 1986110524 U JP1986110524 U JP 1986110524U JP 11052486 U JP11052486 U JP 11052486U JP S6316703 U JPS6316703 U JP S6316703U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- matching device
- wire
- generation chamber
- adjusting body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986110524U JPS6316703U (cs) | 1986-07-17 | 1986-07-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986110524U JPS6316703U (cs) | 1986-07-17 | 1986-07-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6316703U true JPS6316703U (cs) | 1988-02-03 |
Family
ID=30989604
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986110524U Pending JPS6316703U (cs) | 1986-07-17 | 1986-07-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6316703U (cs) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60217244A (ja) * | 1984-04-11 | 1985-10-30 | Kanto Jidosha Kogyo Kk | プラズマ前処理を伴う塗装法における塗膜の付着強度管理方法及び装置 |
| JPS611101A (ja) * | 1984-06-13 | 1986-01-07 | Fujitsu Ltd | マイクロ波処理装置 |
-
1986
- 1986-07-17 JP JP1986110524U patent/JPS6316703U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60217244A (ja) * | 1984-04-11 | 1985-10-30 | Kanto Jidosha Kogyo Kk | プラズマ前処理を伴う塗装法における塗膜の付着強度管理方法及び装置 |
| JPS611101A (ja) * | 1984-06-13 | 1986-01-07 | Fujitsu Ltd | マイクロ波処理装置 |