JPS63172128U - - Google Patents
Info
- Publication number
- JPS63172128U JPS63172128U JP6623487U JP6623487U JPS63172128U JP S63172128 U JPS63172128 U JP S63172128U JP 6623487 U JP6623487 U JP 6623487U JP 6623487 U JP6623487 U JP 6623487U JP S63172128 U JPS63172128 U JP S63172128U
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- heat treatment
- utility
- treatment apparatus
- model registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000005192 partition Methods 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6623487U JPS63172128U (2) | 1987-04-30 | 1987-04-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6623487U JPS63172128U (2) | 1987-04-30 | 1987-04-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63172128U true JPS63172128U (2) | 1988-11-09 |
Family
ID=30904051
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6623487U Pending JPS63172128U (2) | 1987-04-30 | 1987-04-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63172128U (2) |
-
1987
- 1987-04-30 JP JP6623487U patent/JPS63172128U/ja active Pending
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