JPS63176866U - - Google Patents
Info
- Publication number
- JPS63176866U JPS63176866U JP2471187U JP2471187U JPS63176866U JP S63176866 U JPS63176866 U JP S63176866U JP 2471187 U JP2471187 U JP 2471187U JP 2471187 U JP2471187 U JP 2471187U JP S63176866 U JPS63176866 U JP S63176866U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- track
- clean air
- communicates
- clean
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2471187U JPS63176866U (mo) | 1987-02-21 | 1987-02-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2471187U JPS63176866U (mo) | 1987-02-21 | 1987-02-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63176866U true JPS63176866U (mo) | 1988-11-16 |
Family
ID=30824190
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2471187U Pending JPS63176866U (mo) | 1987-02-21 | 1987-02-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63176866U (mo) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5522830A (en) * | 1978-08-04 | 1980-02-18 | Nippon Telegr & Teleph Corp <Ntt> | Unit cell for logic lsi chip |
-
1987
- 1987-02-21 JP JP2471187U patent/JPS63176866U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5522830A (en) * | 1978-08-04 | 1980-02-18 | Nippon Telegr & Teleph Corp <Ntt> | Unit cell for logic lsi chip |
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