JPS63185444U - - Google Patents
Info
- Publication number
- JPS63185444U JPS63185444U JP7598987U JP7598987U JPS63185444U JP S63185444 U JPS63185444 U JP S63185444U JP 7598987 U JP7598987 U JP 7598987U JP 7598987 U JP7598987 U JP 7598987U JP S63185444 U JPS63185444 U JP S63185444U
- Authority
- JP
- Japan
- Prior art keywords
- opening
- sample
- vacuum
- sample stage
- vacuum container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001105 regulatory effect Effects 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
第１図は本考案の一実施例を示す真空処理装置
の縦断面図、第２図は従来の真空処理装置を示す
縦断面図である。
１……真空容器、４……調圧バルブ、５……高
真空排気装置、６……粗引き排気装置、８……電
極、１０……電極上下機構。
FIG. 1 is a longitudinal sectional view of a vacuum processing apparatus showing an embodiment of the present invention, and FIG. 2 is a longitudinal sectional view showing a conventional vacuum processing apparatus. DESCRIPTION OF SYMBOLS 1... Vacuum container, 4... Pressure regulating valve, 5... High vacuum evacuation device, 6... Rough evacuation device, 8... Electrode, 10... Electrode up and down mechanism.
Claims (1)
器の下面に設けた開口部に真結して設けた真空排
気装置と、前記開口部を貫通し前記真空容器内に
試料を配置する試料台と、前記試料台を前記開口
部に対して上下動させる駆動装置とを具備し、前
記試料台で前記開口部を開閉可能としたことを特
徴とする真空処理装置。 A vacuum container in which a sample is processed, a vacuum exhaust device connected directly to an opening provided on the bottom surface of the vacuum container, and a sample stage that penetrates the opening and places the sample in the vacuum container. . A vacuum processing apparatus comprising: a drive device that moves the sample stage up and down with respect to the opening, and the opening can be opened and closed by the sample stage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7598987U JPS63185444U (en) | 1987-05-22 | 1987-05-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7598987U JPS63185444U (en) | 1987-05-22 | 1987-05-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63185444U true JPS63185444U (en) | 1988-11-29 |
Family
ID=30922650
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7598987U Pending JPS63185444U (en) | 1987-05-22 | 1987-05-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63185444U (en) |
-
1987
- 1987-05-22 JP JP7598987U patent/JPS63185444U/ja active Pending
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