JPS63193842U - - Google Patents

Info

Publication number
JPS63193842U
JPS63193842U JP1987084412U JP8441287U JPS63193842U JP S63193842 U JPS63193842 U JP S63193842U JP 1987084412 U JP1987084412 U JP 1987084412U JP 8441287 U JP8441287 U JP 8441287U JP S63193842 U JPS63193842 U JP S63193842U
Authority
JP
Japan
Prior art keywords
light
sample
light beam
sample stage
branching device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987084412U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987084412U priority Critical patent/JPS63193842U/ja
Publication of JPS63193842U publication Critical patent/JPS63193842U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP1987084412U 1987-05-30 1987-05-30 Pending JPS63193842U (2)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987084412U JPS63193842U (2) 1987-05-30 1987-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987084412U JPS63193842U (2) 1987-05-30 1987-05-30

Publications (1)

Publication Number Publication Date
JPS63193842U true JPS63193842U (2) 1988-12-14

Family

ID=30938888

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987084412U Pending JPS63193842U (2) 1987-05-30 1987-05-30

Country Status (1)

Country Link
JP (1) JPS63193842U (2)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20130005227A (ko) * 2011-07-05 2013-01-15 가부시기가이샤 디스코 사파이어 기판의 가공 방법

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20130005227A (ko) * 2011-07-05 2013-01-15 가부시기가이샤 디스코 사파이어 기판의 가공 방법
KR101876578B1 (ko) * 2011-07-05 2018-07-09 가부시기가이샤 디스코 사파이어 기판의 가공 방법

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