JPS63195728U - - Google Patents
Info
- Publication number
- JPS63195728U JPS63195728U JP8675187U JP8675187U JPS63195728U JP S63195728 U JPS63195728 U JP S63195728U JP 8675187 U JP8675187 U JP 8675187U JP 8675187 U JP8675187 U JP 8675187U JP S63195728 U JPS63195728 U JP S63195728U
- Authority
- JP
- Japan
- Prior art keywords
- chemical liquid
- reagent bottle
- chemical
- storage device
- liquid storage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 7
- 239000003153 chemical reaction reagent Substances 0.000 claims description 4
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000006386 neutralization reaction Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8675187U JPS63195728U (mo) | 1987-06-05 | 1987-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8675187U JPS63195728U (mo) | 1987-06-05 | 1987-06-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63195728U true JPS63195728U (mo) | 1988-12-16 |
Family
ID=30943352
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8675187U Pending JPS63195728U (mo) | 1987-06-05 | 1987-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63195728U (mo) |
-
1987
- 1987-06-05 JP JP8675187U patent/JPS63195728U/ja active Pending
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