JPS63199172U - - Google Patents
Info
- Publication number
- JPS63199172U JPS63199172U JP9120687U JP9120687U JPS63199172U JP S63199172 U JPS63199172 U JP S63199172U JP 9120687 U JP9120687 U JP 9120687U JP 9120687 U JP9120687 U JP 9120687U JP S63199172 U JPS63199172 U JP S63199172U
- Authority
- JP
- Japan
- Prior art keywords
- molecular beam
- pbn crucible
- crystal growth
- source cell
- sectional
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987091206U JPH072617Y2 (ja) | 1987-06-12 | 1987-06-12 | Ｐｂｎルツボの均一加熱機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987091206U JPH072617Y2 (ja) | 1987-06-12 | 1987-06-12 | Ｐｂｎルツボの均一加熱機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63199172U true JPS63199172U (2) | 1988-12-21 |
| JPH072617Y2 JPH072617Y2 (ja) | 1995-01-25 |
Family
ID=30951773
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987091206U Expired - Lifetime JPH072617Y2 (ja) | 1987-06-12 | 1987-06-12 | Ｐｂｎルツボの均一加熱機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH072617Y2 (2) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0322067U (2) * | 1989-07-07 | 1991-03-06 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60112690A (ja) * | 1983-11-18 | 1985-06-19 | Hitachi Ltd | 分子線結晶成長装置用蒸発源セル |
-
1987
- 1987-06-12 JP JP1987091206U patent/JPH072617Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60112690A (ja) * | 1983-11-18 | 1985-06-19 | Hitachi Ltd | 分子線結晶成長装置用蒸発源セル |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0322067U (2) * | 1989-07-07 | 1991-03-06 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH072617Y2 (ja) | 1995-01-25 |
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