JPS63201324U - - Google Patents

Info

Publication number
JPS63201324U
JPS63201324U JP9242587U JP9242587U JPS63201324U JP S63201324 U JPS63201324 U JP S63201324U JP 9242587 U JP9242587 U JP 9242587U JP 9242587 U JP9242587 U JP 9242587U JP S63201324 U JPS63201324 U JP S63201324U
Authority
JP
Japan
Prior art keywords
quartz tube
tube support
elevator according
adjuster
support stand
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9242587U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9242587U priority Critical patent/JPS63201324U/ja
Publication of JPS63201324U publication Critical patent/JPS63201324U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Furnace Charging Or Discharging (AREA)

Description

【図面の簡単な説明】
第１図は、この考案の実施例を示す要部正面図
、第２図は、使用状態を示す側面略図である。 ２……基台、３……柱部、９……石英管支持台
、１４……ローラ。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) 移動可能な基台の柱部に上下動可能な石英
    管支持台を設け、該石英管支持台の上面に石英管
    移送装置を設けたことを特徴とする石英管昇降機
    。 (2) 石英管支持台が、前後方向調整器と水平方
    向調整器とを備えていることを特徴とする実用新
    案登録請求の範囲第１項記載の石英管昇降機。 (3) 石英管支持台が、長手方向に傾斜させるた
    めの回転装置を備えていることを特徴とする実用
    新案登録請求の範囲第１項記載の石英管昇降機。
JP9242587U 1987-06-16 1987-06-16 Pending JPS63201324U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9242587U JPS63201324U (ja) 1987-06-16 1987-06-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9242587U JPS63201324U (ja) 1987-06-16 1987-06-16

Publications (1)

Publication Number Publication Date
JPS63201324U true JPS63201324U (ja) 1988-12-26

Family

ID=30954120

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9242587U Pending JPS63201324U (ja) 1987-06-16 1987-06-16

Country Status (1)

Country Link
JP (1) JPS63201324U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016018954A (ja) * 2014-07-10 2016-02-01 東京エレクトロン株式会社 搬送ロボット交換装置及び搬送ロボット交換方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016018954A (ja) * 2014-07-10 2016-02-01 東京エレクトロン株式会社 搬送ロボット交換装置及び搬送ロボット交換方法

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