JPS63201327U - - Google Patents
Info
- Publication number
- JPS63201327U JPS63201327U JP9276387U JP9276387U JPS63201327U JP S63201327 U JPS63201327 U JP S63201327U JP 9276387 U JP9276387 U JP 9276387U JP 9276387 U JP9276387 U JP 9276387U JP S63201327 U JPS63201327 U JP S63201327U
- Authority
- JP
- Japan
- Prior art keywords
- developing
- cup
- wafer
- spin chuck
- pure water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Description
第１図乃至第５図は本考案装置に係る実施例を
示すもので、第１図は本考案装置の断面図、第２
図は同装置の平面図、第３図及び第４図は液溜め
槽の動作説明図、第５図はスピンチヤツクの動作
説明図、第６図及び第７図は従来例を示すもので
、第６図は従来装置の断面図、第７図は同装置の
平面図である。
１……カツプ、１ａ……底部、２……モータ、
３……スピンチヤツク、４……駆動軸、６……現
像カツプ、６ｂ……貫通口、７……液溜め槽、１
０……シリンダ（第２のシリンダ）、１１……パ
イプ、１２……純水ノズル、Ａ……ウエハ。
1 to 5 show embodiments of the device according to the present invention, and FIG. 1 is a sectional view of the device according to the present invention, and FIG.
The figure is a plan view of the same device, Figures 3 and 4 are illustrations of the operation of the liquid reservoir, Figure 5 is an illustration of the operation of the spin chuck, and Figures 6 and 7 are conventional examples. FIG. 6 is a sectional view of a conventional device, and FIG. 7 is a plan view of the same device. 1...cup, 1a...bottom, 2...motor,
3...Spin chuck, 4...Drive shaft, 6...Developing cup, 6b...Through hole, 7...Liquid reservoir, 1
0... Cylinder (second cylinder), 11... Pipe, 12... Pure water nozzle, A... Wafer.
Claims (1)
ノズルとを配設したカツプ内に、現像液を溜めウ
エハを現像する現像カツプを内設し、 該現像カツプの開口部に、予め現像液を溜める
液溜め槽を傾動自在に周設し、 前記現像カツプの底部には、前記ウエハを真空
吸着するスピンチヤツクを遊嵌すると共に、前記
ウエハが密接する貫通口を形成し、 前記スピンチヤツクは、駆動軸を介してモータ
及び上下動するシリンダに連結したことを特徴と
する半導体製造装置。[Scope of Claim for Utility Model Registration] A developing cup for storing a developing solution and developing a wafer is installed inside a cup in which a pipe for discharging a developing solution and a pure water nozzle for discharging pure water are disposed, and the developing cup A liquid reservoir for storing a developing solution is provided around the opening of the developing cup so as to be tiltable, and a spin chuck for vacuum suctioning the wafer is loosely fitted to the bottom of the developing cup, and a through hole is provided in which the wafer is brought into close contact with the spin chuck. A semiconductor manufacturing apparatus characterized in that the spin chuck is connected to a motor and a vertically moving cylinder via a drive shaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9276387U JPH0539623Y2 (en) | 1987-06-18 | 1987-06-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9276387U JPH0539623Y2 (en) | 1987-06-18 | 1987-06-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63201327U true JPS63201327U (en) | 1988-12-26 |
| JPH0539623Y2 JPH0539623Y2 (en) | 1993-10-07 |
Family
ID=30954760
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9276387U Expired - Lifetime JPH0539623Y2 (en) | 1987-06-18 | 1987-06-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0539623Y2 (en) |
-
1987
- 1987-06-18 JP JP9276387U patent/JPH0539623Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0539623Y2 (en) | 1993-10-07 |