JPS63201601A - Optical window material and its production - Google Patents

Abstract

PURPOSE:To permit formation of a titled material to a larger area by forming film-shaped diamond on a base plate material by vapor synthesis method and fixing the outside circumferential part of the film-shaped diamond and a window frame-shaped rigid body, then removing only the base plate material. CONSTITUTION:After the film-shaped diamond 2 is formed on the base plate material by using the vapor synthesis method, the outside circumferential part of the film-shaped diamond and the window frame-shaped rigid body 3 are fixed by using metal solder or adhesive agent; thereafter, only the base plate material is removed by chemical dissolution or physical etching. The optical window material made of the film-shaped diamond consisting of the structure in which the central part consists of a single layer 2 of the film-shaped diamond and the window frame-shaped rigid body 3 encloses the outside circumferential part thereof is thus obtd. The resulted optical window material permits an increase of the area up to about 3-10cm diameter according to the film formable area of the vapor synthesis method adopted for the diamond synthesis thereof.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an optical window material made of diamond and a method for manufacturing the same.

[Summary of the invention]

The optical window material of the present invention is composed of a film-like diamond fixed onto a window frame-shaped rigid body. In order to obtain this optical window material, a film-like diamond is formed on a substrate.1. By adopting a manufacturing method in which the periphery of this diamond film is fixed to a rigid body shaped like a window frame, and only the substrate is then removed, it becomes possible to produce optical window materials over a large area and at low cost. It is something.

[Conventional technology]

As is well known, diamond has an ultraviolet wavelength of approximately 0.3μ.
It has excellent optical properties such as high light transmittance over a wide range from the IIA fil region to the far infrared region with a wavelength of about 25 μm, and other materials have a wide range comparable to diamond. There is no transparent substance found over the period, and the heat resistance is about 1200℃ in vacuum.
Because it is as high as 600°C in the atmosphere, it is expected to be a disadvantage as an optical window material.

However, when trying to manufacture optical window materials made of diamond using conventional technology, natural diamond crystals or artificial diamond crystals synthesized by ultra-high pressure synthesis are processed by slicing using a diamond wheel as a cutting tool. Although this method may be common, this method has serious drawbacks as described in the next section, and it is extremely difficult for general users to use diamond as an optical window material. The emergence of a manufacturing method was expected.

[Problem that the invention seeks to solve]

When trying to manufacture optical window materials by slicing diamond crystals, whether it is natural crystal or artificial crystal,
Diamonds with a diameter of several diameters or more are rare and extremely expensive, so for example, it is almost impossible to manufacture window materials with a large area of diameter lea or more.
Diamond has the highest hardness of all substances, so the diamond wheel used for slicing suffers from severe wear and tear, and the processing cost is extremely high.

The object of the present invention is to solve these problems and provide a method for manufacturing an optical window material made of diamond with good light transmission characteristics, which is inexpensive and can be made into a large area.

[Means for solving problems]

In the present invention, vapor phase synthesis methods for synthesizing film-like diamond include thermal CVD method, plasma CVD method, optical CVD method, and ion beam method.

There are ionization vapor deposition methods, and any method may be used.

After forming a film-like diamond on a substrate material using these vapor phase synthesis methods, the outer peripheral part of the film-like diamond and a rigid body in the shape of a window frame are fixed using metal solder or adhesive, Thereafter, only the substrate material is removed by chemical dissolution or physical etching.

In this way, a film-like diamond optical window material is obtained, which has a structure in which the central part is made of a single layer of film-like diamond and the outer peripheral part is surrounded by a rigid body shaped like a window frame, as shown in Fig. 1. .

The substrate material is generally a St single crystal wafer, but other materials such as metals, ceramics, etc. may also be used.

In addition, the material for the window frame-like rigid body should be one that can withstand the environmental conditions (e.g., temperature, applied stress, chemical atmosphere, etc.) in which the window material finally manufactured according to the present invention will be used. , metal, ceramics, synthetic resin, etc. may be used.

[Effect]

By configuring as described above, the obtained optical window material made of film-like diamond can have a diameter of about 3 to 10 cm, depending on the area that can be formed by the vapor phase synthesis method adopted for diamond synthesis. It is possible to enlarge the area, and compared to the conventional method of slicing diamond crystals, it is possible to enlarge the area, and it is also possible to reduce both raw material costs and manufacturing costs.

In addition, since the outer periphery of the film diamond is surrounded by a window frame-like rigid body, this suppresses the occurrence of warping of the film diamond, and also acts as a reinforcing material, preventing damage when attached to equipment. This is also an extremely important point of the present invention.

〔Example〕

Embodiments of the present invention will be described below based on the drawings. Second
Figures A to F are diagrams showing the manufacturing method of the present invention.
Figures A to F are abbreviated as Figures A to F.

As shown in Fig. 6, the thickness of S! Prepare a substrate material l made of single crystal, and coat the surface of this substrate material with H1SO4.
＋H! After thorough cleaning in a mixed acid solution of 20 μm, a diamond film 2 with a thickness of 20 μm is deposited on the Si substrate material in a mixed gas of CH4+Ht by microwave plasma CVD.

As the vapor phase synthesis method for film-shaped diamond, other vapor phase methods may be used as described above, and other materials such as metals, ceramics, etc. may be used for the substrate material.

Next, the outer peripheral part of the film-like diamond 2 deposited on which Si substrate material and the window frame-shaped rigid body 3 (Fig. 8) made of stainless steel Sυ5316 material are attached to the metal 11i.
4. For example, it is fixed using Ag11 (FIG. C). In this case, a different metal solder or adhesive may be used instead of the Ag solder.

Next, the entire structure in which the film-like diamond deposited on the Si substrate material and the window frame-shaped rigid body are fixed is immersed in heated and melted paraffin, pulled up, and covered with a resist film 5 made of paraffin. (Figure 1).

After that, Si of the resist film 5 made of this paraffin is
Only the portion covering the substrate material is scraped off by mechanical or chemical means to expose the Si substrate material 1 (Figure 8).
.

Next, a mixed acid solution of HF + HNO3 (mixing ratio 1:3)
The silicon substrate was immersed in the liquid for 30 minutes to dissolve and remove only the exposed Si substrate material 1, exposing the film-like diamond 2 (FIG. F).

After that, the resist film made of paraffin is dissolved and removed by immersion in Trichlorene or chloroform for 1 hour, so that the central part consists of a single layer of film-like diamond, and the outer peripheral part is removed, as shown in Figure 1. To obtain an optical window material having a structure surrounded by a window frame-like rigid body made of stainless steel 5US316 material.

The maximum diameter of the film-like diamond part of this window material is
It is possible to form a film up to approximately φ1 Oall, which is the maximum diameter that can be formed using the microwave plasma CVD method, and compared to the conventional method of slicing diamond crystals, it is possible to increase the area in terms of diameter by more than 10 times. Needless to say, both cost and manufacturing cost are low.

In addition, since the outer periphery of the film diamond is surrounded by a rigid body shaped like a window frame, this suppresses the occurrence of warping of the film diamond, and also acts as a reinforcing material, so that W! ! It also prevents damage when attaching to.

Of course, photoresist may also be used as a method for forming the resist film, and methods for removing the exposed Si substrate material include not only chemical melting using chemicals, but also methods for removing the exposed Si substrate material.
Physical etching methods such as oxygen atmosphere plasma etching and Ar sputtering may also be used.

〔Effect of the invention〕

As described above, according to the present invention, it is possible to increase the area of an optical window material made of diamond, and both raw material costs and manufacturing costs can be reduced. Moreover, it is possible to prevent warping and also to prevent damage during attachment to devices.

[Brief explanation of the drawing]

FIG. 1 is a perspective view of an optical window material made of film-shaped diamond according to the present invention, and FIGS. 2A to 2F are perspective views illustrating the manufacturing process of the present invention. 1...Substrate material 2...Film-like diamond 3...Window frame-shaped rigid body 4...Metal solder 5...Resist coating or more

Claims (1)

[Claims] An optical system characterized in that a film-like diamond is formed on a substrate material by a vapor phase synthesis method, and then the outer peripheral portion of the film-like diamond is fixed to a window frame-shaped rigid body, and then only the substrate material is removed. window material and its manufacturing method.