JPS63217675A - Composite piezoelectric material - Google Patents
Composite piezoelectric materialInfo
- Publication number
- JPS63217675A JPS63217675A JP62050285A JP5028587A JPS63217675A JP S63217675 A JPS63217675 A JP S63217675A JP 62050285 A JP62050285 A JP 62050285A JP 5028587 A JP5028587 A JP 5028587A JP S63217675 A JPS63217675 A JP S63217675A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- polymer
- piezoelectric material
- composite
- matrix
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 title abstract description 27
- 239000002131 composite material Substances 0.000 title abstract description 14
- 239000000919 ceramic Substances 0.000 abstract description 20
- 229920000642 polymer Polymers 0.000 abstract description 17
- 239000011159 matrix material Substances 0.000 abstract description 10
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 abstract description 3
- 239000000843 powder Substances 0.000 abstract description 3
- BRLQWZUYTZBJKN-UHFFFAOYSA-N Epichlorohydrin Chemical compound ClCC1CO1 BRLQWZUYTZBJKN-UHFFFAOYSA-N 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 7
- 239000002245 particle Substances 0.000 description 6
- 239000002033 PVDF binder Substances 0.000 description 5
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 5
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229920005558 epichlorohydrin rubber Polymers 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- LJCNRYVRMXRIQR-OLXYHTOASA-L potassium sodium L-tartrate Chemical compound [Na+].[K+].[O-]C(=O)[C@H](O)[C@@H](O)C([O-])=O LJCNRYVRMXRIQR-OLXYHTOASA-L 0.000 description 1
- 235000011006 sodium potassium tartrate Nutrition 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000001291 vacuum drying Methods 0.000 description 1
Landscapes
- Inorganic Insulating Materials (AREA)
Abstract
Description
【発明の詳細な説明】
Ａ、産業上の利用分野
この発明は電気−機械変換素子として使用する複合圧電
体材料、特にその圧電定数の向上に関するものである。DETAILED DESCRIPTION OF THE INVENTION A. Field of Industrial Application This invention relates to a composite piezoelectric material used as an electro-mechanical transducer, and particularly to improvement of its piezoelectric constant.
Ｂ９発明の概要
この発明はできるだけ圧電定数を向上させるようにした
複合圧電体材料に関するものであり、抵抗率が１０９〜
１０′１Ωｃｍの圧電性高分子中に、圧電性セラミック
ス粉を８０〜９５ｗｔ％分散させてなるものである。B9 Summary of the Invention This invention relates to a composite piezoelectric material whose piezoelectric constant is improved as much as possible, and whose resistivity is 109 to 10.
It is made by dispersing 80 to 95 wt% of piezoelectric ceramic powder in a piezoelectric polymer of 10'1 Ωcm.
Ｃ０従来の技術 電気−機械変換素子として圧電材料が使用されている。C0 conventional technology Piezoelectric materials are used as electro-mechanical transducers.
このような圧電材料としては、ロッシェル塩、水晶、セ
ラミックス、有機高分子などが知られている。Rochelle salt, crystal, ceramics, organic polymers, and the like are known as such piezoelectric materials.
セラミックス系圧電材料としてはチタン酸鉛（ＰｂＴｉ
０３ ）やチタン酸ジルコン酸鉛（ＰＺＴ）などが知
られている。Lead titanate (PbTi) is a ceramic piezoelectric material.
03) and lead zirconate titanate (PZT) are known.
有機高分子系圧電材料としてはポリフッ化ビニリデン（
ＰＶＤＦ）が知られている。Polyvinylidene fluoride (
PVDF) is known.
セラミックス系の圧電材料は圧電定数が高く、キューリ
一点を選択することで耐熱温度も自由に選択できるが、
硬くて脆く、加工性が悪いので、薄膜化、大面積化が困
難である。Ceramic piezoelectric materials have a high piezoelectric constant, and by selecting a single curie point, you can freely select the heat resistance temperature.
Since it is hard, brittle, and has poor workability, it is difficult to make it thin and have a large area.
これに対し、高分子系の圧電材料はセラミックス系の圧
電材料と比較して成形加工性が良く、薄膜化、大面積化
が可能であるが、圧電定数が低く、耐熱温度も８０〜１
００ｔ：までが限界である。On the other hand, polymer-based piezoelectric materials have better moldability than ceramic-based piezoelectric materials, and can be made into thinner films and larger areas, but they have a lower piezoelectric constant and a heat resistance temperature of 80 to 1
The limit is up to 00t.
このように、セラミックス系の圧電材料と高分子系の圧
電材料とはその長所と短所とが全く裏腹の関係になって
いる。In this way, ceramic-based piezoelectric materials and polymer-based piezoelectric materials have completely opposite advantages and disadvantages.
そこで、近年、セラミックス系の圧電材料の長所である
耐熱性と高分子系の圧電材料の長所である加工性、可撓
性とを併せ持った複合圧電体材料が開発されてきている
。Therefore, in recent years, composite piezoelectric materials have been developed that have both the heat resistance, which is an advantage of ceramic-based piezoelectric materials, and the workability and flexibility, which are advantages of polymer-based piezoelectric materials.
Ｄ９発明が解決しようとする問題点
しかし、上記のような従来の複合圧電体材料では、セラ
ミックス系圧電材料と比較して、圧電定数を充分高くで
きないという問題点がある。D9 Problems to be Solved by the Invention However, the conventional composite piezoelectric materials as described above have a problem in that the piezoelectric constant cannot be made sufficiently high compared to ceramic-based piezoelectric materials.
この発明は、かかる問題点を解決するためになされたも
ので、圧電定数をできるだけ高くした複合圧電体材料を
得ることを目的とするものである。The present invention was made to solve these problems, and its object is to obtain a composite piezoelectric material with a piezoelectric constant as high as possible.
ところで、複合圧電体材料で圧電定数を高めるには、
（１）分散させるセラミックス粒子として、高い圧電定
数と低い比誘電率 （εｒ）とを兼備したものを用いる
、
（２）分散させるセラミックス粒子の充填率を高める、
（３）マトリックスとして使用する高分子の絶縁性を高
める、
（４）マトリックスとして使用する高分子の比８Ｍ電率
を高める、
といった４通りが考えられる。By the way, in order to increase the piezoelectric constant of a composite piezoelectric material, (1) use ceramic particles that have both a high piezoelectric constant and a low relative dielectric constant (εr) as the ceramic particles to be dispersed; (2) use ceramic particles that have a high piezoelectric constant and a low relative permittivity (εr); There are four possible methods: (3) increasing the insulating properties of the polymer used as the matrix; and (4) increasing the 8M electrical conductivity of the polymer used as the matrix.
しかし、（１）のように、分散させるセラミックス粒子
として、高い圧電定数と低い比誘電率（εｒ）とを兼備
したものを用いようとしても、セラミックスの比誘電率
（εｒ）を低くすると、圧電定数（ｄ）が低下してし
まうことになる。However, as in (1), even if you try to use ceramic particles that have both a high piezoelectric constant and a low relative permittivity (εr) to be dispersed, if the relative permittivity (εr) of the ceramic is lowered, the piezoelectric This results in a decrease in the constant (d).
（２）のように、分散させるセラミックス粒子の充填率
を高めると、複合圧電体材料の柔軟性が損なわれ、加工
性が悪くなってしまうことになる。As in (2), if the filling rate of the ceramic particles to be dispersed is increased, the flexibility of the composite piezoelectric material will be impaired and the workability will be deteriorated.
高分子の絶縁性である破壊電圧はどの材料でもほぼ２０
ｋｖ／ｍ＋ｎ程度であるので、（３）のように、絶縁
性の高い高分子をマトリックスとして使用して圧電定数
を高くするのは不可能である。しかも、複合化すると電
気絶縁性はこの値の半分程度にまで低下してしまうこと
になる。The breakdown voltage, which is the insulating property of polymers, is approximately 20 for any material.
kv/m+n, it is impossible to increase the piezoelectric constant by using a highly insulating polymer as a matrix as in (3). Moreover, when it is made into a composite material, the electrical insulation property decreases to about half of this value.
（４）のように、マトリックスとして使用する高分子の
比誘電率 （ε、）を高めると、圧電材料の絶縁性が悪
くなってしまうことになる。As shown in (4), if the dielectric constant (ε,) of the polymer used as a matrix is increased, the insulation properties of the piezoelectric material will deteriorate.
Ｅ９問題点を解決するための手段と作用ところが、（４
）について、比誘電率 （εｒ）を高めると絶縁性が落
ちるという欠点は、逆に言えば許容範囲内で絶縁性を落
とせば比誘電率 （６ｒ）を比較的高くできる、という
考え方ができることになる。E9Means and actions to solve the problemHowever, (4
), the disadvantage that increasing the relative permittivity (εr) lowers the insulation properties can be conversely considered to be that the relative permittivity (6r) can be made relatively high by lowering the insulation properties within the allowable range. Become.
この発明はかかる考え方に基いてなされたもので、抵抗
率が１０９〜１０１１Ωｃｍの高分子をマトリックスと
して用い、その中に分散させるセラミックスの量を８０
ｗｔ％以上としたことを特徴とするものである。This invention was made based on this idea, and uses a polymer having a resistivity of 109 to 1011 Ωcm as a matrix, and the amount of ceramics dispersed in the matrix is 80
It is characterized in that it is at least wt%.
マトリックスとして用いる高分子としては、高抵抗領域
（絶縁領域）を微細にコントロールできる高分子、例え
ばエピクロルヒドリンラバー（例えば、大阪曹達■；エ
ビクロマ−）を使用することができる。また、セラミッ
クスとしては圧電性発現物質、例えばチタン酸ジルコン
酸鉛（ＰＺＴ：粒径３０μｍ以下）を使用することがで
きる。As the polymer used as the matrix, a polymer that can finely control the high resistance region (insulating region), such as epichlorohydrin rubber (eg, Osaka Soda ■; Ebichromer), can be used. Furthermore, as the ceramic, a piezoelectric material such as lead zirconate titanate (PZT: particle size of 30 μm or less) can be used.
Ｆ、実施例
実施例１〜５及び比較例１
エビクロマ−（大阪曹達）のトルエン溶液中にＰＺＴを
下記の第１表に示す割合で加え、ブラベンダーで混合し
、これをＤｒ、Ｂｌａｄｅ法によりガラス板上に展開し
、真空乾燥炉中にて乾燥させ、膜状の複合圧電材を得た
。F. Examples Examples 1 to 5 and Comparative Example 1 PZT was added to a toluene solution of Ebichroma (Osaka Soda) in the proportions shown in Table 1 below, mixed with a Brabender, and mixed by the Dr. Blade method. It was spread on a glass plate and dried in a vacuum drying oven to obtain a film-like composite piezoelectric material.
第１表
ＰＺＴ エビクロマ−
この複合圧電材を所定のサイズに切り出し、スパッタリ
ングにて表裏面に電極付けを行い、８０℃の恒温槽にて
１２ ｋｖ／ｍｍ以上の直流電界を３４ｈ以上印加し、
急冷して圧電素子を得た。Table 1: PZT Ebichroma - This composite piezoelectric material was cut to a predetermined size, electrodes were attached to the front and back surfaces by sputtering, and a DC electric field of 12 kv/mm or more was applied for 34 hours or more in a constant temperature bath at 80°C.
A piezoelectric element was obtained by rapid cooling.
そして、その比誘電率 （εｒ）と、圧電定数（ｄ）を
測定した。Then, its relative dielectric constant (εr) and piezoelectric constant (d) were measured.
比較例−１
比較のために、ポリフッ化ビニリデン（ＰＶＤＦ）のジ
メチルフォルムアミド
ＰＺＴを加え、実施例と同様にして試料を得、その比誘
電率 （εｒ）と、圧電定数（ｄ）を測定した。Comparative Example-1 For comparison, dimethylformamide PZT of polyvinylidene fluoride (PVDF) was added, a sample was obtained in the same manner as in the example, and its relative dielectric constant (εr) and piezoelectric constant (d) were measured. .
結果を第２表に併せて示す。The results are also shown in Table 2.
第２表
比較例Ｉ ＰＶＤＦ ９０ １５０
１８Ｇ．発明の効果
この発明は以上説明したように抵抗率が１０９〜１０１
１Ωｃｍの圧電性高分子中に、圧電性セラミックス粉を
８５〜９２ｗｔ％分散させてなるので、従来の複合圧電
体材料と比較して圧電定数の高い複合圧電体材料を得る
ことができるという効果がある。Table 2 Comparative Example I PVDF 90 150
18G. Effects of the Invention As explained above, this invention has a resistivity of 109 to 101.
Since 85 to 92 wt% of piezoelectric ceramic powder is dispersed in a 1Ωcm piezoelectric polymer, it has the effect of being able to obtain a composite piezoelectric material with a higher piezoelectric constant than conventional composite piezoelectric materials. be.
Claims (5)
高分子中に、圧電性セラミックス粉を８５〜９２ｗｔ％
分散させてなる複合圧電体材料。(1) 85 to 92 wt% piezoelectric ceramic powder in a piezoelectric polymer with a resistivity of 10^9 to 10^1^1 Ωcm
Composite piezoelectric material made by dispersing.
ントロールできるものであることを特徴とする特許請求
の範囲第１項に記載の複合圧電体材料。(2) The composite piezoelectric material according to claim 1, wherein the piezoelectric polymer is capable of controlling a high resistance region (insulating region).
る圧電性高分子がエピクロルヒドリンラバーであること
を特徴とする特許請求の範囲第２項に記載の複合圧電体
材料。(3) The composite piezoelectric material according to claim 2, wherein the piezoelectric polymer capable of controlling the high resistance region (insulating region) is epichlorohydrin rubber.
鉛（ＰＺＴ）粉であることを特徴とする特許請求の範囲
第１項に記載の複合圧電体材料。(4) The composite piezoelectric material according to claim 1, wherein the piezoelectric ceramic powder is lead zirconate titanate (PZT) powder.
０μｍ以下のものであることを特徴とする特許請求の範
囲第４項に記載の複合圧電体材料。(5) The lead zirconate titanate (PZT) powder has a particle size of 3
The composite piezoelectric material according to claim 4, wherein the composite piezoelectric material has a thickness of 0 μm or less.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62050285A JPS63217675A (en) | 1987-03-06 | 1987-03-06 | Composite piezoelectric material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62050285A JPS63217675A (en) | 1987-03-06 | 1987-03-06 | Composite piezoelectric material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63217675A true JPS63217675A (en) | 1988-09-09 |
Family
ID=12854648
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62050285A Pending JPS63217675A (en) | 1987-03-06 | 1987-03-06 | Composite piezoelectric material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63217675A (en) |
-
1987
- 1987-03-06 JP JP62050285A patent/JPS63217675A/en active Pending
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