JPS6322085B2 - - Google Patents

Info

Publication number
JPS6322085B2
JPS6322085B2 JP14006679A JP14006679A JPS6322085B2 JP S6322085 B2 JPS6322085 B2 JP S6322085B2 JP 14006679 A JP14006679 A JP 14006679A JP 14006679 A JP14006679 A JP 14006679A JP S6322085 B2 JPS6322085 B2 JP S6322085B2
Authority
JP
Japan
Prior art keywords
vibration
frequency
approximately
rectangular
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14006679A
Other languages
Japanese (ja)
Other versions
JPS5664510A (en
Inventor
Shunichi Monobukuro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP14006679A priority Critical patent/JPS5664510A/en
Publication of JPS5664510A publication Critical patent/JPS5664510A/en
Publication of JPS6322085B2 publication Critical patent/JPS6322085B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02007Details of bulk acoustic wave devices
    • H03H9/02157Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Description

【発明の詳細な説明】 本発明は平面形状がほぼ矩形のATカツト水晶
振動子に関し、特に寄生振動の周波数が主振であ
る厚みすべり振動の周波数から十分離れていて、
主振の共振尖鋭度および共振周波数の周波数温度
特性の優れた小型の矩形ATカツト水晶振動子に
関するものである。
[Detailed Description of the Invention] The present invention relates to an AT-cut crystal resonator having a substantially rectangular planar shape, in particular, in which the frequency of parasitic vibration is sufficiently far from the frequency of thickness-shear vibration, which is the main vibration,
This invention relates to a small rectangular AT-cut crystal resonator with excellent resonance sharpness of the main vibration and frequency-temperature characteristics of the resonance frequency.

従来、ATカツト水晶振動子はその周波数温度
特性が優れ、通信機用の振動子として広く使用さ
れているが、その形状は輪郭対厚み寸法比が極め
て大きく、例えば腕時計に用いるような小容積を
要求される場合には不向きであつた。そこで矩形
のATカツト水晶振動子の発案も成されている
が、現状の長さ対厚み寸法比は大きく不充分であ
るとともに、寸法比を小さくすると寄生振動との
結合が強くなり周波数温度特性や共振尖鋭度を著
しく悪化させ、真に小型の矩形ATカツト水晶振
動子が得られていないのが現状である。また更に
ATカツト特有の3次曲線で示される周波数温度
特性の変曲点温度は、携帯用例えば腕時計用振動
子として用いるためには常温付近であることが望
ましく、この点でも小型化は不利であるとされて
いた。
Conventionally, AT-cut crystal resonators have excellent frequency-temperature characteristics and are widely used as resonators for communication devices, but their shape has an extremely large profile-to-thickness ratio, making them difficult to fit into small volumes such as those used in wristwatches. It was unsuitable when required. Therefore, a rectangular AT-cut crystal resonator has been proposed, but the current length-to-thickness ratio is largely inadequate, and reducing the ratio also strengthens the coupling with parasitic vibrations, resulting in poor frequency-temperature characteristics. At present, the resonance sharpness is significantly deteriorated, and a truly small rectangular AT-cut crystal resonator cannot be obtained. And even more
The inflection point temperature of the frequency-temperature characteristic shown by the cubic curve unique to AT cuts is preferably around room temperature in order to be used as a vibrator for a portable watch, for example, and in this respect too, miniaturization is disadvantageous. It had been.

本発明は、上記欠点を除去し腕時計に用いるこ
とができる程十分に小型でありながら、寄生振動
の悪影響を受けず、共振尖鋭度が高く、しかも周
波数温度特性曲線の変曲点温度が常温付近にある
矩形ATカツト水晶振動子を提供することを目的
とする。
The present invention eliminates the above drawbacks and is small enough to be used in wristwatches, is not affected by parasitic vibrations, has high resonance sharpness, and has an inflection point temperature of the frequency-temperature characteristic curve near room temperature. The purpose is to provide a rectangular AT cut crystal resonator.

以下図示した実施例を参照しながら本発明の詳
細を説明する。なお、以下の実施例においては、
右手糸座標軸を用いて右水晶について説明する
が、左水晶の場合には、左手糸座標におきかえ解
釈すれば同じ事である。
The details of the present invention will be explained below with reference to the illustrated embodiments. In addition, in the following examples,
The right-hand crystal will be explained using the right-hand thread coordinate axis, but in the case of the left-hand crystal, the same thing can be said if the interpretation is changed to the left-hand thread coordinate.

第1図は、矩形ATカツト水晶振動子の軸方位
を示す図である。水晶片1は単純矩形の形で示さ
れている。水晶のX軸の正方向(+方向ともい
う)を手前にして、X軸のまわりに左へ切断角θ
(約35゜)回転させた新しい座標X,Y′,Z′におい
て、水晶1の長さlをほぼX軸方向に、厚みtを
ほぼY′軸方向に、幅wをZ′軸方向にそれぞれ選
ぶ。
FIG. 1 is a diagram showing the axial orientation of a rectangular AT-cut crystal resonator. The crystal blank 1 is shown in the form of a simple rectangle. With the positive direction (also called + direction) of the crystal's X-axis in front, cut angle θ to the left around the X-axis.
At the new coordinates X, Y', and Z' rotated by approximately 35 degrees, the length l of the crystal 1 is approximately in the X-axis direction, the thickness t is approximately in the Y'-axis direction, and the width w is approximately in the Z'-axis direction. Choose each.

第2図は、本発明の一実施例を示す矩形ATカ
ツト水晶振動子の斜視図である。2は水晶片で、
長さ寸法をl、幅寸法をw、厚み寸法をtで示し
てある。3はベベル部であり、長さの両端部に向
つて厚みが減少し、両端部の厚みt0は水晶片厚み
tより薄くすれば、共振尖鋭度、等価抵抗の上で
好ましい。X−Z′面つまり平面形状はほぼ矩形で
あり、X−Z′面の上下面に金や銀などで電極を設
けて矩形ATカツト水晶振動子が構成される。
FIG. 2 is a perspective view of a rectangular AT-cut crystal resonator showing one embodiment of the present invention. 2 is a crystal piece,
The length dimension is indicated by l, the width dimension by w, and the thickness dimension by t. Reference numeral 3 denotes a bevel portion, the thickness of which decreases toward both ends of the length, and it is preferable in terms of resonance sharpness and equivalent resistance that the thickness t 0 of both ends be thinner than the crystal blank thickness t. The X-Z' plane, that is, the planar shape is approximately rectangular, and a rectangular AT-cut crystal resonator is constructed by providing electrodes of gold, silver, etc. on the upper and lower surfaces of the X-Z' plane.

尚、厚みtは、水晶片に厚みすべり振動を励振
するための電極を設けてある部分(この部分を主
要振動部という)の厚みの代表値をもつて表わす
ものとする。またベベル形状にする理由は、寄生
振動と主振動である厚みすべり振動との結合を弱
めると共に、厚みすべり振動のエネルギーを板面
中央に集中させて、支持した際に共振尖鋭度の低
下を防ぐためである。また第3図に示すような面
取りされたものも本発明のベベル形状に含まれ
る。
Note that the thickness t is expressed as a representative value of the thickness of a portion of the crystal piece where an electrode for exciting thickness-shear vibration is provided (this portion is referred to as the main vibrating portion). The reason for the bevel shape is that it weakens the coupling between parasitic vibration and the main vibration, thickness shear vibration, and also concentrates the energy of thickness shear vibration in the center of the plate surface, thereby preventing a decrease in resonance sharpness when supported. It's for a reason. Furthermore, a beveled shape as shown in FIG. 3 is also included in the bevel shape of the present invention.

また、ベベル形状の代わりに第4図に示すコン
ベツクス形状や、第5図a,bに示す板面片側の
みのプラノベベルやプラノコンベツクス形状など
でもよい。また第1図に示されるような単純矩形
の場合でも良いことは言うまでもない。
Further, instead of the bevel shape, a convex shape as shown in FIG. 4, a plano bevel or plano convex shape on only one side of the plate surface as shown in FIGS. 5a and 5b may be used. It goes without saying that a simple rectangle as shown in FIG. 1 may also be used.

ATカツト水晶振動子は、主振は厚みすべり振
動であるが、輪郭振動などの寄生振動も数多く存
在する。主振の共振尖鋭度や周波数温度特性など
を良好にするためには、是非この寄生振動を避け
なければならない。そこで主振付近の寄生振動を
克明に調べ周波数レスポンスの大きい寄生振動を
十分に主振から遠ざけるとともに、周波数レスポ
ンスの小さい寄生振動も主振から必要な周波数間
隔だけ遠ざけた寸法比を見い出さなければならな
い。
The main vibration of the AT cut crystal resonator is thickness shear vibration, but there are also many parasitic vibrations such as contour vibration. This parasitic vibration must be avoided in order to improve the resonance sharpness of the main vibration and the frequency-temperature characteristics. Therefore, it is necessary to carefully examine the parasitic vibrations near the main vibration and find a size ratio that allows parasitic vibrations with a large frequency response to be sufficiently far away from the main vibration, and parasitic vibrations with a small frequency response to be separated from the main vibration by the necessary frequency interval. .

そこで、先ず幅wを決定するために、幅寸法に
関し特に周波数レスポンスの大きい幅すべり振動
を十分に主振から離さなければならない。幅すべ
り振動は、 で与えられる。但しnはオーバートーン次数、ρ
は密度、C′55はX、Y′、Z′座標軸における弾性定
数である。そこで幅すべり振動の共振周波数f
が、厚みすべり振動の共振周波数fと等しくなる
w/tを計算により求めると、矩形ATカツト水
晶振動子の場合w/t=1.5nとなる。ここで、従
来、この幅すべり振動は、nが奇数時のみ現われ
ると考えられていたが、我々の実験によれば偶数
時であるn=2即ち、w/t=3の時にも出現
し、厚みすべり振動と結合することを見い出し
た。つまり幅すべり振動は、偶数時の振動も厚み
すべり振動の周波数温度特性や共振尖鋭度などに
大きな悪影響を与えるものである。そこで、小型
の矩形ATカツト水晶振動子の幅寸法は、幅すべ
り振動を避けたw/tを3から1.5の間の適切な
寸法にすることが望ましい。
Therefore, first, in order to determine the width w, it is necessary to sufficiently separate the width shear vibration, which has a particularly large frequency response with respect to the width dimension, from the main vibration. The width shear vibration is is given by However, n is the overtone order, ρ
is the density, and C' 55 is the elastic constant in the X, Y', and Z' coordinate axes. Therefore, the resonant frequency f of width shear vibration
However, when w/t is calculated to be equal to the resonant frequency f of the thickness shear vibration, w/t=1.5n in the case of a rectangular AT-cut crystal resonator. Here, it was conventionally thought that this width-shear vibration appeared only when n was an odd number, but according to our experiments, it also appears when n = 2, that is, w/t = 3, which is an even number. We found that it is coupled with thickness shear vibration. In other words, even width shear vibrations have a large adverse effect on the frequency-temperature characteristics and resonance sharpness of thickness shear vibrations, even when the number is even. Therefore, it is desirable that the width of the small rectangular AT-cut crystal resonator be set to an appropriate size with w/t between 3 and 1.5 to avoid width shear vibration.

次に長さlを決定するために、長さ寸法に関
し、特に周波数レスポンスが大きく、主振である
厚みすべり振動との結合が強い屈曲振動を主振か
ら十分離さなければならない。屈曲振動の共振周
波数fは、 で与えられる。但しnはオーバートーン次数(偶
数)、ρは密度である。一般に、長さlが小さく
なると共振尖鋭度が小さくなる。腕時計用振動子
としては、より小型化が必要なので、n=10とn
=12の間にl寸法を選べば、小型で十分な共振尖
鋭度が得られる。そこでn=10とn=12のとき、
l/tは約7.8および約9.6で主振と屈曲振動との
周波数が等しくなり結合する。すなわちl/tが
約7.8と約9.6の間の寸法比であれば、屈曲振動の
悪影響を避ける寸法領域があると考えられる。
Next, in order to determine the length l, regarding the length dimension, it is necessary to sufficiently separate the bending vibration, which has a particularly large frequency response and is strongly coupled to the main vibration, the thickness shear vibration, from the main vibration. The resonance frequency f of bending vibration is is given by However, n is the overtone order (even number), and ρ is the density. Generally, as the length l becomes smaller, the resonance sharpness becomes smaller. As a watch vibrator, it is necessary to make it more compact, so n = 10 and n
If the l dimension is selected between =12, sufficient resonance sharpness can be obtained with a small size. So when n=10 and n=12,
When l/t is about 7.8 and about 9.6, the frequencies of the main vibration and the bending vibration become equal and they are combined. That is, if l/t is a dimensional ratio between about 7.8 and about 9.6, it is considered that there is a dimensional range in which the adverse effects of bending vibration can be avoided.

しかしながら、特に周波数レスポンスの大きい
寄生振動である幅すべり振動と屈曲振動を避けた
上記寸法比の領域内であつても、他に周波数レス
ポンスの小さい数多くの寄生振動が存在して主振
に悪影響を与える。そこで、共振尖鋭度や周波数
温度特性などを良好にするためには、是非この周
波数レスポンスの小さい寄生振動の周波数も主振
の周波数からある程度遠ざけなければならない。
However, even within the above dimension ratio range that avoids width-shear vibration and bending vibration, which are parasitic vibrations with a particularly large frequency response, there are many other parasitic vibrations with a small frequency response that adversely affect the main vibration. give. Therefore, in order to improve resonance sharpness, frequency temperature characteristics, etc., the frequency of this parasitic vibration with a small frequency response must be kept away from the main vibration frequency to some extent.

そこで、周波数レスポンスの小さい寄生振動と
共振尖鋭度を調べるため、幅すべり振動を避けた
寸法比w/t≒2.5一定で、屈曲振動を避けた寸
法比l/tが約7.8と約9.4の間を小刻みに変え、
それぞれの周波数レスポンスと等価抵抗R1を調
べた。第6図は、その時の周波数レスポンスの変
化を示すモードチヤート図である。図中Mは厚み
すべり振動、直線群は寄生振動を示す。実験は、
主振を約4.2MHzねらいで行なつたので、各l寸
法によつて多少厚み寸法tが異なる。第6図から
主振が約4.2MHzの時l寸法は約3.23〜3.42mmの長
さすなわちl/t寸法比約7.9〜約8.4の寸法比が
主振の近くに寄生振動がなく良好な寸法領域であ
る。第7図は、w/t≒2.5一定の時、長さ対厚
み寸法比l/tに対する矩形ATカツト水晶振動
子の等価抵抗R1を示す図である。縦軸はl/t
が8.1の時の等価抵抗を1としてその倍率で示し
てある。●印は各寸法比において各6個の試料の
平均値を示すものである。第7図から、l/tが
約7.9〜約8.4の間の等価抵抗は小さく、わずかな
l/t寸法比の変化に対しても他のl/t寸法比
に比べて変化が小さく、共振尖鋭度を高く保つこ
とができる。
Therefore, in order to investigate parasitic vibration with a small frequency response and resonance sharpness, the dimension ratio w/t that avoids width-shear vibration is constant at ≒ 2.5, and the dimension ratio l/t that avoids bending vibration is between approximately 7.8 and approximately 9.4. change it little by little,
The frequency response and equivalent resistance R 1 of each were investigated. FIG. 6 is a mode chart showing changes in frequency response at that time. In the figure, M indicates thickness shear vibration, and the straight line group indicates parasitic vibration. The experiment is
Since the main vibration was aimed at approximately 4.2 MHz, the thickness t differs somewhat depending on each l dimension. From Figure 6, when the main vibration is about 4.2MHz, the l dimension is about 3.23 to 3.42 mm, that is, the l/t dimension ratio is about 7.9 to about 8.4, which is a good dimension with no parasitic vibration near the main vibration. It is an area. FIG. 7 is a diagram showing the equivalent resistance R 1 of a rectangular AT-cut crystal resonator with respect to the length-to-thickness ratio l/t when w/t≈2.5. The vertical axis is l/t
The equivalent resistance when is 8.1 is assumed to be 1 and is shown as a magnification. The ● mark indicates the average value of six samples for each size ratio. From Fig. 7, the equivalent resistance is small when l/t is between about 7.9 and about 8.4, and even a slight change in l/t dimensional ratio causes a smaller change compared to other l/t dimensional ratios, resulting in resonance. High sharpness can be maintained.

次に、周波数温度特性の傾きと、長さ対厚み寸
法比l/tとの関係について説明する。第8図は
長さ対厚み寸法比l/tに対する周波数温度特性
曲線の傾きを示す図で、ベベル形状のものであ
り、周波数温度特性曲線の傾き∂(△f/f)/
∂Tは温度T=20℃での傾きである。第8図に用
いた試料は、第7図に用いた試料と同じもので、
切断角θは34゜48′のものである。第8図から、周
波数温度特性曲線の傾きは、l/tによつて変化
することが分り、l/t寸法の変化に対する勾配
が大きいとl/tの加工精度がより厳しくなり、
量産性の点で不利となる。つまりl/t寸法比変
化に対して比較的平坦な領域は、l/tが約7.9
〜約8.4の間で、加工精度の上で、他のl/tに
比較して良好であることが分る。また常温付近で
平坦な周波数温度特性曲線を得るためには、切断
角θをl/tの値に従つて零温度係数になるよう
に補正すればよい。
Next, the relationship between the slope of the frequency temperature characteristic and the length-to-thickness ratio l/t will be explained. FIG. 8 is a diagram showing the slope of the frequency-temperature characteristic curve with respect to the length-to-thickness ratio l/t. It is a bevel-shaped one, and the slope of the frequency-temperature characteristic curve is ∂(△f/f)/
∂T is the slope at temperature T=20°C. The sample used in Figure 8 is the same as the sample used in Figure 7,
The cutting angle θ is 34°48′. From FIG. 8, it can be seen that the slope of the frequency-temperature characteristic curve changes depending on l/t, and when the slope with respect to the change in l/t dimension is large, the processing accuracy of l/t becomes stricter.
This is disadvantageous in terms of mass production. In other words, in a region that is relatively flat against changes in the l/t dimension ratio, l/t is approximately 7.9
It can be seen that the machining accuracy is better in comparison to other l/t values between ~8.4 and 8.4. Furthermore, in order to obtain a flat frequency-temperature characteristic curve near room temperature, the cutting angle θ may be corrected so as to have a zero temperature coefficient according to the value of l/t.

以上からl/tに関しては約7.9〜約8.4の間の
領域が、寄生振動を避け、共振尖鋭度が高く、加
工精度の点で良好な寸法比である。しかし、この
l/t領域内でw/tを自由に選ぶことは寄生振
動上の理由からできない。
From the above, regarding l/t, a region between about 7.9 and about 8.4 avoids parasitic vibration, has high resonance sharpness, and has a good dimensional ratio in terms of processing accuracy. However, it is not possible to freely select w/t within this l/t region due to parasitic vibration reasons.

以下に、l/tが約7.9〜約8.4近辺でw/tに
関しても周波数レスポンスの小さい寄生振動の悪
影響をさけた本発明のw/t、l/t寸法領域を
述べる。
Below, we will describe the w/t and l/t dimensional range of the present invention, which avoids the adverse effects of parasitic vibrations with a small frequency response in terms of w/t when l/t is around about 7.9 to about 8.4.

w/t≒2.5とl/t≒8.2近辺の周波数レスポ
ンスの小さい寄生振動を詳細に調べるため、第2
図に示す本発明の水晶片2において、w/t≒
2.5、l/t≒8.2に中心値を選んだ水晶振動子の
幅w及び長さlを小刻みに変え、それぞれの場合
の周波数レスポンスを測定した。第9図aは幅w
を変えたとき、第9図bは長さlを変えた時の周
波数レスポンスの変化を示すモードチヤート図で
あり、直線群は実測値を結んだものであり、縦軸
は周波数定数f・tを示す。
In order to investigate in detail the parasitic vibrations with small frequency responses around w/t≒2.5 and l/t≒8.2,
In the crystal blank 2 of the present invention shown in the figure, w/t≒
2.5, the center value of l/t≈8.2 was selected, and the width w and length l of the crystal resonator were changed little by little, and the frequency response in each case was measured. Figure 9a is the width w
Figure 9b is a mode chart showing the change in frequency response when the length l is changed, and the straight line group connects the measured values, and the vertical axis is the frequency constant f・t. shows.

第9図a及びbに示す直線Eは主振の厚みすべ
り振動で、周波数定数は約1716KHz・mmである。
直線F、G、H、Iは寄生振動である。これらの
直線の傾きは、微小領域においては、ほぼ直線で
示される。ここでw/tおよびl/tを決定する
際に注意する寄生振動は直線F、G、H、Iであ
る。これら4個の寄生振動の周波数定数をw/t
およびl/tの関数として示すと次の如くにな
る。ここで、単位はKHz・mmである。
Straight line E shown in Figures 9a and 9b represents the main thickness shear vibration, and the frequency constant is approximately 1716 KHz·mm.
Straight lines F, G, H, and I are parasitic vibrations. The slopes of these straight lines are approximately straight lines in minute regions. Here, the parasitic vibrations to be noted when determining w/t and l/t are straight lines F, G, H, and I. The frequency constants of these four parasitic vibrations w/t
And when expressed as a function of l/t, it is as follows. Here, the unit is KHz·mm.

直線F fF・t=−457.5w/t−72.7l/t+
3430.2 直線G fG・t=−52.5w/t−216.3l/t+
355.10 直線H fH・t=−267.0w/t−130.0l/t+
3492.6 直線I fI・t=−86.0w/t−204.2l/t+
3647.2 厚みすべり振動Eがこれら4個の寄生振動の影
響を受けないためには、厚みすべりの周波数定数
(ここで1716KHz一定とみなす)をfE・tとする
と、次式を満足しなければならない。
Straight line F f F・t=-457.5w/t-72.7l/t+
3430.2 Straight line G f G・t=−52.5w/t−216.3l/t+
355.10 Straight line H f H・t=-267.0w/t-130.0l/t+
3492.6 Straight line I f I・t=−86.0w/t−204.2l/t+
3647.2 In order for the thickness shear vibration E to be unaffected by these four parasitic vibrations, the following equation must be satisfied, assuming that the frequency constant of the thickness shear (assumed to be constant at 1716 KHz) is f E・t .

fE・t≧fF・t、fE・t≧fG・t fE・t≦fH・t、fE・t≦fI・t ところで、厚みすべり振動Eの周波数は電極の
厚みにより調整することができる。その時、上に
示した4個の寄生振動の周波数定数の変化は厚み
すべり振動の周波数定数変化に比べてはるかに少
ない。実験上、電極による厚みすべり振動の周波
数定数の変化は±10KHz・mm程度可能である。
f E・t≧f F・t, f E・t≧f G・t f E・t≦f H・t, f E・t≦f I・t By the way, the frequency of thickness shear vibration E depends on the thickness of the electrode. It can be adjusted by At that time, the changes in the frequency constants of the four parasitic vibrations shown above are much smaller than the changes in the frequency constants of the thickness shear vibrations. Experimentally, it is possible to change the frequency constant of thickness shear vibration by electrodes by about ±10KHz・mm.

したがつて上式の条件は次式に示す様になる。 Therefore, the condition of the above equation becomes as shown in the following equation.

fE・t+10≧fF・t、fE・t+10≧fG・t fE・t−10≦fH・t、fE・t−10≦fI・t 更に、上式に数値を代入すると、次式が得られ
る。
f E・t+10≧f F・t, f E・t+10≧f G・t f E・t−10≦f H・t, f E・t−10≦f I・t Furthermore, substitute the numerical values into the above equation Then, the following formula is obtained.

1726≧−457.5w/t−72.7l/t+3430.2 1726≧−52.5w/t−216.3l/t+3551.0 1706≦−267.0w/t−130.0l/t+3492.6 1706≦−86.0w/t−204.2l/t+3647.2 上の4つの式を満足するw/t及びl/tを持
つ矩形ATカツト水晶振動子は、周波数レスポン
スの特に大きい寄生振動である幅すべり振動及び
屈曲振動の影響を避けると共に、第9図a及びb
に示す比較的周波数レスポンスの小さい寄生振動
の影響をも避けた振動子となる。
1726≧-457.5w/t-72.7l/t+3430.2 1726≧-52.5w/t-216.3l/t+3551.0 1706≦-267.0w/t-130.0l/t+3492.6 1706≦-86.0w/t- 204.2l/t+3647.2 A rectangular AT cut crystal resonator with w/t and l/t that satisfies the above four equations avoids the effects of width shear vibration and bending vibration, which are parasitic vibrations with particularly large frequency responses. together with Figures 9a and b.
This is a resonator that avoids the effects of parasitic vibrations with a relatively small frequency response as shown in FIG.

第10図は、上記4つの式を満足するw/t及
びl/tの寸法領域と本発明の寸法領域を示す図
で、横軸にw/t、縦軸にl/tをとつてある。
図中の点を(w/t、l/t)で示すと、上記4
つの式を満足する点は点2A(2.37、8.51)、点2
B(2.59、8.41)、点2C(2.93、7.73)、点2D
(2.48、7.84)である。これらの点2A,2B,
2C,2Dの4点からなる四角形の領域内は、第
9図に示される周波数レスポンスの小さい奇生振
動の影響を避けた寸法領域である。しかしながら
前述したように、共振尖鋭度や加工精度の点で
l/tが約7.9〜約8.4の間が良好であることか
ら、第10図に示す点A(2.39、8.4)、点B(2.60、
8.4)、点c(2.84、7・9)、点D(2.47、7.9)で
示される四角形の領域内が好ましく、周波数レス
ポンスの強弱にかかわらず寄生振動の影響を受け
ず、共振尖鋭度、加工精度の点で良好な小型矩形
ATカツト水晶振動子を得ることができる。
FIG. 10 is a diagram showing the dimensional range of w/t and l/t that satisfies the above four formulas and the dimensional range of the present invention, with w/t on the horizontal axis and l/t on the vertical axis. .
If the points in the figure are expressed as (w/t, l/t), the above 4
The points that satisfy the following equations are point 2A (2.37, 8.51), point 2
B (2.59, 8.41), point 2C (2.93, 7.73), point 2D
(2.48, 7.84). These points 2A, 2B,
The rectangular area formed by the four points 2C and 2D is a dimensional area in which the influence of paranormal vibrations with small frequency responses shown in FIG. 9 is avoided. However, as mentioned above, in terms of resonance sharpness and processing accuracy, l/t between about 7.9 and 8.4 is good, so point A (2.39, 8.4) and point B (2.60 ,
8.4), points c (2.84, 7・9), and points D (2.47, 7.9) are preferable, and are not affected by parasitic vibration regardless of the strength of the frequency response, and are free from resonance sharpness and machining. Small rectangular shape, good in terms of accuracy
AT-cut crystal resonators can be obtained.

第11図は水晶片4の側面であるX−Y′面を、
X軸の+方向を手前にして、左へ傾き角α(約5゜)
だけ傾斜させたもので、これにより寄生振動の影
響を弱められる。また、側面角αを約6゜30′傾斜
することにより、側面角0゜の場合に比べて幅寸法
加工精度が緩和されるので効果がある。
Figure 11 shows the X-Y' plane, which is the side surface of the crystal piece 4.
Tilt angle α (approx. 5°) to the left with the + direction of the X-axis facing you.
This reduces the influence of parasitic vibrations. Furthermore, by inclining the side angle α by about 6°30', it is effective because the width dimension machining accuracy is relaxed compared to the case where the side angle is 0°.

第12図は、本発明による小型矩形ATカツト
水晶振動子の温度特性を示す一例である。Jは周
波数温度特性、Kは等価抵抗R1の温度特性を示
す。
FIG. 12 is an example showing the temperature characteristics of a small rectangular AT-cut crystal resonator according to the present invention. J indicates the frequency temperature characteristic, and K indicates the temperature characteristic of the equivalent resistance R1 .

この特性は、θ≒34゜33′、l/t≒8.2、w/t
≒2.5、α=0゜の試料についてのものである。周
波数レスポンスの特に大きい幅すべり振動及び屈
曲振動と、周波数レスポンスの小さい有害な寄生
振動の周波数を主振である厚みすべり振動の周波
数から十分離した本発明の上記寸法領域内におい
ては、第12図に示すような良好な周波数温度特
性と平坦な等価抵抗の温度特性が得られる。この
時の周波数温度特性曲線の変曲点温度は約25℃で
ある。
This characteristic is θ≒34゜33′, l/t≒8.2, w/t
≒2.5, for a sample with α=0°. Within the above-mentioned dimension range of the present invention, the frequencies of the width shear vibration and bending vibration, which have a particularly large frequency response, and the harmful parasitic vibration, which has a small frequency response, are sufficiently separated from the frequency of the thickness shear vibration, which is the main vibration, as shown in Fig. 12. Good frequency-temperature characteristics and flat equivalent resistance temperature characteristics are obtained as shown in . The inflection point temperature of the frequency-temperature characteristic curve at this time is approximately 25°C.

また厚みtを約0.4mmに選んで主振の共振周波
数を約4MHzにしたとき、幅は約1mm、長さは約
3.3mm程度と極めて小型の矩形ATカツト水晶振動
子が実現できる。
Also, when the thickness t is selected to be approximately 0.4 mm and the main resonance frequency is approximately 4 MHz, the width is approximately 1 mm and the length is approximately
An extremely small rectangular AT-cut crystal resonator of approximately 3.3 mm can be realized.

以上のように、本発明によれば、小型で寄生振
動による影響を受けず、しかも共振尖鋭度が高
く、変曲点温度が約25℃の良好な周波数温度特性
をもち、加工精度の上でも量産可能な矩形ATカ
ツト水晶振動子を提供でき、十分所期の目的を達
せられ、その効果は大きい。
As described above, the present invention is small and unaffected by parasitic vibrations, has high resonance sharpness, has good frequency-temperature characteristics with an inflection point temperature of about 25°C, and has excellent processing accuracy. We can provide a rectangular AT-cut crystal resonator that can be mass-produced, and the intended purpose can be fully achieved, with great effects.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は矩形ATカツト水晶振動子の軸方位を
示す説明図、第2図、第3図、第4図、第5図
a,bは本発明の実施例の矩形ATカツト水晶振
動子の斜視図、第6図はモードチヤートを示す
図、第7図はl/tに対する等価抵抗R1を示す
図、第8図はl/tに対する周波数温度特性曲線
の傾きを示す図、第9図a,bはモードチヤート
図、第10図は本発明の寸法領域を示す図、第1
1図は側面を傾けた水晶片のY′−Z′面を示す側面
図、第12図は本発明による小型矩形ATカツト
水晶振動子の温度特性の一例を示す図である。 1,2,4……水晶片、3……ベベル部。
FIG. 1 is an explanatory diagram showing the axis orientation of a rectangular AT cut crystal resonator, and FIGS. Perspective view, Fig. 6 shows the mode chart, Fig. 7 shows the equivalent resistance R 1 versus l/t, Fig. 8 shows the slope of the frequency-temperature characteristic curve versus l/t, Fig. 9 a, b are mode chart diagrams, Figure 10 is a diagram showing the dimensional range of the present invention, Figure 1
FIG. 1 is a side view showing the Y'-Z' plane of a crystal piece with its side surface tilted, and FIG. 12 is a diagram showing an example of the temperature characteristics of a small rectangular AT-cut crystal resonator according to the present invention. 1, 2, 4...Crystal piece, 3...Bevel part.

Claims (1)

【特許請求の範囲】 1 水晶のX軸の正方向を手前にして、X軸のま
わりに左へ切断角θ(約35゜)回転させて得られる
平面形状がほぼ矩形のATカツト水晶振動子にお
いて、水晶片の長さlをほぼX軸方向に、幅wを
ほぼZ′軸方向に、厚みtをほぼY′軸方向にそれぞ
れ選び、横軸をw/t、縦軸をl/tとする座標
の点(w/t、l/t)が、 A点(2.39、8.4) B点(2.60、8.4) C点(2.84、7.9) D点(2.47、7.9) で示される4点A、B、C、Dからなる四角形の
領域内にw/tおよびl/tを選んだことを特徴
とする矩形ATカツト水晶振動子。 2 水晶片の長さ方向の両端部をベベル形状もし
くはコンベツクス形状とすることを特徴とする特
許請求の範囲第1項記載の矩形ATカツト水晶振
動子。
[Claims] 1. An AT-cut crystal resonator whose planar shape is approximately rectangular, obtained by rotating the crystal by a cutting angle θ (approximately 35°) to the left around the X-axis, with the positive direction of the X-axis facing the front. , the length l of the crystal piece is selected approximately in the X-axis direction, the width w is selected approximately in the Z'-axis direction, and the thickness t is approximately selected in the Y'-axis direction, and the horizontal axis is w/t and the vertical axis is l/t. The coordinate points (w/t, l/t) are: Point A (2.39, 8.4) Point B (2.60, 8.4) Point C (2.84, 7.9) Point D (2.47, 7.9) Four points A , B, C, and D. A rectangular AT-cut crystal resonator characterized in that w/t and l/t are selected within a rectangular area consisting of , B, C, and D. 2. A rectangular AT-cut crystal resonator according to claim 1, wherein both lengthwise ends of the crystal piece have a bevel shape or a convex shape.
JP14006679A 1979-10-30 1979-10-30 Rectangular at-cut quartz oscillator Granted JPS5664510A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14006679A JPS5664510A (en) 1979-10-30 1979-10-30 Rectangular at-cut quartz oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14006679A JPS5664510A (en) 1979-10-30 1979-10-30 Rectangular at-cut quartz oscillator

Publications (2)

Publication Number Publication Date
JPS5664510A JPS5664510A (en) 1981-06-01
JPS6322085B2 true JPS6322085B2 (en) 1988-05-10

Family

ID=15260174

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14006679A Granted JPS5664510A (en) 1979-10-30 1979-10-30 Rectangular at-cut quartz oscillator

Country Status (1)

Country Link
JP (1) JPS5664510A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59112548U (en) * 1983-01-19 1984-07-30 御代田精密株式会社 Crystal piece processing equipment

Also Published As

Publication number Publication date
JPS5664510A (en) 1981-06-01

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