JPS6322742U - - Google Patents
Info
- Publication number
- JPS6322742U JPS6322742U JP1986114603U JP11460386U JPS6322742U JP S6322742 U JPS6322742 U JP S6322742U JP 1986114603 U JP1986114603 U JP 1986114603U JP 11460386 U JP11460386 U JP 11460386U JP S6322742 U JPS6322742 U JP S6322742U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- guide
- wafer guide
- belts
- driving means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986114603U JPS6322742U (mo) | 1986-07-28 | 1986-07-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986114603U JPS6322742U (mo) | 1986-07-28 | 1986-07-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6322742U true JPS6322742U (mo) | 1988-02-15 |
Family
ID=30997500
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986114603U Pending JPS6322742U (mo) | 1986-07-28 | 1986-07-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6322742U (mo) |
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1986
- 1986-07-28 JP JP1986114603U patent/JPS6322742U/ja active Pending