JPS6322745U - - Google Patents
Info
- Publication number
- JPS6322745U JPS6322745U JP11734486U JP11734486U JPS6322745U JP S6322745 U JPS6322745 U JP S6322745U JP 11734486 U JP11734486 U JP 11734486U JP 11734486 U JP11734486 U JP 11734486U JP S6322745 U JPS6322745 U JP S6322745U
- Authority
- JP
- Japan
- Prior art keywords
- outer rings
- feed screw
- workpiece
- sheet
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Description
第１図は本考案に係るワーク貼着シート引伸ば
し装置の一実施例を示す平面図、第２図は第１図
装置の一部断面を含む側面図、第３図は第１図の
装置の第１、第２のセンサを示す正面図である。
第４図は半導体ウエーハを粘着シート上に貼着し
た状態を示す斜視図、第５図は第４図の粘着シー
トを引伸ばした状態を示す斜視図、第６図は粘着
シートを引伸ばすための装置例を示す概略構成図
である。
１０……ワーク貼着シート、１３……内リング
（固定リング）、１５……外リング（加圧リング
）、１６ａ，１６ｂ，１６ｃ……送り螺子部、２
０……駆動用モータ、２２，２４，２５……駆動
ベルト（タイミングベルト）。
FIG. 1 is a plan view showing an embodiment of the workpiece adhesive sheet enlarging device according to the present invention, FIG. 2 is a side view including a partial cross section of the device shown in FIG. 1, and FIG. 3 is the device shown in FIG. 1. FIG. 3 is a front view showing the first and second sensors of FIG.
Figure 4 is a perspective view showing a state in which a semiconductor wafer is pasted on an adhesive sheet, Figure 5 is a perspective view showing a state in which the adhesive sheet in Figure 4 is stretched, and Figure 6 is a perspective view showing a state where the adhesive sheet in Figure 4 is stretched. 1 is a schematic configuration diagram showing an example of a device. 10...Work sticking sheet, 13...Inner ring (fixing ring), 15...Outer ring (pressure ring), 16a, 16b, 16c...Feed screw part, 2
0... Drive motor, 22, 24, 25... Drive belt (timing belt).
Claims (1)
た内外リングと、内外リング周縁部に沿つてその
少なくとも３箇所で内外リング間に垂設され、上
記内外リングを接近動可能に連結した送り螺子部
と、各送り螺子部を連結した駆動ベルトを周回動
させ、内外リングの相対的な接近動でワーク貼着
シートを加圧して引伸ばす駆動用モータとからな
ることを特徴とするワーク貼着シート引伸ばし装
置。 Inner and outer rings are arranged to face each other with a distance between them via a workpiece adhesion sheet, and a feed screw part is provided vertically between the inner and outer rings at at least three locations along the periphery of the inner and outer rings, and connects the inner and outer rings so as to be movable toward each other. and a drive motor that rotates a drive belt connected to each feed screw portion and pressurizes and stretches the workpiece sticking sheet by the relative approaching movement of the inner and outer rings. Enlarger.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11734486U JPS6322745U (en) | 1986-07-30 | 1986-07-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11734486U JPS6322745U (en) | 1986-07-30 | 1986-07-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6322745U true JPS6322745U (en) | 1988-02-15 |
Family
ID=31002766
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11734486U Pending JPS6322745U (en) | 1986-07-30 | 1986-07-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6322745U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006310438A (en) * | 2005-04-27 | 2006-11-09 | Towa Corp | Expansion apparatus for electronic components |
-
1986
- 1986-07-30 JP JP11734486U patent/JPS6322745U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006310438A (en) * | 2005-04-27 | 2006-11-09 | Towa Corp | Expansion apparatus for electronic components |