JPS63232803A - Distillation device - Google Patents

Abstract

PURPOSE:To prevent the deterioration of the water quality by delivering the distilled water produced in a condenser by the pressure of an inert gas to prevent the generation of fine particles in the transfer of distilled water in the title distillation device for producing ultra-pure water. CONSTITUTION:The raw water is subjected to ion-exchange or reverseosmosis membrane treatment, and then heated by a heater 2 and evaporated in an evaporator 1. The steam is sent to the condenser 3 through a pipe 11, and condensed therein by a cooling pipe 6 to produce ultra-pure water. The produced ultrapure water is stored in a distilled water storage 8 at the lower part of the condenser 3, and then supplied to a s use point from a distilled water feed pipe 12 by the pressure of an inert gas (N2, He, Ar, etc.) supplied from a compressed gas feed pipe 13 connected to a compressed gas source 14 provided above the condenser 3. Since a pump is not used for delivering ultrapure water, the deterioration of the water quality due to the fine particles generated from the pump can be prevented.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a distillation apparatus, and particularly to a distillation apparatus suitable for the electronic industry for semiconductor manufacturing, pharmaceutical manufacturing, and medical care.

[Conventional technology]

Conventionally, as a method for producing water with good purity from water containing impurities, for example, the distillation method was used, as described on pages 180 and 181 of Meiriko Technical Handbook, Saiwai Shobo, published in 1971. The ultrapure water production device used is disclosed.

On the other hand, in recent years, as mentioned above, there has been an increasing demand for the use of pure water in the electronic industry for semiconductor manufacturing, pharmaceutical manufacturing, pharmaceuticals, etc., and various ultrapure water production equipment that can produce large amounts of ultrapure water have been proposed. has been done. This type of equipment consists of a steam device that generates steam by heating with a heating device such as an electric heater treated with ion exchange treatment or reverse osmosis membrane treatment, and a cooling pipe through which the cooling medium passes through the steam generated by this steam device. let it come into contact with
It is equipped with a steam condenser for cooling and condensing water, and a pump for pumping the distilled water in the condenser to the point of use.

[Problem that the invention seeks to solve]

In the above-mentioned conventional technology, since the water that has undergone ion exchange treatment or reverse osmosis membrane treatment is pumped to the point of use, fine particles generated in the sliding parts of the pump mix into the water and deteriorate the quality of the water. There was a problem with letting them do it.

An object of the present invention is to provide a waterless device that can prevent water quality from deteriorating due to fine particles generated from a pump.

[Means for solving problems]

The above-mentioned object of the present invention is to provide a heatless device comprising a steam device that heats raw water that has been subjected to ion exchange treatment or reverse osmosis membrane treatment, and a condenser that cools and condenses the steam from the steam device to produce heatless water. This is achieved by connecting to the condenser a pressurized gas supply means that sends out the water produced by the condenser using gas pressure.

[Effect]

The steam generated in the steam equipment is cooled and condensed in the condensation tree,
It is stored as heartless water. This ruthless water is pumped from the condenser to the point of use by the pressure of the pressurized gas from the pressurized gas supply means connected to the condenser. As a result, water can be supplied to points of use without degrading water quality.

〔Example〕

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 shows an embodiment of the heartless device of the present invention. In this figure, 1 is a steam device, and this steam device W11 is an electric heater etc. that heats raw water that has been subjected to ion exchange treatment or reverse osmosis membrane treatment. A heating device 2 is provided. 3 is the condenser,
This condenser 3 has a cooling medium inlet space 4 on one side, a cooling medium outlet space 5 on the other side, and a cooling pipe 6 that communicates the inlet space 4 and the outlet space 5, and a steam passage 7 in the center.
0, a cold water storage section 8 is provided below, and a cooling medium supply v is provided in the cooling medium inlet space 4 described above.
9 is connected to the cooling medium outlet space 5, and a cooling medium discharge pipe 1 is connected to the cooling medium outlet space 5.
0 is condensed. A steam supply pipe 11 for supplying steam from the steam device 1 into the condenser 3 is connected to the upper part of the condenser 113 described above. Further, a ruthless water supply pipe 12 for supplying ruthless water to a point of use, for example, is connected to the ruthless water storage section 8 in the lower part of the condenser 3. moreover,
A pressure gas supply pipe 13 is connected to the upper part of the condenser 3 for applying pumping pressure to the sterile water. This pressure gas supply pipe 13 is connected to a pressure gas source 14 .

The pressure gas supply pipe 13 is provided with a supply gas control valve 15 . As the above-mentioned gas, for example, an inert gas such as nitrogen gas, helium gas, or argon gas is used.

Next, the operation of one embodiment of the above-described apparatus of the present invention will be described.

Raw water that has been subjected to ion exchange treatment or reverse osmosis membrane treatment flows into the steam device 1 . Here, the raw water is heated by a heating device and turned into steam. The steam supply pipe 11 passes through the condenser 3.
flows into. At this time, since a cooling medium such as water is flowing through the cooler 6, the steam comes into contact with the cooling pipe 6, is cooled and condensed, and is stored in the soulless water storage section 8 as soulless water.

In this state, if the supply gas regulating valve 15 is opened, the inert gas with pressure from the pressure gas source will flow into the condenser 3, so the soulless water stored in the soulless water storage section 8 will be drained. Under this gas pressure, it is pumped to the point of use.

According to this embodiment, since the water stored in the condenser 3 is pumped out by gas pressure, it can be supplied to the point of use without any deterioration in water quality.

FIG. 2 shows another embodiment of the heartless device of the present invention.
In this figure, the same numbers as in Figure 1 indicate the same parts.
In this embodiment, a temperature detector 16 is installed in the water supply pipe 9, a flow rate control valve 17 is installed in the coolant discharge 10, and the flow rate control valve 17 is controlled based on the detection signal from the temperature detector 16. The target temperature setting device 19 is provided with a control section 18 and a target temperature setting device 19. When the temperature of the cold water from the temperature detector 16 is higher than the set temperature value from the target temperature setting device 19, the control section 18 controls the temperature.

A function that issues a signal to the flow rate control valve 17 to increase the opening degree of the flow rate control valve 17, and conversely, issues a signal to the flow rate control valve 17 to decrease the opening degree when the water temperature of the cold water is lower than the set temperature. It is equipped with

Next, the operation of the other embodiment of the present invention described above will be explained.

In this embodiment, feeding the ruthless water to the point of use by gas pressure is similar to the embodiment described above, but the temperature at which the ruthless water is supplied to the point of use can be further adjusted. That is, if a target temperature is set in the target temperature setter 19, the control unit 18 sends an open signal to the flow rate control valve 17 when the temperature detected by the temperature detector 16 is higher than the target set temperature value. is added to increase the opening degree of the flow rate control valve 17. As a result, the supply amount of the cooling medium is increased, so that heat exchange is enhanced, and the temperature of the cold water can be adjusted to the target value.

Contrary to the above, when the temperature of the cold water is lower than the set temperature, the control unit 18 controls the opening degree of the flow rate control valve 17 to be small based on the signal from the temperature detector 16. As a result, the temperature of the heartless water rises and can be adjusted to the target value.

With this configuration, it is not only possible to supply water that meets the temperature required for water use at the point of use without degrading the water quality, but it also eliminates the need for equipment such as cooling heat exchangers, reducing costs. Reduction and downsizing can also be achieved.

In the above-described embodiment, when the stored ruthless water runs out, steam and inert gas will be supplied to the ruthless water supply pipe 12, so if it is necessary to prevent this, the above-mentioned ruthless water supply pipe 12 will be supplied with steam and inert gas. It is advisable to install a steam trap on the water supply pipe 12.

Further, in the embodiment shown in FIG. 2, the flow rate of the cooling medium on the discharge side is controlled, but it is also possible to control the flow rate on the supply side. Further, the temperature of the heartless water can be adjusted not only by the flow rate of the cooling medium but also by controlling the temperature of the cooling medium. Furthermore, it is also possible to adjust and control two factors: flow rate and temperature of the clamping medium.

〔Effect of the invention〕

According to the present invention, since it is possible to suppress the mixing of water into the water, the water can be supplied to the point of use without degrading the quality of the water. As a result, there is an effect that the cold water can be used effectively.

[Brief explanation of the drawing]

FIG. 1 is a configuration diagram showing an embodiment of the apparatus of the present invention. FIG. 2 is a block diagram showing another embodiment of the apparatus of the present invention. , 1゜1... Steam device, 3... Condenser, 6... Cooling pipe,
8... Ruthless water storage section, 9... Cooling medium supply pipe, 13
... Pressure gas supply pipe, 14 ... Pressure gas source, 16.
...Temperature detector. 17...Flow rate control valve, 18...Control unit, 1
9...Temperature setting device. Mound 1 Insho 2 Diagram (q/width practice 4p Shadow procedure amendment (method 1, case description 1988 Patent Application No. 63852 2 Name of invention Distillation device 1 Amendment person II Gaikyuki + tl Section Patent application Person 6 Ya (510+ Co., Ltd. Written by Tateso Kamiguchi Representative Person (No change in content)

Claims (1)

[Claims] 1. A distillation device comprising a steam device that distills raw water that has been subjected to ion exchange treatment or reverse osmosis membrane treatment, and a condenser that cools and condenses the steam from the steam device to produce distilled water. . A distillation apparatus, characterized in that a pressure gas supply means for delivering distilled water produced by the condenser using gas pressure is connected to the condenser. 2. The distillation apparatus according to claim 1, further comprising a cooling medium control means for adjusting the temperature of the distilled water. 3. The distillation apparatus according to claim 1 or 2, wherein the gas is a high purity inert gas.