JPS63238410A - 表面粗さ測定方法 - Google Patents

表面粗さ測定方法

Info

Publication number
JPS63238410A
JPS63238410A JP7384087A JP7384087A JPS63238410A JP S63238410 A JPS63238410 A JP S63238410A JP 7384087 A JP7384087 A JP 7384087A JP 7384087 A JP7384087 A JP 7384087A JP S63238410 A JPS63238410 A JP S63238410A
Authority
JP
Japan
Prior art keywords
light
measured
interference
interference light
reflected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7384087A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0562923B2 (2
Inventor
Masaaki Adachi
正明 安達
Yasuhide Nakai
康秀 中井
Hideji Miki
秀司 三木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kobe Steel Ltd
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Priority to JP7384087A priority Critical patent/JPS63238410A/ja
Publication of JPS63238410A publication Critical patent/JPS63238410A/ja
Publication of JPH0562923B2 publication Critical patent/JPH0562923B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP7384087A 1987-03-26 1987-03-26 表面粗さ測定方法 Granted JPS63238410A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7384087A JPS63238410A (ja) 1987-03-26 1987-03-26 表面粗さ測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7384087A JPS63238410A (ja) 1987-03-26 1987-03-26 表面粗さ測定方法

Publications (2)

Publication Number Publication Date
JPS63238410A true JPS63238410A (ja) 1988-10-04
JPH0562923B2 JPH0562923B2 (2) 1993-09-09

Family

ID=13529739

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7384087A Granted JPS63238410A (ja) 1987-03-26 1987-03-26 表面粗さ測定方法

Country Status (1)

Country Link
JP (1) JPS63238410A (2)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19616245A1 (de) * 1996-04-15 1997-10-16 Zam Zentrum Fuer Angewandte Mi Verfahren und Anordnung zum zerstörungsfreien, berührungslosen Prüfen und/oder Bewerten von Festkörpern, Flüssigkeiten, Gasen und Biomaterialien
KR100416497B1 (ko) * 2001-05-03 2004-01-31 (주) 인펙 박막패턴 검사장치

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19616245A1 (de) * 1996-04-15 1997-10-16 Zam Zentrum Fuer Angewandte Mi Verfahren und Anordnung zum zerstörungsfreien, berührungslosen Prüfen und/oder Bewerten von Festkörpern, Flüssigkeiten, Gasen und Biomaterialien
DE19616245C2 (de) * 1996-04-15 1998-06-18 Zam Zentrum Fuer Angewandte Mi Verfahren und Anordnung zum zerstörungsfreien, berührungslosen Prüfen und/oder Bewerten von Festkörpern, Flüssigkeiten, Gasen und Biomaterialien
KR100416497B1 (ko) * 2001-05-03 2004-01-31 (주) 인펙 박막패턴 검사장치

Also Published As

Publication number Publication date
JPH0562923B2 (2) 1993-09-09

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees