JPS6324619Y2 - - Google Patents
Info
- Publication number
- JPS6324619Y2 JPS6324619Y2 JP5302981U JP5302981U JPS6324619Y2 JP S6324619 Y2 JPS6324619 Y2 JP S6324619Y2 JP 5302981 U JP5302981 U JP 5302981U JP 5302981 U JP5302981 U JP 5302981U JP S6324619 Y2 JPS6324619 Y2 JP S6324619Y2
- Authority
- JP
- Japan
- Prior art keywords
- slider
- pins
- extension line
- substrate
- distance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005468 ion implantation Methods 0.000 claims description 10
- 239000000758 substrate Substances 0.000 description 19
- 235000012431 wafers Nutrition 0.000 description 8
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 3
- 230000001788 irregular Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5302981U JPS6324619Y2 (de) | 1981-04-13 | 1981-04-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5302981U JPS6324619Y2 (de) | 1981-04-13 | 1981-04-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57164955U JPS57164955U (de) | 1982-10-18 |
| JPS6324619Y2 true JPS6324619Y2 (de) | 1988-07-06 |
Family
ID=29849684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5302981U Expired JPS6324619Y2 (de) | 1981-04-13 | 1981-04-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6324619Y2 (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4542786B2 (ja) * | 2002-04-08 | 2010-09-15 | イー エイ フィシオネ インストルメンツ インコーポレーテッド | 試料保持装置 |
-
1981
- 1981-04-13 JP JP5302981U patent/JPS6324619Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57164955U (de) | 1982-10-18 |
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