JPS63248464A - 二流体ノズルヘツダ - Google Patents

二流体ノズルヘツダ

Info

Publication number: JPS63248464A
Authority: JP; Japan
Prior art keywords: header; nozzle; strip; clogged; air
Prior art date: 1987-03-31
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP8068887A

Other languages

English (en)

Japanese (ja)

Other versions

JPH0555193B2 (mo

Inventor

Nobuyoshi Rokusha

六車　信義

Kazuo Takagi

一夫高木

Hidekazu Kono

英一河野

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Nippon Steel Nisshin Co Ltd

Original Assignee

Nisshin Steel Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-03-31

Filing date

1987-03-31

Publication date

1988-10-14

1987-03-31 Application filed by Nisshin Steel Co Ltd filed Critical Nisshin Steel Co Ltd

1987-03-31 Priority to JP8068887A priority Critical patent/JPS63248464A/ja

1988-10-14 Publication of JPS63248464A publication Critical patent/JPS63248464A/ja

1993-08-16 Publication of JPH0555193B2 publication Critical patent/JPH0555193B2/ja

Status Granted legal-status Critical Current

Links

239000012530 fluid Substances 0.000 title claims description 4
239000007788 liquid Substances 0.000 claims abstract description 16
230000000149 penetrating effect Effects 0.000 claims description 2
229910000831 Steel Inorganic materials 0.000 description 7
239000010959 steel Substances 0.000 description 7
239000003795 chemical substances by application Substances 0.000 description 2
230000000694 effects Effects 0.000 description 2
239000000758 substrate Substances 0.000 description 2
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
230000002950 deficient Effects 0.000 description 1
239000000463 material Substances 0.000 description 1
239000003595 mist Substances 0.000 description 1
239000000203 mixture Substances 0.000 description 1
238000007747 plating Methods 0.000 description 1
230000001681 protective effect Effects 0.000 description 1
239000007921 spray Substances 0.000 description 1

Landscapes

Nozzles (AREA)

JP8068887A 1987-03-31 1987-03-31 二流体ノズルヘツダ Granted JPS63248464A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP8068887A JPS63248464A (ja)	1987-03-31	1987-03-31	二流体ノズルヘツダ

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP8068887A JPS63248464A (ja)	1987-03-31	1987-03-31	二流体ノズルヘツダ

Publications (2)

Publication Number	Publication Date
JPS63248464A true JPS63248464A (ja)	1988-10-14
JPH0555193B2 JPH0555193B2 (mo)	1993-08-16

Family

ID=13725274

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP8068887A Granted JPS63248464A (ja)	1987-03-31	1987-03-31	二流体ノズルヘツダ

Country Status (1)

Country	Link
JP (1)	JPS63248464A (mo)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2005230715A (ja) *	2004-02-20	2005-09-02	Kyoritsu Gokin Co Ltd	ノズル装置及びノズル部材
JP2006093591A (ja) *	2004-09-27	2006-04-06	Shibaura Mechatronics Corp	基板の処理装置
JP2008110350A (ja) *	2006-10-27	2008-05-15	Ikeuchi:Kk	箱型スプレーヘッダー

Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS4936203U (mo) *	1972-07-04	1974-03-30
JPS5331039U (mo) *	1976-08-24	1978-03-17

1987
- 1987-03-31 JP JP8068887A patent/JPS63248464A/ja active Granted

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS4936203U (mo) *	1972-07-04	1974-03-30
JPS5331039U (mo) *	1976-08-24	1978-03-17

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2005230715A (ja) *	2004-02-20	2005-09-02	Kyoritsu Gokin Co Ltd	ノズル装置及びノズル部材
JP2006093591A (ja) *	2004-09-27	2006-04-06	Shibaura Mechatronics Corp	基板の処理装置
JP2008110350A (ja) *	2006-10-27	2008-05-15	Ikeuchi:Kk	箱型スプレーヘッダー

Also Published As

Publication number	Publication date
JPH0555193B2 (mo)	1993-08-16

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Legal Events

Date	Code	Title	Description
2005-08-16	LAPS	Cancellation because of no payment of annual fees