JPS63250882A - 酸化物超電導材料の絶縁化方法 - Google Patents

酸化物超電導材料の絶縁化方法

Info

Publication number: JPS63250882A
Authority: JP; Japan
Prior art keywords: superconducting; insulating; superconducting material; substrate; oxide
Prior art date: 1987-04-08
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP62086616A

Other languages

English (en)

Japanese (ja)

Other versions

JPH0577315B2 (de

Inventor

Shunpei Yamazaki

舜平山崎

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Semiconductor Energy Laboratory Co Ltd

Original Assignee

Semiconductor Energy Laboratory Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-04-08

Filing date

1987-04-08

Publication date

1988-10-18

1987-04-08 Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd

1987-04-08 Priority to JP62086616A priority Critical patent/JPS63250882A/ja

1988-10-18 Publication of JPS63250882A publication Critical patent/JPS63250882A/ja

1993-10-26 Publication of JPH0577315B2 publication Critical patent/JPH0577315B2/ja

Status Granted legal-status Critical Current

Links

239000000463 material Substances 0.000 title claims abstract description 35
238000000034 method Methods 0.000 title claims abstract description 10
239000000758 substrate Substances 0.000 claims abstract description 17
229910052751 metal Inorganic materials 0.000 claims abstract description 14
239000002184 metal Substances 0.000 claims abstract description 12
229910052782 aluminium Inorganic materials 0.000 claims abstract description 4
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 4
230000001590 oxidative effect Effects 0.000 claims abstract description 4
239000007858 starting material Substances 0.000 claims abstract 2
239000010409 thin film Substances 0.000 claims description 6
239000012212 insulator Substances 0.000 claims description 5
238000005468 ion implantation Methods 0.000 claims description 4
239000011777 magnesium Substances 0.000 claims description 4
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
229910052710 silicon Inorganic materials 0.000 claims description 3
239000010703 silicon Substances 0.000 claims description 3
239000010936 titanium Substances 0.000 claims description 3
GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 2
XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 2
FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 2
RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
230000001747 exhibiting effect Effects 0.000 claims description 2
229910052733 gallium Inorganic materials 0.000 claims description 2
229910052732 germanium Inorganic materials 0.000 claims description 2
GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 2
229910052749 magnesium Inorganic materials 0.000 claims description 2
VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 claims description 2
229910052719 titanium Inorganic materials 0.000 claims description 2
238000010438 heat treatment Methods 0.000 claims 1
238000002955 isolation Methods 0.000 abstract description 13
239000000919 ceramic Substances 0.000 abstract description 6
229910044991 metal oxide Inorganic materials 0.000 abstract description 2
150000004706 metal oxides Chemical class 0.000 abstract description 2
229920002120 photoresistant polymer Polymers 0.000 abstract description 2
239000013078 crystal Substances 0.000 description 7
239000002887 superconductor Substances 0.000 description 6
HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 5
229910052581 Si3N4 Inorganic materials 0.000 description 3
239000010408 film Substances 0.000 description 3
238000009413 insulation Methods 0.000 description 3
239000004065 semiconductor Substances 0.000 description 3
238000004544 sputter deposition Methods 0.000 description 3
XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
239000007789 gas Substances 0.000 description 2
238000004519 manufacturing process Methods 0.000 description 2
239000007769 metal material Substances 0.000 description 2
150000002739 metals Chemical class 0.000 description 2
230000003647 oxidation Effects 0.000 description 2
238000007254 oxidation reaction Methods 0.000 description 2
239000011224 oxide ceramic Substances 0.000 description 2
229910052574 oxide ceramic Inorganic materials 0.000 description 2
239000001301 oxygen Substances 0.000 description 2
229910052760 oxygen Inorganic materials 0.000 description 2
230000000737 periodic effect Effects 0.000 description 2
229910000750 Niobium-germanium Inorganic materials 0.000 description 1
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
238000000137 annealing Methods 0.000 description 1
229910052786 argon Inorganic materials 0.000 description 1
229910052788 barium Inorganic materials 0.000 description 1
DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
229910002092 carbon dioxide Inorganic materials 0.000 description 1
239000001569 carbon dioxide Substances 0.000 description 1
150000001875 compounds Chemical class 0.000 description 1
239000004020 conductor Substances 0.000 description 1
230000000694 effects Effects 0.000 description 1
238000005516 engineering process Methods 0.000 description 1
238000005530 etching Methods 0.000 description 1
238000002347 injection Methods 0.000 description 1
239000007924 injection Substances 0.000 description 1
239000011810 insulating material Substances 0.000 description 1
230000010354 integration Effects 0.000 description 1
229910052747 lanthanoid Inorganic materials 0.000 description 1
150000002602 lanthanoids Chemical class 0.000 description 1
238000012423 maintenance Methods 0.000 description 1
229910021645 metal ion Inorganic materials 0.000 description 1
229910052814 silicon oxide Inorganic materials 0.000 description 1
VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 1
239000012808 vapor phase Substances 0.000 description 1
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
229910052727 yttrium Inorganic materials 0.000 description 1
VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1

Classifications

- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
- Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Landscapes

Inorganic Compounds Of Heavy Metals (AREA)
Superconductor Devices And Manufacturing Methods Thereof (AREA)
Superconductors And Manufacturing Methods Therefor (AREA)

JP62086616A 1987-04-08 1987-04-08 酸化物超電導材料の絶縁化方法 Granted JPS63250882A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP62086616A JPS63250882A (ja)	1987-04-08	1987-04-08	酸化物超電導材料の絶縁化方法

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP62086616A JPS63250882A (ja)	1987-04-08	1987-04-08	酸化物超電導材料の絶縁化方法

Publications (2)

Publication Number	Publication Date
JPS63250882A true JPS63250882A (ja)	1988-10-18
JPH0577315B2 JPH0577315B2 (de)	1993-10-26

Family

ID=13891954

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP62086616A Granted JPS63250882A (ja)	1987-04-08	1987-04-08	酸化物超電導材料の絶縁化方法

Country Status (1)

Country	Link
JP (1)	JPS63250882A (de)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS63257127A (ja) *	1987-04-13	1988-10-25	Matsushita Electric Ind Co Ltd	薄膜超電導体の製造方法
JPS63263482A (ja) *	1987-04-13	1988-10-31	インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン	超電導デバイスとその製造方法
JPS6433006A (en) *	1987-04-08	1989-02-02	Hitachi Ltd	Production of superconducting oxide and superconducting device
CN116322281A (zh) *	2023-03-21	2023-06-23	核工业西南物理研究院	一种利于提高超导载流性能的处理方法、超导层、超导材料

Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5873712A (ja) *	1981-10-27	1983-05-04	Nippon Steel Corp	上底吹き転炉廃ガスの非燃焼回収方法

1987
- 1987-04-08 JP JP62086616A patent/JPS63250882A/ja active Granted

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5873712A (ja) *	1981-10-27	1983-05-04	Nippon Steel Corp	上底吹き転炉廃ガスの非燃焼回収方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS6433006A (en) *	1987-04-08	1989-02-02	Hitachi Ltd	Production of superconducting oxide and superconducting device
JPS63257127A (ja) *	1987-04-13	1988-10-25	Matsushita Electric Ind Co Ltd	薄膜超電導体の製造方法
JPS63263482A (ja) *	1987-04-13	1988-10-31	インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン	超電導デバイスとその製造方法
CN116322281A (zh) *	2023-03-21	2023-06-23	核工业西南物理研究院	一种利于提高超导载流性能的处理方法、超导层、超导材料

Also Published As

Publication number	Publication date
JPH0577315B2 (de)	1993-10-26

Legal Events

Date	Code	Title	Description
2005-09-27	R250	Receipt of annual fees	Free format text: JAPANESE INTERMEDIATE CODE: R250
2006-10-26	LAPS	Cancellation because of no payment of annual fees

Publication	Publication Date	Title
JPH0634418B2 (ja)	1994-05-02	超電導素子の作製方法
JPH0587154B2 (de)	1993-12-15
US5877124A (en)	1999-03-02	Superconducting ceramic pattern and its manufacturing method
JPH0577347B2 (de)	1993-10-26
JPS63250882A (ja)	1988-10-18	酸化物超電導材料の絶縁化方法
JPH0577312B2 (de)	1993-10-26
JPS63258083A (ja)	1988-10-25	超電導材料の作製方法
JP3096050B2 (ja)	2000-10-10	半導体装置の製造方法
JPS63250880A (ja)	1988-10-18	酸化物超電導材料
JP2670554B2 (ja)	1997-10-29	酸化物超電導材料の作製方法
JPH01115899A (ja)	1989-05-09	酸化物超伝導体膜の製造方法
JP2667289B2 (ja)	1997-10-27	超電導素子および作製方法
JP2691065B2 (ja)	1997-12-17	超電導素子および作製方法
JPH02311396A (ja)	1990-12-26	薄膜超伝導体とその製造方法
JPH0548159A (ja)	1993-02-26	酸化物超伝導体装置及びその製造方法
JPH01125957A (ja)	1989-05-18	超電導体装置
JP2641973B2 (ja)	1997-08-20	超電導素子およびその作製方法
JP2599500B2 (ja)	1997-04-09	超電導素子および作製方法
JPH06275876A (ja)	1994-09-30	複合型ジョセフソン接合素子
JPH0634412B2 (ja)	1994-05-02	超電導体装置
JPH0577349B2 (de)	1993-10-26
JPS63275144A (ja)	1988-11-11	超電導体装置
JPH11243234A (ja)	1999-09-07	超伝導素子、及びその製造方法
JPH01220876A (ja)	1989-09-04	酸化物超伝導体膜の配線化方法
JPH02137380A (ja)	1990-05-25	超伝導デバイスの製造方法

JPS63250882A - 酸化物超電導材料の絶縁化方法 - Google Patents

Info

Links

Classifications

Landscapes

Priority Applications (1)

Applications Claiming Priority (1)

Publications (2)

Family

ID=13891954

Family Applications (1)

Country Status (1)

Cited By (4)

Citations (1)

Patent Citations (1)

Cited By (4)

Also Published As

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