JPS6325574A - Skid element for dc superconducting magnetometer - Google Patents
Skid element for dc superconducting magnetometerInfo
- Publication number
- JPS6325574A JPS6325574A JP16962586A JP16962586A JPS6325574A JP S6325574 A JPS6325574 A JP S6325574A JP 16962586 A JP16962586 A JP 16962586A JP 16962586 A JP16962586 A JP 16962586A JP S6325574 A JPS6325574 A JP S6325574A
- Authority
- JP
- Japan
- Prior art keywords
- superconducting
- magnetometer
- skid element
- current
- rings
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Measuring Magnetic Variables (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
(イ)産業上の利用分野
この発明は、DC超伝導磁力計のスキッド素子、つまり
検知部の改良に関する。DETAILED DESCRIPTION OF THE INVENTION (a) Field of Industrial Application The present invention relates to improvements in the skid element, that is, the detection section, of a DC superconducting magnetometer.
(ロ)従来の技術
一般に、DC超伝導磁力計は、第4図に示すように、1
個の超伝導リング41内に2個のジョセフソン結合素子
42.43を設けており、この超伝導リング41にピン
クアップコイルに接続されるコイル44から外部磁界φ
が与えられると、流れる電流は変調を受け、ジョセフソ
ン結合素子42.43を流れる電流をI C,=I C
,= T Cとすると、変調電流の最大値は、
となり、第5図のAで示すように、電流1mは入力され
る磁束φの周期関数となる。そのため、電流1mに応じ
た電圧■を導出することにより、入力磁束φXを検出で
きる。(b) Conventional technology In general, a DC superconducting magnetometer has one
Two Josephson coupling elements 42 and 43 are provided in each superconducting ring 41, and an external magnetic field φ is applied to this superconducting ring 41 from a coil 44 connected to a pink-up coil.
is given, the flowing current undergoes modulation, and the current flowing through the Josephson coupling element 42.43 becomes I C,=I C
, = T C, the maximum value of the modulating current is as follows, and as shown by A in FIG. 5, the current 1 m becomes a periodic function of the input magnetic flux φ. Therefore, the input magnetic flux φX can be detected by deriving the voltage ■ corresponding to the current 1 m.
(ハ)発明が解決しようとする問題点
DC超伝導磁力計において、現実には、2個のジョセフ
ソン結合部の特性に差異があり、従ってlc+ ≠Ic
、であり、上記(1)式は成立せず、磁束φと出力電流
の関係は第5図の破線Bとなり、1m
となり、磁力計の出力は小さくなる。また、超伝導リン
グ41に着目すれば、同リングのインダクタンスLsが
大きい程、変調度mが1よりも小さくなり、磁力計の出
力が小さくなる。そのため、この観点からすれば、超伝
導リング4IのインダクタンスLsは小さくすることが
望ましい。しかしながら、反面、外部磁界を超伝導リン
グ41に導入する必要があり、その伝導効率を考えると
、インダクタンスLsをあまり小さく出来ないという問
題がある。(c) Problems to be solved by the invention In a DC superconducting magnetometer, in reality, there is a difference in the characteristics of the two Josephson coupling parts, and therefore lc+ ≠ Ic
, and the above equation (1) does not hold, and the relationship between the magnetic flux φ and the output current becomes the broken line B in FIG. 5, which is 1 m 2 , and the output of the magnetometer becomes small. Further, when focusing on the superconducting ring 41, the larger the inductance Ls of the ring, the smaller the modulation degree m becomes than 1, and the smaller the output of the magnetometer becomes. Therefore, from this point of view, it is desirable to reduce the inductance Ls of the superconducting ring 4I. However, on the other hand, it is necessary to introduce an external magnetic field into the superconducting ring 41, and when considering the conduction efficiency, there is a problem that the inductance Ls cannot be made very small.
この発明は、上記に鑑み、超伝導リングへの外部磁界の
伝達効率を落とすことなく変調度mを1に近づけ、大な
る出力が得られるDC超伝3Eff力計のスキッド素子
を提供することを目的としている。In view of the above, it is an object of the present invention to provide a skid element for a DC superconductor 3Eff force meter that can bring the modulation degree m close to 1 and obtain a large output without reducing the transmission efficiency of the external magnetic field to the superconducting ring. The purpose is
(ニ)問題点を解決するための手段及び作用この発明の
DC超伝導磁力計のスキッド素子は、基板(1)上に形
成され、互いに対称な2個の超伝導リング(7,8)と
、この2個の超伝導リングの中央位置に配置される1対
のジョセフソン結合部(11,12)と、前記超伝導リ
ング内にそれぞれ多層薄膜で形成され、逆もイ1界を発
生するように接続される超伝導コイル(9,10)とか
ら構成され、前記1対のジョセフソン結合部を通して直
流駆動電流を流すようになっている。(d) Means and operation for solving the problems The skid element of the DC superconducting magnetometer of the present invention is formed on a substrate (1) and includes two mutually symmetrical superconducting rings (7, 8). , a pair of Josephson coupling parts (11, 12) placed at the center of these two superconducting rings, and a multilayer thin film formed inside the superconducting rings, and vice versa, generates an I field. The superconducting coils (9, 10) are connected in this manner, and a DC driving current is caused to flow through the pair of Josephson coupling portions.
このスキッド素子では、ジョセフソン結合部から見て、
超伝導リングが2個並列に入ることになるので、等価的
にインダクタンスLsが小さくなる。また、超伝導コイ
ルには逆磁界を発生するようにしているので、流れる遮
蔽電流は2倍となる。In this skid element, viewed from the Josephson junction,
Since two superconducting rings are inserted in parallel, the inductance Ls is equivalently reduced. Furthermore, since a reverse magnetic field is generated in the superconducting coil, the shielding current that flows is doubled.
(ホ)実施例
以下、実施例により、この発明をさらに詳細に説明する
。(E) Examples The present invention will be explained in more detail with reference to Examples below.
第1図は、この発明の一実施例を示すDC超伝導磁力計
のスキッド素子の平面図である。同図において、シリコ
ンウェハ等で形成される基板1上に、ニオブ(Nb)等
が使用される超伝導薄膜パターン2.3.4.5が形成
されている。バク〜ン2は直流駆動電流1dを流入させ
るための電極、パターン3.4はピンクアンプコイル6
をtlMするための電極である。パターン5内には、対
称に超伝導リング7.8が形成され、さらにこれら超伝
導リング7.8内にニオブで多層膜として形成される超
伝導コイル9.10が設けられている。FIG. 1 is a plan view of a skid element of a DC superconducting magnetometer showing an embodiment of the present invention. In the figure, a superconducting thin film pattern 2.3.4.5 made of niobium (Nb) or the like is formed on a substrate 1 made of a silicon wafer or the like. Bakun 2 is an electrode for flowing DC drive current 1d, pattern 3.4 is pink amplifier coil 6
This is an electrode for tlM. Superconducting rings 7.8 are formed symmetrically within the pattern 5, and superconducting coils 9.10 formed as a multilayer film of niobium are provided within these superconducting rings 7.8.
これら超伝導コイル9.10は直列に接続され、パター
ン3.4を介してビックアンプコイル6に接続される。These superconducting coils 9.10 are connected in series and connected to the big amplifier coil 6 via the pattern 3.4.
超伝導コイル9.10によって発生する磁界は、互いに
逆方向となるようにパターン形成されている。The magnetic fields generated by the superconducting coils 9.10 are patterned in opposite directions.
パターン5の中央部、すなわち超伝導リング7と8の間
には、1対のジョセフソン結合部11.12が設けられ
ている。このジョセフソン結合部11.12の具体的な
構造を、第2図、第3図を参照して説明する。In the central part of the pattern 5, ie between the superconducting rings 7 and 8, a pair of Josephson coupling parts 11, 12 are provided. The specific structure of the Josephson coupling portions 11 and 12 will be explained with reference to FIGS. 2 and 3.
基板1上に、電極パターン2から延設される超伝導a膜
層13に平行に、パターン5の縁部5a、5bが配置さ
れ、さらに縁部5aと超伝導薄膜層12の延設方向に直
角に絶縁膜層14.15が重層され、さらに絶縁膜層1
4.15上面に超伝導薄膜16.17が形成されている
。特に、超伝導薄膜13と縁部5a、超伝導薄膜13と
縁部5は、細帯状の超伝導薄膜17で結合されるもので
あり、その接点にジョセフソン結合部11.12が形成
されている。Edges 5a and 5b of the pattern 5 are arranged on the substrate 1 in parallel to the superconducting a film layer 13 extending from the electrode pattern 2, and further in the direction in which the edge 5a and the superconducting thin film layer 12 extend. Insulating film layers 14 and 15 are stacked at right angles, and further insulating film layer 1
A superconducting thin film 16.17 is formed on the upper surface of 4.15. In particular, the superconducting thin film 13 and the edge 5a, and the superconducting thin film 13 and the edge 5 are coupled by a strip-shaped superconducting thin film 17, and Josephson coupling portions 11.12 are formed at the contact points. There is.
上記実施例スキッド素子において、パターン電極2より
直流駆動電流1dを流している状態下で、ピックアンプ
コイル6に磁界が加えられると、ピックアップコイル6
に電流11.、が誘起される。この電流11nが超伝導
コイル9.10を流れることにより、超伝導コイル9で
は、例えば紙面の表から裏方向の磁束φ、nが生じ、超
伝導コイル10では、逆に裏から表方向の磁束φ、7が
生じ、これにより、超伝導リング7.8には、第1図の
矢印の方向に遮蔽電流isが流れ、この遮蔽電流ISが
加算されて、2つのジョセフソン結合部11.12を通
って流れるので、出力(電圧■)に大きな変化が得られ
ることになる。また、ジョセフソン結合部11.12か
ら見た場合、見かけのインダクタンスはLs/2となる
。In the skid element of the above embodiment, when a magnetic field is applied to the pick amplifier coil 6 while a DC drive current 1d is flowing from the pattern electrode 2, the pickup coil 6
Current 11. , is induced. As this current 11n flows through the superconducting coils 9 and 10, a magnetic flux φ,n is generated in the superconducting coil 9, for example, from the front to the back of the paper, and conversely, in the superconducting coil 10, a magnetic flux flows from the back to the front. φ, 7 occurs, and as a result, a shielding current IS flows in the superconducting ring 7.8 in the direction of the arrow in FIG. Since the current flows through the circuit, a large change in the output (voltage ■) can be obtained. Further, when viewed from the Josephson coupling portions 11 and 12, the apparent inductance is Ls/2.
また、ジョセフソン結合部11.12は縁部5、超伝導
薄lI!ii層13、縁部5bに対し直角に配置されて
いるので、必要な結合部は数μm以内まで作成でき、位
置による超伝導薄膜の膜圧差・ic調整誤差を無視でき
、特性の揃った素子を作成できる。Also, the Josephson junction 11.12 is at the edge 5, the superconducting thin lI! Since the ii layer 13 is arranged at right angles to the edge 5b, the required bonding part can be created within a few μm, and the film pressure difference and IC adjustment error of the superconducting thin film depending on the position can be ignored, making it possible to create an element with uniform characteristics. can be created.
(へ)発明の効果
この発明によれば、基板上に形成され、互いに対称な2
個の超伏i1Jングと、この2個の超伝導リングの中央
位置に配置される1対のジョセフソン結合部と、前記超
伝導リング内にそれぞれ多層薄膜で形成され、逆磁界を
発生するように接続される超伝導コイルとから構成され
るものであるから、ジョセフソン結合部には2個の超伝
導リング分の遮蔽電流が流れ、ピックアンプコイルから
の磁束変換効率が向上する。また、同面積の超伝導リン
グを使用するものに比べ、インダクタンスの小さなスキ
ッド素子となり、大きな出力が得られる。その上、特性
の揃った2つのジョセフソン結合部の作成が可能であり
、この意味からも大きな出力が得られる。(f) Effects of the Invention According to this invention, two symmetrical
a pair of Josephson coupling portions placed at the center of the two superconducting rings, and a multilayer thin film formed within the superconducting rings to generate opposite magnetic fields. Since the superconducting coil is connected to a superconducting coil, a shielding current equivalent to the amount of two superconducting rings flows through the Josephson coupling portion, improving the efficiency of magnetic flux conversion from the pick amplifier coil. Additionally, compared to a device using a superconducting ring of the same area, the skid element has a smaller inductance and can provide greater output. Furthermore, it is possible to create two Josephson joints with the same characteristics, and in this sense, a large output can be obtained.
第1図は、この発明の一実施例を示すDC超伝導磁力計
のスキッド素子の平面図、第2図は、同スキッド素子の
ジョセフソン結合部の拡大図、第3図は、第2図の線m
−mで切断した断面図、第4図は、従来のDC超伝導磁
力計の概略を説明するための図、第5図は、DCC超伝
導磁力計磁束−ジョセフソン結合部の最大電流の関係を
示す説明図である。
1:基板、 7・8:超伝導リング、9・10:超
伝導コイル、
1】・12:ジョセフソン結合部。
特許出願人 株式会社島津製作所代理人
弁理士 中 村 茂 信第2図
第4図
d
第5図FIG. 1 is a plan view of a skid element of a DC superconducting magnetometer showing an embodiment of the present invention, FIG. 2 is an enlarged view of the Josephson coupling part of the same skid element, and FIG. line m
4 is a diagram for explaining the outline of a conventional DC superconducting magnetometer, and FIG. 5 is a diagram showing the relationship between the magnetic flux of the DCC superconducting magnetometer and the maximum current of the Josephson coupling part. FIG. 1: Substrate, 7.8: Superconducting ring, 9.10: Superconducting coil, 1].12: Josephson coupling part. Patent applicant: Shimadzu Corporation Agent
Patent Attorney Shigeru Nakamura Figure 2 Figure 4 d Figure 5
Claims (1)
ングと、この2個の超伝導リングの中央位置に配置され
る1対のジョセフソン結合部と、前記超伝導リング内に
それぞれ多層薄膜で形成され、逆磁界を発生するように
接続される超伝導コイルとを備え、前記1対のジョセフ
ソン結合部を通して直流駆動電流を流すようにしたDC
超伝導磁力計のスキッド素子。(1) Two superconducting rings formed on a substrate and symmetrical to each other, a pair of Josephson coupling portions placed at the center of these two superconducting rings, and a and a superconducting coil formed of a multilayer thin film and connected to generate a reverse magnetic field, the DC driving current being caused to flow through the pair of Josephson coupling parts.
Skid element of superconducting magnetometer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16962586A JPS6325574A (en) | 1986-07-17 | 1986-07-17 | Skid element for dc superconducting magnetometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16962586A JPS6325574A (en) | 1986-07-17 | 1986-07-17 | Skid element for dc superconducting magnetometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6325574A true JPS6325574A (en) | 1988-02-03 |
Family
ID=15889972
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16962586A Pending JPS6325574A (en) | 1986-07-17 | 1986-07-17 | Skid element for dc superconducting magnetometer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6325574A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH042980A (en) * | 1990-04-19 | 1992-01-07 | Seiko Instr Inc | Magnetic field detector with high sensitivity |
| US5218297A (en) * | 1988-02-05 | 1993-06-08 | Hitachi, Ltd. | Superconductive quantum interference device in high temperature environments having reduced inductance and improved thermal noise response |
| JP2007034711A (en) * | 2005-07-27 | 2007-02-08 | Brother Ind Ltd | Wireless communication medium, wireless communication apparatus, and wireless communication system |
-
1986
- 1986-07-17 JP JP16962586A patent/JPS6325574A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5218297A (en) * | 1988-02-05 | 1993-06-08 | Hitachi, Ltd. | Superconductive quantum interference device in high temperature environments having reduced inductance and improved thermal noise response |
| JPH042980A (en) * | 1990-04-19 | 1992-01-07 | Seiko Instr Inc | Magnetic field detector with high sensitivity |
| JP2007034711A (en) * | 2005-07-27 | 2007-02-08 | Brother Ind Ltd | Wireless communication medium, wireless communication apparatus, and wireless communication system |
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