JPS6325732Y2 - - Google Patents

Description

[Detailed description of the invention] [Industrial application field] The present invention is a mask defect inspection device, an electron beam exposure device, etc., in which a mask or wafer is moved between the device and other related devices, or is set therein. The present invention relates to a holder conveying device for use in the holder.

[Prior Art] When the masks and the like are automatically transported between each device and between each station, they are often loaded into holders and transported in order to protect the masks and to share the transport device for each size. Conventionally, there have been devices shown in FIGS. 1 and 2 that transport the above-described holder from a magazine position to a stage position, or vice versa. Figure 1 shows the holder 1 being transported from the magazine position (not shown) on the right in the figure to the stage position shown, and Figure 2 shows the holder 1 being transported from the stage position shown to the magazine position. Indicates the state of transportation. Holder 1
The device is loaded with a mask or wafer (hereinafter referred to as a mask) 2 and has a push/pull pin 3 at the center of the right end in the figure, and a push/pull member 4 is attached to this pin 3 as shown in FIG. It can be conveyed by pressing it against the surface or by hooking it as shown in Fig. 2. In these figures, reference numeral 5 denotes an arm that is driven in the transport direction of the holder 1, that is, in the left and right directions in both figures, and the push/pull member 4 is moved in the direction shown in FIG. It is swingably attached to the arm 5 as shown by the imaginary line in FIG. As is clear from FIG. 1 and FIG.
) and when transporting the holder 1 from the stage position to the magazine position by hooking the push-pull member 4 on the pin 3 (Fig. 2), the relative position of the holder 1 and the arm 5 in the transport direction is a distance l. Because the deviation is
Regardless of the backward limit position of the arm 5, two forward limit positions are required, making the positioning mechanism of the arm 5 complicated. If the positioning of the push-pull member 5 is not accurate, the push-pull member 4 may
or pin 3, causing a mis-catch, or holder 1
This has disadvantages such as the generation of dust, which is most disliked in mask defect inspection equipment.

[Purpose of invention]

In order to solve the above-mentioned drawbacks, the purpose of the present invention is to enable the driving arm to have at least one forward movement limit position when transporting the holder in any direction, and to engage the pushing and pulling member. It is an object of the present invention to provide a holder conveying device that can accurately perform the holder transfer.

[Structure of the idea]

In order to achieve this object, the present invention provides a transport device for holders for loading masks, etc., which is equipped with an arm that is driven in the direction in which the holder is transported, a pushing member that is attached to the arm and can be pressed against the holder, and a pulling member that is attached to the arm and can be engaged and detached with a hook portion of the holder.This allows the pushing and pulling members to be engaged with the holder so as to be transportable without changing the relative positions of the arm and holder, and enables said engagement to be performed accurately.

〔Example〕

Figures 3 to 4 below show an embodiment of the present invention.
The diagram will be explained. In both figures, 1 is a holder and 3 is a pin, which are the same as those shown in FIGS. 1 and 2. Reference numeral 10 denotes an arm for driving conveyance, and a movable member 12 having a push-only member 13 is attached to the tip of the arm via leaf springs 11, 11. A pull-only member 15 is swingably attached to the movable member 12 via a pin 14, and is swung between the position shown in FIG. 3 and the position shown in FIG. 4 by a solenoid 16 and a spring 17. It's summery. Hook portion 15a of the pull-only member 15
is set so as to create a gap s on the left side of the pin 3 when the push-only member 13 is in contact with the right side of the pin 3 in the figure, as shown in FIG.

Next, the operation of this device will be explained. When transporting the holder 1 from the magazine position to the stage position, for example, as shown in FIG. 3, the pulling member 15 is released upward, and the arm 10 is moved from the right to the left in FIG. The holder 1 is conveyed by pressing the pushing member 13 against the pin 3.

Conversely, when transporting the holder 1 to the right in FIGS. 3 and 4, as shown in FIG.
bring it close to the holder 1, and the push-only member 13 touches the pin 3.
advance until it touches the The forward limit position of the arm 10 at this time is exactly the same as the forward limit position when the holder 1 is pushed and conveyed by the pushing member 13 as described above. Therefore, the operation sequence of the arm 10 is simplified, and the forward end position can be accurately set using a simple fixed stopper or the like. In addition, this device has a structure between the push-only member 13 and the arm 10 so that the push-only member 13 does not hit the pin 3 strongly and contacts the pin 3 more reliably even if the forward limit position of the arm 10 shifts slightly. Elasticity is provided by plate springs 11, 11. When the push-only member 13 comes into contact with the pin 3 as described above, the solenoid 16 is actuated to swing the pull-only member 15 downward as shown in FIG. do what you can.
At this time, the gap s between the hook part 15a and the pin 3
4, the pulling member 15 accurately reaches the engagement position shown in FIG. 4 without damaging the holder 1 or the pin 3. Next, when the arm 10 is moved to the right in FIG. 4, the hook portion 15a of the pulling member 15 comes into contact with the left side of the pin 3 and transports the holder 1 to the right.

For example, when the holder 1 reaches the magazine position, the solenoid 16 is activated and the pulling member 1 is activated.
5 to the position shown in FIG. 3 to complete one conveyance. At this time, in order to allow the hook portion 15a to come off without interfering with the pin 3, the pin 14, which is the center of swing of the pulling member 15, is moved from the pin 3 as shown in FIGS. 3 and 4. It is preferable to position the hook part 15a upwardly or to make the hook part 15a slope.

In the above embodiment, the push-only member 13 was pressed against the pin 3 attached to the holder 1, but it may also be pressed directly against the side of the holder 1, or the pull-only member 15 may be pressed against the pin 3 attached to the holder 1. Hook part 15
Needless to say, a can be modified in various ways, such as being hooked onto a hole or groove instead of using the pin 3.

[Effect of idea]

As described above, according to the present invention, since the forward movement limit position of the transport driving arm can be set at one location, the operation sequence of the arm can be simplified, and
Positioning becomes easy and accurate, and not only the push-only member but also the pull-only member can be engaged accurately with the holder while avoiding friction.

[Brief explanation of the drawing]

Figures 1 and 2 show a conventional device, with Figure 1 being a plan view of the main parts showing the state of pushing and conveying, Figure 2 showing the state of pulling and conveying, and Figures 3 and 4 showing the state of conveyance by pulling. This shows one embodiment of the present invention, and the third
The figure is an enlarged plan view of the main part showing a state in which the object is pushed and conveyed, and FIG. 1...Holder, 2...Mask, 3...Pin, 4
... Push-pull member, 5, 10 ... Arm, 6,
14...Pin, 7,16...Solenoid, 8,1
7... Spring, 11, 11... Leaf spring, 12... Movable member, 13... Push-only member, 15... Pull-only member.

Claims (1)

[Claims for Utility Model Registration] 1. In a holder conveyance device for loading a mask, etc., an arm driven in the holder conveyance direction;
a push-only member attached to the arm and configured to be pressed against the holder; and a pull-only member attached to the arm and configured to be detachable from a hook portion of the holder, the pull-only member The holder conveyance device is characterized in that the arm is arranged so as to be able to engage and detach from the hook portion when the arm is in a position where the push-only member is brought into contact with the holder. 2. The holder conveyance device according to claim 1, wherein the push-only member and the pull-only member are attached to the arm so as to have elasticity in the holder conveyance direction.