JPS63285167A - piezoelectric ceramic composition - Google Patents
piezoelectric ceramic compositionInfo
- Publication number
- JPS63285167A JPS63285167A JP62117022A JP11702287A JPS63285167A JP S63285167 A JPS63285167 A JP S63285167A JP 62117022 A JP62117022 A JP 62117022A JP 11702287 A JP11702287 A JP 11702287A JP S63285167 A JPS63285167 A JP S63285167A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric ceramic
- ceramic composition
- present
- main component
- composition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 239000000203 mixture Substances 0.000 title claims description 24
- 239000000919 ceramic Substances 0.000 title claims description 21
- 239000000126 substance Substances 0.000 claims 1
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 10
- 230000008878 coupling Effects 0.000 description 5
- 238000010168 coupling process Methods 0.000 description 5
- 238000005859 coupling reaction Methods 0.000 description 5
- 229910052573 porcelain Inorganic materials 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 238000001354 calcination Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 229910000464 lead oxide Inorganic materials 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910000480 nickel oxide Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Inorganic materials O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 description 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 1
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 description 1
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、圧電セラミックス、より詳しくはＰｂ（Ｎｉ
＋ｚ３Ｎｂ２ｚｓ）Ｔ！ＺｒＯｓの三成分系圧電磁器
組成物に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to piezoelectric ceramics, more specifically Pb(Ni
+z3Nb2zs)T! The present invention relates to a ternary piezoelectric ceramic composition of ZrOs.
圧電性磁器材料としては従来より各種のものが知られて
おり、特にＰＺＴ系ＣＰｂ（Ｚｒ Ｔｉ）Ｏｚ系〕磁
器の実用化が進んでいる。このＰＺＴ系磁器は二成分系
圧電材料であり、これよりも電気機械結合係数、比誘電
率や温度特性の組成による選択の余地が大きくできる三
成分系圧電材料が提案されている（例えば、高橋、本多
、重下：圧電セラミックス材料、最新ファインセラミッ
クス技術、（１９８３）、ｐ、４１ （工業調査会〕参
照）。そして、特開昭６１−１１７１５８号公報にてＰ
ｂ（Ｓｂ２，３Ｗ、、３）ＴｉＺｒＯ。Various types of piezoelectric porcelain materials have been known so far, and in particular, PZT-based CPb (Zr Ti)Oz-based porcelain is being put into practical use. This PZT-based porcelain is a two-component piezoelectric material, and three-component piezoelectric materials have been proposed that allow for greater choice in terms of electromechanical coupling coefficient, dielectric constant, and temperature characteristics (for example, Takahashi et al. , Honda, Shigeshita: Piezoelectric Ceramic Materials, Latest Fine Ceramics Technology, (1983), p. 41 (Industrial Research Association)).And, in JP-A-61-117158, P.
b(Sb2,3W,,3)TiZrO.
系の三成分系圧電磁器組成物が、また、特公昭４７−４
７９５９号公報にてＰｂ（Ｎｉ１７ｚＮｂｚ７ｉ）Ｔｉ
ＺｒＯｐの三成分糸圧電磁器組成物が提案されている。The three-component piezoelectric ceramic composition of the
In Publication No. 7959, Pb(Ni17zNbz7i)Ti
A ternary thread piezoceramic composition of ZrOp has been proposed.
またさらに、特公昭４７−４１１６０号公報にてＰｂ（
Ｎｉ 、、Ｊｂ２．、）ＴｉＺｒＯ−の限定された範囲
内において副成分としてＴａ２０５を０．１〜１．Ｏｕ
＋ｔ％含む三成分系圧電磁器組成物が提案されている。Furthermore, Pb(
Ni,, Jb2. ,) within a limited range of TiZrO-, Ta205 is added as a subcomponent from 0.1 to 1. Ou
A three-component piezoelectric ceramic composition containing +t% has been proposed.
しかしながら、この場合にはＴａ２０５無添加のときに
圧電磁器の特性が低い組成範囲（第１図中の破線で示さ
れ、本発明と比べてＰｂ（Ｎｉ＋７Ｊｂ２ｚａ）Ｏａ酸
成分少ない）を主成分としている。また、Ｔａｚ０５添
加の圧電磁器においても径方向電気機械結合係数（Ｋｒ
）＞０．３３５、比誘電率（ε、３／ε、 ） ＞ ３
８０と規定してピックアップ・マイクロホンには使用で
きるものの、送受話器・スピーカー等には使用できない
磁器も多い。However, in this case, when no Ta205 is added, the piezoelectric ceramic has a composition range in which its properties are low (as shown by the broken line in Figure 1, the main component is less Pb(Ni+7Jb2za)Oa acid component than in the present invention). . In addition, the radial electromechanical coupling coefficient (Kr
) > 0.335, relative permittivity (ε, 3/ε, ) > 3
There are many types of porcelain that are specified as 80 and can be used for pickups and microphones, but cannot be used for handsets, speakers, etc.
本発明は、Ｐｂ（Ｎｉ＋７３Ｎｂ２７ｚ）ＴｉＺｒ０３
の三成分系圧電磁器組成物において、径方向電気機械結
合係数Ｋｒおよび比誘電率ε１．／ε。を向上させるこ
とを目的としている。The present invention is based on Pb(Ni+73Nb27z)TiZr03
In the three-component piezoelectric ceramic composition, the radial electromechanical coupling coefficient Kr and relative dielectric constant ε1. /ε. The aim is to improve.
本発明は、また、径方向電気機械結合係数および比誘電
率が大きくて感度の良い音響変換素子（例えば、圧電送
受話器、圧電ブザー）に適したＰｂ（ＮｉｌｚＪｂ２７
ｚ）ＴｉＺｒＯ１系圧電磁器組成物を提供することを目
的としている。The present invention also provides Pb (NilzJb27
z) It is an object of the present invention to provide a TiZrO1-based piezoelectric ceramic composition.
本発明は、音響変換素子としての使用に適しなＫｒが０
．５５以上でかつε５．／ε。が２０００以上である特
性を有する圧電磁器組成物を提供することをも目的とし
ている。In the present invention, Kr suitable for use as an acoustic transducer is 0.
．． 55 or more and ε5. /ε. Another object of the present invention is to provide a piezoelectric ceramic composition having a characteristic of 2000 or more.
上述の目的が、一般式： Ｐｂ（Ｎｉ＋７３Ｎｂ２７ｚ
）ｘＴｉｙＺｒｚＯ＋で表わされる主成分であって、式
中のｘ、ｙ、ｚで表わした添付図面に示す組成点Ａ、Ｂ
、Ｃ，ＤおよびＥ：
で囲まれる範囲内の該主成分と、該主成分に対して０．
１〜０．３ ｕ＋ｔ％のＴａ２０５である副成分とから
なる圧電磁器組成物によって達成される。The above-mentioned purpose is achieved by using the general formula: Pb(Ni+73Nb27z
) The main component represented by
, C, D, and E: The main component within the range surrounded by 0.
This is achieved by a piezoelectric ceramic composition comprising 1 to 0.3 u+t% of Ta205 as a subcomponent.
Ｔａ２０５添加量は、０．１ｗｔ％以下では径方向電気
機械結合係数Ｋｒおよび比誘電率ε３３／ε０の向上に
効果が無く、一方、０．４ｗｔ％以上ではＫｒおよびε
２．／ε。が低下する。When the amount of Ta205 added is less than 0.1 wt%, it has no effect on improving the radial electromechanical coupling coefficient Kr and relative dielectric constant ε33/ε0, while when it is more than 0.4 wt%, Kr and ε
2. /ε. decreases.
以下、比較例を含む実施例によって、本発明をより詳細
に説明する。Hereinafter, the present invention will be explained in more detail with reference to examples including comparative examples.
圧電磁器の試料を次のようにして製作した。まず、出発
原料として高純度の酸化鉛ＰｂＯ１酸化ニツケルＮｉＯ
５五酸化ニオブＮｂ、０６、酸化チタンＴｉ１２および
酸化ジルコニウムＺｒＯ２を所定の配合比（第１表およ
び第２表の主成分組成比）に秤量し、ボールミルにて８
〜１５時間湿時間台し、均一なスラリーとした。このス
ラリーを乾燥させた後に、８００〜９００℃にて１〜３
時間仮焼しな、仮焼物をボールミルにて粉砕し同時に所
定量（第１表および第２表の主成分に対する重量％）の
高純度五酸化タンタルＴａ２０５を加えて２〜１０時間
湿時間台した。この混合粉にバインダーとして樹脂（例
えば、ポリビニルアルコール）を１ｗｔ％添加混練し、
約１ ｔｏｎ／ ａｍ２の圧力で直径１４ｍｍ、厚さ１
ｍｍの円板に加圧成形した。そして、成形した円板を１
１８０〜１３００℃にて１〜５時間焼成した。この焼成
品に銀ペーストを所定パターンで焼付けして電極を形成
し、８０〜１５０℃のオイル中で１０〜２０分間、２〜
５ＫＶ／ｍｏ＋の直流電圧を印加して分極処理を行なっ
た。A piezoelectric ceramic sample was manufactured as follows. First, high-purity lead oxide PbO1 nickel oxide NiO was used as a starting material.
5 Niobium pentoxide Nb, 06, titanium oxide Ti12, and zirconium oxide ZrO2 were weighed at a predetermined blending ratio (main component composition ratios in Tables 1 and 2), and milled in a ball mill.
A homogeneous slurry was obtained by moistening for ~15 hours. After drying this slurry, 1 to 3
After calcining for a period of time, the calcined product was crushed in a ball mill, and at the same time, a predetermined amount (wt% of the main components in Tables 1 and 2) of high-purity tantalum pentoxide Ta205 was added and kept for 2 to 10 hours under humidity. . Adding 1 wt% of resin (for example, polyvinyl alcohol) as a binder to this mixed powder and kneading it,
14mm in diameter and 1 in thickness at a pressure of approximately 1 ton/am2
It was press-molded into a disk of mm. Then, the molded disk is 1
It was baked at 180-1300°C for 1-5 hours. Silver paste is baked in a predetermined pattern on this baked product to form an electrode, and the electrode is heated in oil at 80 to 150°C for 10 to 20 minutes.
Polarization treatment was performed by applying a DC voltage of 5 KV/mo+.
このようにしてＴａ２０５を含有した（又は含有しない
） Ｐｂ（Ｎｉ１７＊Ｎｂ２ｚ＊）ＴｉＺｒＯｚ圧電磁
器組成物（試料Ｎｏ、１〜６，７〜３８）が製作された
。In this way, Pb(Ni17*Nb2z*)TiZrOz piezoelectric ceramic compositions containing (or not containing) Ta205 (Sample Nos. 1-6, 7-38) were produced.
得られた圧電磁器組成物の径方向電気機械結合係数Ｋｒ
、比誘電率ε、３／ε。および誘電損失ｔａｎδを測定
して、その結果を第１表および第２表に示す、
第１表
第１表では主成分を一定としてＴａ２０５添加量を変化
させた場合であり、ＴａｚＯｓ添加によって無添加の場
合よりＫｒおよびε３３／ε。が大きくなり、０、２
ｗｔ％程度の添加量が最も好ましいことが分かる。Radial electromechanical coupling coefficient Kr of the obtained piezoelectric ceramic composition
, dielectric constant ε, 3/ε. and dielectric loss tan δ were measured, and the results are shown in Tables 1 and 2.
Table 1 Table 1 shows the case where the amount of Ta205 added is varied while keeping the main component constant, and the addition of TazOs results in higher Kr and ε33/ε than the case without addition. becomes larger, 0, 2
It can be seen that the addition amount of about wt% is the most preferable.
下記第２表では主成分の組成比を変化させ、Ｔａ２０５
添加量を０．２ｗｔ％と一定にした場合であり、試料の
組成を第１図の三元図中に示す。また、Ｔａｚ０５無添
加の比較試料の結果も第２表中に示す。In Table 2 below, by changing the composition ratio of the main components, Ta205
This is the case where the amount added is constant at 0.2 wt%, and the composition of the sample is shown in the ternary diagram in FIG. Table 2 also shows the results of a comparative sample without the addition of Taz05.
第２表から主成分がどのような場合においても、Ｔａ２
Ｏ，添加によってＫｒおよびε、３／ε。が大きくなる
ことが分かる。そして、第１図中の五角形ＡＢＣＤＥで
囲まれた領域においては、圧電送受話器、圧電スピーカ
ー等の音響変換素子としても用いられる好ましい範囲で
あり、Ｋｒ≧０．５５がっ ε３３／ε０≧２０００の
条件を満足していることが分かる。From Table 2, no matter what the main component is, Ta2
By adding O, Kr and ε, 3/ε. It can be seen that becomes larger. The region surrounded by the pentagon ABCDE in FIG. 1 is a preferable range for use as an acoustic transducer in piezoelectric telephone receivers, piezoelectric speakers, etc., where Kr≧0.55 and ε33/ε0≧2000. It can be seen that the conditions are satisfied.
募じしス
第−亀」Ｉえυ
（※印は本発明範囲外の比較例である。）さらに、音響
変換素子の出力音圧を比較するには、共振周波数より十
分低いスティフネス領域における出力音圧を測定するこ
とも重要である。すなわち、共振周波数より十分低いス
ティフネス領域における出力音圧が高ければ、音響変換
素子として用いた場合に出力音圧が高くなると判断でき
る。(The * mark indicates a comparative example outside the scope of the present invention.) Furthermore, in order to compare the output sound pressure of the acoustic transducer, it is necessary to calculate the output in a stiffness region sufficiently lower than the resonant frequency. It is also important to measure sound pressure. That is, if the output sound pressure in the stiffness region sufficiently lower than the resonance frequency is high, it can be determined that the output sound pressure will be high when used as an acoustic conversion element.
そこで、従来の圧電磁器組成物（ＰＺＴ系）を用いた振
動板と、本発明による圧電磁器組成物を用いた振動板の
出力音圧を測定した結果を第３表（従来品をゼロとした
時の出力音圧変化）および第２図に示す。本発明による
セラミック振動板の出力音圧の方が、２．７〜３．４ｄ
Ｂ（ａｔ３００１１ｚ）高くなり、第２図に示すように
従来品より優れている。Therefore, Table 3 shows the results of measuring the output sound pressure of a diaphragm using a conventional piezoelectric ceramic composition (PZT system) and a diaphragm using a piezoelectric ceramic composition according to the present invention. Fig. 2 shows the change in output sound pressure at the same time. The output sound pressure of the ceramic diaphragm according to the present invention is 2.7 to 3.4 d.
B(at30011z) is higher, and as shown in FIG. 2, it is superior to the conventional product.
以上説明したように、Ｐｂ（Ｎｉ、、、Ｎｂ２．、）Ｔ
ｉＺｒＯ，で表わされる主成分のうち、第１図の三元図
で示した五角形へＢＣＤＨの組成範囲内において、仮焼
後にＴａ２０５を０．１〜０．３ｕ＋ｔ％添加すること
により、無添加の磁器よりも高い特性を安定して得るこ
とができ、音響変換素子に適した圧電磁器組成物を供給
することができる。As explained above, Pb(Ni, , Nb2.,)T
Among the main components represented by iZrO, by adding 0.1 to 0.3 u+t% of Ta205 after calcination within the composition range of BCDH to the pentagon shown in the ternary diagram in Fig. 1, additive-free It is possible to stably obtain properties higher than that of porcelain, and it is possible to supply a piezoelectric ceramic composition suitable for acoustic transducer elements.
第１図は、第１表および第２表中の主成分組成を示すＰ
ｂ（Ｎ！１ｚ３Ｎｂ２／、）０３−ＰｂＴｉＯｉ−Ｐｂ
ＺｒＯ３三元図である。
第２図は、出力音圧と周波数との関係を本発明に係る圧
電磁器組成物および従来の圧電磁器組成物について説明
するグラフである。Figure 1 shows the main component compositions in Tables 1 and 2.
b(N!1z3Nb2/,)03-PbTiOi-Pb
It is a ZrO3 ternary diagram. FIG. 2 is a graph illustrating the relationship between output sound pressure and frequency for a piezoelectric ceramic composition according to the present invention and a conventional piezoelectric ceramic composition.
Claims (1)
ｙＺｒ＿２Ｏ＿３で表わされる主成分であって、式中の
ｘ、ｙ、ｚで表わした添付図面に示す組成点Ａ、Ｂ、Ｃ
、ＤおよびＥ： ▲数式、化学式、表等があります▼ （ｘ＋ｙ＋ｚ＝１） で囲まれる範囲内の該主成分と、該主成分に対して０．
１〜０．３ｗｔ％のＴａ＿２Ｏ＿５である副成分とから
なることを特徴とする圧電磁器組成物。[Claims] 1. General formula: Pb(Ni_1_/_3Nb_2_/_3)_xTi_
The main component represented by yZr_2O_3, with composition points A, B, and C shown in the attached drawings represented by x, y, and z in the formula.
, D and E: ▲There are mathematical formulas, chemical formulas, tables, etc.▼ (x+y+z=1) The main component within the range surrounded by 0.
A piezoelectric ceramic composition characterized in that it comprises a subcomponent of 1 to 0.3 wt% of Ta_2O_5.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62117022A JPS63285167A (en) | 1987-05-15 | 1987-05-15 | piezoelectric ceramic composition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62117022A JPS63285167A (en) | 1987-05-15 | 1987-05-15 | piezoelectric ceramic composition |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63285167A true JPS63285167A (en) | 1988-11-22 |
Family
ID=14701506
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62117022A Pending JPS63285167A (en) | 1987-05-15 | 1987-05-15 | piezoelectric ceramic composition |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63285167A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1400498A3 (en) * | 2002-07-29 | 2004-06-09 | Brother Kogyo Kabushiki Kaisha | Piezoelectric ceramic composition and piezolelectric actuator for ink-jet head |
| CN111875374A (en) * | 2020-08-06 | 2020-11-03 | 湖北大学 | Low-temperature sintered niobium-nickel-lead zirconate titanate piezoelectric ceramic material and preparation method thereof |
-
1987
- 1987-05-15 JP JP62117022A patent/JPS63285167A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1400498A3 (en) * | 2002-07-29 | 2004-06-09 | Brother Kogyo Kabushiki Kaisha | Piezoelectric ceramic composition and piezolelectric actuator for ink-jet head |
| US6844661B2 (en) | 2002-07-29 | 2005-01-18 | Brother Kogyo Kabushiki Kaisha | Piezoelectric ceramic composition and piezoelectric actuator for ink-jet head based on use of the same |
| CN111875374A (en) * | 2020-08-06 | 2020-11-03 | 湖北大学 | Low-temperature sintered niobium-nickel-lead zirconate titanate piezoelectric ceramic material and preparation method thereof |
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