JPS6331536U - - Google Patents
Info
- Publication number
- JPS6331536U JPS6331536U JP1986125290U JP12529086U JPS6331536U JP S6331536 U JPS6331536 U JP S6331536U JP 1986125290 U JP1986125290 U JP 1986125290U JP 12529086 U JP12529086 U JP 12529086U JP S6331536 U JPS6331536 U JP S6331536U
- Authority
- JP
- Japan
- Prior art keywords
- transfer rail
- semiconductor wafer
- boat
- cassette
- moving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986125290U JPS6331536U (cs) | 1986-08-18 | 1986-08-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986125290U JPS6331536U (cs) | 1986-08-18 | 1986-08-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6331536U true JPS6331536U (cs) | 1988-03-01 |
Family
ID=31018058
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986125290U Pending JPS6331536U (cs) | 1986-08-18 | 1986-08-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6331536U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008042155A (ja) * | 2006-08-04 | 2008-02-21 | King Yuan Electronics Co Ltd | ウエハカセット補助装置 |
-
1986
- 1986-08-18 JP JP1986125290U patent/JPS6331536U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008042155A (ja) * | 2006-08-04 | 2008-02-21 | King Yuan Electronics Co Ltd | ウエハカセット補助装置 |