JPS6333474Y2 - - Google Patents
Info
- Publication number
- JPS6333474Y2 JPS6333474Y2 JP1982116050U JP11605082U JPS6333474Y2 JP S6333474 Y2 JPS6333474 Y2 JP S6333474Y2 JP 1982116050 U JP1982116050 U JP 1982116050U JP 11605082 U JP11605082 U JP 11605082U JP S6333474 Y2 JPS6333474 Y2 JP S6333474Y2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- deposited layer
- mercury lamp
- reflective film
- silicon oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Discharge Lamps And Accessories Thereof (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1982116050U JPS5920552U (ja) | 1982-07-30 | 1982-07-30 | 水銀灯 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1982116050U JPS5920552U (ja) | 1982-07-30 | 1982-07-30 | 水銀灯 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5920552U JPS5920552U (ja) | 1984-02-08 |
| JPS6333474Y2 true JPS6333474Y2 (mo) | 1988-09-06 |
Family
ID=30267677
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1982116050U Granted JPS5920552U (ja) | 1982-07-30 | 1982-07-30 | 水銀灯 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5920552U (mo) |
-
1982
- 1982-07-30 JP JP1982116050U patent/JPS5920552U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5920552U (ja) | 1984-02-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS58200238A (ja) | フオトマスク | |
| CN101794070B (zh) | 一种用于缩小投影超分辨成像器件和光刻方法 | |
| JP2002244210A (ja) | プロジェクタ用ランプと液晶プロジェクタ | |
| JP3481219B2 (ja) | 光源装置及び該光源装置を用いた投写型表示装置 | |
| JP3221226B2 (ja) | 照明装置及びそれを用いた投影露光装置 | |
| JP2005294622A (ja) | 反射型拡散ミラー及びeuv用照明光学装置 | |
| JPS59159129A (ja) | 透過形液晶表示装置 | |
| JPH03157636A (ja) | 集光装置 | |
| JP2833055B2 (ja) | 照明装置、及び、これを備えたプロジェクター | |
| JP2734939B2 (ja) | ランプ光源及び露光装置 | |
| JP2002246297A (ja) | 光源装置、その光源装置に用いられるフライアイ・レンズ、その光源装置を有する露光装置 | |
| JPH03157653A (ja) | レチクル | |
| TW200300961A (en) | Multiple photolithographic exposures with different clear patterns | |
| JPS5681844A (en) | Production of photomask for ic with airflow passage | |
| JPS5872110A (ja) | 独特の光減衰器をもつ逆光複写板 | |
| JP2778275B2 (ja) | ランプハウス | |
| JPS6070401A (ja) | 紫外線照射装置 | |
| US3183521A (en) | Glass aperture plate | |
| Ross | The cooling of film and slides in projectors | |
| JPS6311538U (mo) | ||
| JPS57122438A (en) | Photomask for projection exposure | |
| JPS6142050U (ja) | カラ−受像管蛍光面露光装置 | |
| JPS5816137Y2 (ja) | 光学機器用反射形螢光ランプ | |
| JPH04155742A (ja) | 光照射装置 | |
| JPS5920552U (ja) | 水銀灯 |