JPS6336029U - - Google Patents
Info
- Publication number
- JPS6336029U JPS6336029U JP1986129460U JP12946086U JPS6336029U JP S6336029 U JPS6336029 U JP S6336029U JP 1986129460 U JP1986129460 U JP 1986129460U JP 12946086 U JP12946086 U JP 12946086U JP S6336029 U JPS6336029 U JP S6336029U
- Authority
- JP
- Japan
- Prior art keywords
- transparent material
- flange
- cylinder
- position confirmation
- shutter position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986129460U JPS6336029U (de) | 1986-08-27 | 1986-08-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986129460U JPS6336029U (de) | 1986-08-27 | 1986-08-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6336029U true JPS6336029U (de) | 1988-03-08 |
Family
ID=31026048
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986129460U Pending JPS6336029U (de) | 1986-08-27 | 1986-08-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6336029U (de) |
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1986
- 1986-08-27 JP JP1986129460U patent/JPS6336029U/ja active Pending