JPS6336519A - 薄膜形成装置 - Google Patents

薄膜形成装置

Info

Publication number
JPS6336519A
JPS6336519A JP17914686A JP17914686A JPS6336519A JP S6336519 A JPS6336519 A JP S6336519A JP 17914686 A JP17914686 A JP 17914686A JP 17914686 A JP17914686 A JP 17914686A JP S6336519 A JPS6336519 A JP S6336519A
Authority
JP
Japan
Prior art keywords
wafer
susceptor
epitaxial
uniform
susceptors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17914686A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0573247B2 (de
Inventor
Masaki Omura
大村　雅紀
Hiroshi Sakama
坂間　弘
Kenji Araki
健治 荒木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Engineering Corp
Original Assignee
NKK Corp
Nippon Kokan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NKK Corp, Nippon Kokan Ltd filed Critical NKK Corp
Priority to JP17914686A priority Critical patent/JPS6336519A/ja
Publication of JPS6336519A publication Critical patent/JPS6336519A/ja
Publication of JPH0573247B2 publication Critical patent/JPH0573247B2/ja
Granted legal-status Critical Current

Links

JP17914686A 1986-07-30 1986-07-30 薄膜形成装置 Granted JPS6336519A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17914686A JPS6336519A (ja) 1986-07-30 1986-07-30 薄膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17914686A JPS6336519A (ja) 1986-07-30 1986-07-30 薄膜形成装置

Publications (2)

Publication Number Publication Date
JPS6336519A true JPS6336519A (ja) 1988-02-17
JPH0573247B2 JPH0573247B2 (de) 1993-10-14

Family

ID=16060771

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17914686A Granted JPS6336519A (ja) 1986-07-30 1986-07-30 薄膜形成装置

Country Status (1)

Country Link
JP (1) JPS6336519A (de)

Also Published As

Publication number Publication date
JPH0573247B2 (de) 1993-10-14

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