JPS6339624Y2 - - Google Patents
Info
- Publication number
- JPS6339624Y2 JPS6339624Y2 JP15762181U JP15762181U JPS6339624Y2 JP S6339624 Y2 JPS6339624 Y2 JP S6339624Y2 JP 15762181 U JP15762181 U JP 15762181U JP 15762181 U JP15762181 U JP 15762181U JP S6339624 Y2 JPS6339624 Y2 JP S6339624Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- front column
- fluorocarbon
- moisture
- assembly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 claims description 23
- 238000005259 measurement Methods 0.000 claims description 12
- 229910000978 Pb alloy Inorganic materials 0.000 claims description 11
- 239000000203 mixture Substances 0.000 claims description 11
- 239000002245 particle Substances 0.000 claims description 11
- 150000002500 ions Chemical class 0.000 claims description 3
- 230000009969 flowable effect Effects 0.000 claims 1
- 230000000717 retained effect Effects 0.000 claims 1
- 239000007789 gas Substances 0.000 description 52
- 238000010586 diagram Methods 0.000 description 9
- 229910021536 Zeolite Inorganic materials 0.000 description 7
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 7
- 239000010457 zeolite Substances 0.000 description 7
- 239000011347 resin Substances 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 239000000428 dust Substances 0.000 description 5
- 239000004810 polytetrafluoroethylene Substances 0.000 description 5
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 5
- 239000003795 chemical substances by application Substances 0.000 description 4
- 239000000523 sample Substances 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 3
- 238000011088 calibration curve Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000003595 mist Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- -1 FC-40 Chemical compound 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 239000002274 desiccant Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15762181U JPS5862246U (ja) | 1981-10-21 | 1981-10-21 | ガスリ−ク測定用組体 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15762181U JPS5862246U (ja) | 1981-10-21 | 1981-10-21 | ガスリ−ク測定用組体 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5862246U JPS5862246U (ja) | 1983-04-26 |
| JPS6339624Y2 true JPS6339624Y2 (2) | 1988-10-18 |
Family
ID=29950143
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15762181U Granted JPS5862246U (ja) | 1981-10-21 | 1981-10-21 | ガスリ−ク測定用組体 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5862246U (2) |
-
1981
- 1981-10-21 JP JP15762181U patent/JPS5862246U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5862246U (ja) | 1983-04-26 |
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