JPS6343467B2 - - Google Patents

Info

Publication number
JPS6343467B2
JPS6343467B2 JP57123825A JP12382582A JPS6343467B2 JP S6343467 B2 JPS6343467 B2 JP S6343467B2 JP 57123825 A JP57123825 A JP 57123825A JP 12382582 A JP12382582 A JP 12382582A JP S6343467 B2 JPS6343467 B2 JP S6343467B2
Authority
JP
Japan
Prior art keywords
substrate
mesh
target
high frequency
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57123825A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5914640A (ja
Inventor
Hiroyoshi Hamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP57123825A priority Critical patent/JPS5914640A/ja
Publication of JPS5914640A publication Critical patent/JPS5914640A/ja
Publication of JPS6343467B2 publication Critical patent/JPS6343467B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP57123825A 1982-07-15 1982-07-15 高周波スパツタリング法 Granted JPS5914640A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57123825A JPS5914640A (ja) 1982-07-15 1982-07-15 高周波スパツタリング法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57123825A JPS5914640A (ja) 1982-07-15 1982-07-15 高周波スパツタリング法

Publications (2)

Publication Number Publication Date
JPS5914640A JPS5914640A (ja) 1984-01-25
JPS6343467B2 true JPS6343467B2 (de) 1988-08-30

Family

ID=14870291

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57123825A Granted JPS5914640A (ja) 1982-07-15 1982-07-15 高周波スパツタリング法

Country Status (1)

Country Link
JP (1) JPS5914640A (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DK1630260T3 (da) * 2004-08-20 2011-10-31 Jds Uniphase Inc Magnetisk holdemekanisme til et dampudfældningssystem

Also Published As

Publication number Publication date
JPS5914640A (ja) 1984-01-25

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