JPS6346463U - - Google Patents
Info
- Publication number
- JPS6346463U JPS6346463U JP14047786U JP14047786U JPS6346463U JP S6346463 U JPS6346463 U JP S6346463U JP 14047786 U JP14047786 U JP 14047786U JP 14047786 U JP14047786 U JP 14047786U JP S6346463 U JPS6346463 U JP S6346463U
- Authority
- JP
- Japan
- Prior art keywords
- shutter
- ion
- deposition
- rotating
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims description 6
- 230000008021 deposition Effects 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 4
- 238000010884 ion-beam technique Methods 0.000 claims description 3
- 239000002245 particle Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims 3
- 230000008020 evaporation Effects 0.000 claims 2
- 230000002441 reversible effect Effects 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14047786U JPS6346463U (mo) | 1986-09-12 | 1986-09-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14047786U JPS6346463U (mo) | 1986-09-12 | 1986-09-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6346463U true JPS6346463U (mo) | 1988-03-29 |
Family
ID=31047360
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14047786U Pending JPS6346463U (mo) | 1986-09-12 | 1986-09-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6346463U (mo) |
-
1986
- 1986-09-12 JP JP14047786U patent/JPS6346463U/ja active Pending
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