JPS6346464U - - Google Patents
Info
- Publication number
- JPS6346464U JPS6346464U JP14043686U JP14043686U JPS6346464U JP S6346464 U JPS6346464 U JP S6346464U JP 14043686 U JP14043686 U JP 14043686U JP 14043686 U JP14043686 U JP 14043686U JP S6346464 U JPS6346464 U JP S6346464U
- Authority
- JP
- Japan
- Prior art keywords
- target material
- sic
- deposited
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013077 target material Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Description
第１図ａ〜ｃは本考案のターゲツト材料の製造
例を説明する概略的な断面図である。 １……基板、２……ＣＶＤＳｉＣ析出物、３…
…ターゲツト材料。
例を説明する概略的な断面図である。 １……基板、２……ＣＶＤＳｉＣ析出物、３…
…ターゲツト材料。
Claims (1)
- ＣＶＤ反応によつて析出させたＳｉＣ又はＳｉ
３Ｎ４よりなることを特徴とするターゲツト材料
。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14043686U JPH0343230Y2 (ja) | 1986-09-12 | 1986-09-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14043686U JPH0343230Y2 (ja) | 1986-09-12 | 1986-09-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6346464U true JPS6346464U (ja) | 1988-03-29 |
| JPH0343230Y2 JPH0343230Y2 (ja) | 1991-09-10 |
Family
ID=31047287
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14043686U Expired JPH0343230Y2 (ja) | 1986-09-12 | 1986-09-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0343230Y2 (ja) |
-
1986
- 1986-09-12 JP JP14043686U patent/JPH0343230Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0343230Y2 (ja) | 1991-09-10 |