JPS6351434U - - Google Patents
Info
- Publication number
- JPS6351434U JPS6351434U JP14491886U JP14491886U JPS6351434U JP S6351434 U JPS6351434 U JP S6351434U JP 14491886 U JP14491886 U JP 14491886U JP 14491886 U JP14491886 U JP 14491886U JP S6351434 U JPS6351434 U JP S6351434U
- Authority
- JP
- Japan
- Prior art keywords
- mark
- pattern
- semiconductor device
- axis
- alignment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
Description
第１図は本考案の実施例の位置合せマークの説
明図、第２図は基準マークが変化したときの説明
図、第３図は本考案の他の実施例、第４図は従来
例の位置合せマーク説明図である。
１，１１……基準マーク、２，２′，３……位
置合せマーク、４１……基準マーク、４２……従
来の位置合せマーク。
Fig. 1 is an explanatory diagram of the alignment mark according to the embodiment of the present invention, Fig. 2 is an explanatory diagram when the reference mark changes, Fig. 3 is another embodiment of the present invention, and Fig. 4 is an illustration of the conventional example. FIG. 3 is an explanatory diagram of alignment marks. 1, 11... Reference mark, 2, 2', 3... Alignment mark, 41... Reference mark, 42... Conventional alignment mark.
Claims (1)
中心を通る軸に対して対称でこの軸に対する垂直
部分の大きさが中心側と外側の間で異なる部分を
有するパターンであつて、かつ第１マークと少く
とも２交点を持つ形状の第２マークを設けたこと
を特徴とする半導体装置用位置合せマーク。 (2) 上記第２マークは台形または三角形を４つ
集めた形状であることを特徴とする実用新案登録
請求の範囲第１項記載の半導体装置用位置合せマ
ーク。[Claims for Utility Model Registration] (1) A cross-shaped first mark, which is symmetrical with respect to an axis passing through the center of the first mark, and the size of the portion perpendicular to this axis is different between the center side and the outside. What is claimed is: 1. An alignment mark for a semiconductor device, comprising a second mark having a pattern having a pattern and having at least two intersections with the first mark. (2) The alignment mark for a semiconductor device according to claim 1, wherein the second mark is in the shape of a trapezoid or a collection of four triangles.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14491886U JPS6351434U (en) | 1986-09-20 | 1986-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14491886U JPS6351434U (en) | 1986-09-20 | 1986-09-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6351434U true JPS6351434U (en) | 1988-04-07 |
Family
ID=31055972
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14491886U Pending JPS6351434U (en) | 1986-09-20 | 1986-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6351434U (en) |
-
1986
- 1986-09-20 JP JP14491886U patent/JPS6351434U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6351434U (en) | ||
| JPS6013513U (en) | Preparation | |
| JPH0323893U (en) | ||
| JPH01113812U (en) | ||
| JPS61186231U (en) | ||
| JPH0391903U (en) | ||
| JPS6265271U (en) | ||
| JPH01115234U (en) | ||
| JPH0326477U (en) | ||
| JPS6015379U (en) | Square Go stones that do not require a Go board | |
| JPS60137432U (en) | mask holder | |
| JPS63115113U (en) | ||
| JPH0334231U (en) | ||
| JPH0244338U (en) | ||
| JPS60175687U (en) | Ruler with dotted line and center line | |
| JPS62161619U (en) | ||
| JPS6265272U (en) | ||
| JPH035148U (en) | ||
| JPH0435824U (en) | ||
| JPS61138588U (en) | ||
| JPH02122743U (en) | ||
| JPS63148487U (en) | ||
| JPS59109348U (en) | mask holder | |
| JPS62199940U (en) | ||
| JPS61157444U (en) |