JPS6353689U - - Google Patents

Info

Publication number
JPS6353689U
JPS6353689U JP14734486U JP14734486U JPS6353689U JP S6353689 U JPS6353689 U JP S6353689U JP 14734486 U JP14734486 U JP 14734486U JP 14734486 U JP14734486 U JP 14734486U JP S6353689 U JPS6353689 U JP S6353689U
Authority
JP
Japan
Prior art keywords
chuck mechanism
vacuum chuck
vacuum
adherend
shows
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14734486U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14734486U priority Critical patent/JPS6353689U/ja
Publication of JPS6353689U publication Critical patent/JPS6353689U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第1図aは本考案の真空チヤツク機構の正面図
を示し、第1図bは本考案の断面図を示したもの
である。第2図a,b,cは本考案の利用例の外
観図を示したものである。第3図は従来のバネ方
式の真空チヤツク機構の外観図を示したものであ
る。 1……中空管、2……ピン、3……可動部材、
4……長穴、5……チユーブ、6……モールドI
C、7……空器、8……固定軸、9……接触調整
用バネ、10……可動接触部材。

Claims (1)

    【実用新案登録請求の範囲】
  1. 真空を利用したチヤツク機構に係り、被着体に
    対する押し付け荷重が一定になることを特徴とし
    た真空チヤツク機構。
JP14734486U 1986-09-26 1986-09-26 Pending JPS6353689U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14734486U JPS6353689U (ja) 1986-09-26 1986-09-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14734486U JPS6353689U (ja) 1986-09-26 1986-09-26

Publications (1)

Publication Number Publication Date
JPS6353689U true JPS6353689U (ja) 1988-04-11

Family

ID=31060619

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14734486U Pending JPS6353689U (ja) 1986-09-26 1986-09-26

Country Status (1)

Country Link
JP (1) JPS6353689U (ja)

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