JPS6354986A - 洗浄装置 - Google Patents

洗浄装置

Info

Publication number
JPS6354986A
JPS6354986A JP19950886A JP19950886A JPS6354986A JP S6354986 A JPS6354986 A JP S6354986A JP 19950886 A JP19950886 A JP 19950886A JP 19950886 A JP19950886 A JP 19950886A JP S6354986 A JPS6354986 A JP S6354986A
Authority
JP
Japan
Prior art keywords
temperature
cleaning
solution
tank
array
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19950886A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0422634B2 (2
Inventor
真木　昇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rozai Kogyo Kaisha Ltd
Original Assignee
Rozai Kogyo Kaisha Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rozai Kogyo Kaisha Ltd filed Critical Rozai Kogyo Kaisha Ltd
Priority to JP19950886A priority Critical patent/JPS6354986A/ja
Publication of JPS6354986A publication Critical patent/JPS6354986A/ja
Publication of JPH0422634B2 publication Critical patent/JPH0422634B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Drying Of Solid Materials (AREA)
  • Coating Apparatus (AREA)
JP19950886A 1986-08-26 1986-08-26 洗浄装置 Granted JPS6354986A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19950886A JPS6354986A (ja) 1986-08-26 1986-08-26 洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19950886A JPS6354986A (ja) 1986-08-26 1986-08-26 洗浄装置

Publications (2)

Publication Number Publication Date
JPS6354986A true JPS6354986A (ja) 1988-03-09
JPH0422634B2 JPH0422634B2 (2) 1992-04-20

Family

ID=16408983

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19950886A Granted JPS6354986A (ja) 1986-08-26 1986-08-26 洗浄装置

Country Status (1)

Country Link
JP (1) JPS6354986A (2)

Also Published As

Publication number Publication date
JPH0422634B2 (2) 1992-04-20

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