JPS6355157U - - Google Patents
Info
- Publication number
- JPS6355157U JPS6355157U JP14899986U JP14899986U JPS6355157U JP S6355157 U JPS6355157 U JP S6355157U JP 14899986 U JP14899986 U JP 14899986U JP 14899986 U JP14899986 U JP 14899986U JP S6355157 U JPS6355157 U JP S6355157U
- Authority
- JP
- Japan
- Prior art keywords
- cavity
- exhaust gas
- gas sensor
- protrusion
- filled
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 229910044991 metal oxide Inorganic materials 0.000 claims 1
- 150000004706 metal oxides Chemical class 0.000 claims 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Non-Adjustable Resistors (AREA)
Description
第１図は、実施例の排気ガスセンサの平面図、
第２図はその―方向拡大断面図、第３図は変
形例の排気ガスセンサの要部拡大断面図である。
図において、２…基板、４，６…キヤビテイ、
８，１０…突起、１２，１４…半導体、１６…電
極、Ｒ…Ｒ部。
FIG. 1 is a plan view of the exhaust gas sensor of the example;
FIG. 2 is an enlarged cross-sectional view in the - direction, and FIG. 3 is an enlarged cross-sectional view of essential parts of a modification of the exhaust gas sensor. In the figure, 2...substrate, 4, 6... cavity,
8, 10...Protrusion, 12, 14...Semiconductor, 16...Electrode, R...R section.
Claims (1)
より抵抗値が変化する金属酸化物半導体を充填し
た排気ガスセンサにおいて、 前記キヤビテイ内に、キヤビテイの開口部に向
けて断面積が増大する突起を設けたことを特徴と
する、排気ガスセンサ。[Scope of Claim for Utility Model Registration] In an exhaust gas sensor in which a cavity provided in a heat-resistant insulating base is filled with a metal oxide semiconductor whose resistance value changes depending on gas, the cross-sectional area of the cavity toward the opening of the cavity is An exhaust gas sensor, characterized in that it is provided with a protrusion that increases.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14899986U JPH0519802Y2 (en) | 1986-09-29 | 1986-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14899986U JPH0519802Y2 (en) | 1986-09-29 | 1986-09-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6355157U true JPS6355157U (en) | 1988-04-13 |
| JPH0519802Y2 JPH0519802Y2 (en) | 1993-05-25 |
Family
ID=31063791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14899986U Expired - Lifetime JPH0519802Y2 (en) | 1986-09-29 | 1986-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0519802Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010002336A (en) * | 2008-06-20 | 2010-01-07 | New Cosmos Electric Corp | Resistance change type gas detection element and its manufacturing method |
-
1986
- 1986-09-29 JP JP14899986U patent/JPH0519802Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010002336A (en) * | 2008-06-20 | 2010-01-07 | New Cosmos Electric Corp | Resistance change type gas detection element and its manufacturing method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0519802Y2 (en) | 1993-05-25 |