JPS635625U - - Google Patents
Info
- Publication number
- JPS635625U JPS635625U JP1986098626U JP9862686U JPS635625U JP S635625 U JPS635625 U JP S635625U JP 1986098626 U JP1986098626 U JP 1986098626U JP 9862686 U JP9862686 U JP 9862686U JP S635625 U JPS635625 U JP S635625U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- claws
- susceptor
- holder
- small
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986098626U JPS635625U (de) | 1986-06-27 | 1986-06-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986098626U JPS635625U (de) | 1986-06-27 | 1986-06-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS635625U true JPS635625U (de) | 1988-01-14 |
Family
ID=30966737
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986098626U Pending JPS635625U (de) | 1986-06-27 | 1986-06-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS635625U (de) |
-
1986
- 1986-06-27 JP JP1986098626U patent/JPS635625U/ja active Pending