JPS635857B2 - - Google Patents

Info

Publication number
JPS635857B2
JPS635857B2 JP56118289A JP11828981A JPS635857B2 JP S635857 B2 JPS635857 B2 JP S635857B2 JP 56118289 A JP56118289 A JP 56118289A JP 11828981 A JP11828981 A JP 11828981A JP S635857 B2 JPS635857 B2 JP S635857B2
Authority
JP
Japan
Prior art keywords
electrode
charged particle
mesh
charged particles
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56118289A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5818849A (ja
Inventor
Toshinobu Takagi
Koji Matsuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NITSUSHIN HAIBORUTEEJI KK
Original Assignee
NITSUSHIN HAIBORUTEEJI KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NITSUSHIN HAIBORUTEEJI KK filed Critical NITSUSHIN HAIBORUTEEJI KK
Priority to JP56118289A priority Critical patent/JPS5818849A/ja
Publication of JPS5818849A publication Critical patent/JPS5818849A/ja
Publication of JPS635857B2 publication Critical patent/JPS635857B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/12—Lenses electrostatic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Particle Accelerators (AREA)
JP56118289A 1981-07-27 1981-07-27 荷電粒子ビ−ム集束装置 Granted JPS5818849A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56118289A JPS5818849A (ja) 1981-07-27 1981-07-27 荷電粒子ビ−ム集束装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56118289A JPS5818849A (ja) 1981-07-27 1981-07-27 荷電粒子ビ−ム集束装置

Publications (2)

Publication Number Publication Date
JPS5818849A JPS5818849A (ja) 1983-02-03
JPS635857B2 true JPS635857B2 (de) 1988-02-05

Family

ID=14732981

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56118289A Granted JPS5818849A (ja) 1981-07-27 1981-07-27 荷電粒子ビ−ム集束装置

Country Status (1)

Country Link
JP (1) JPS5818849A (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0564438A1 (de) * 1992-03-30 1993-10-06 IMS Ionen Mikrofabrikations Systeme Gesellschaft m.b.H. Teilchen-, insbes. ionenoptisches Abbildungssystem
US6999703B2 (en) * 2003-03-21 2006-02-14 Xerox Corporation Ion toner charging device
JP2013150809A (ja) * 2008-05-22 2013-08-08 Vladimir Yegorovich Balakin 荷電粒子癌治療システムの一部としての荷電粒子ビーム加速方法及び装置
JP6541798B2 (ja) * 2015-04-21 2019-07-10 カメカ インストゥルメンツ，インコーポレイテッド 広視野アトムプローブ

Also Published As

Publication number Publication date
JPS5818849A (ja) 1983-02-03

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