JPS6359327U - - Google Patents
Info
- Publication number
- JPS6359327U JPS6359327U JP15281986U JP15281986U JPS6359327U JP S6359327 U JPS6359327 U JP S6359327U JP 15281986 U JP15281986 U JP 15281986U JP 15281986 U JP15281986 U JP 15281986U JP S6359327 U JPS6359327 U JP S6359327U
- Authority
- JP
- Japan
- Prior art keywords
- movable frame
- boat
- view
- wafer
- point support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15281986U JPS6359327U (th) | 1986-10-03 | 1986-10-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15281986U JPS6359327U (th) | 1986-10-03 | 1986-10-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6359327U true JPS6359327U (th) | 1988-04-20 |
Family
ID=31071144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15281986U Pending JPS6359327U (th) | 1986-10-03 | 1986-10-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6359327U (th) |
-
1986
- 1986-10-03 JP JP15281986U patent/JPS6359327U/ja active Pending
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