JPS6366189U - - Google Patents

Info

Publication number
JPS6366189U
JPS6366189U JP15836186U JP15836186U JPS6366189U JP S6366189 U JPS6366189 U JP S6366189U JP 15836186 U JP15836186 U JP 15836186U JP 15836186 U JP15836186 U JP 15836186U JP S6366189 U JPS6366189 U JP S6366189U
Authority
JP
Japan
Prior art keywords
cleaned
cleaning
cleaning device
electric field
grounded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15836186U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15836186U priority Critical patent/JPS6366189U/ja
Publication of JPS6366189U publication Critical patent/JPS6366189U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)

Description

【図面の簡単な説明】
第1図は本考案を示す洗浄装置の断面図、第2
図は本考案を超音波洗浄装置に適用した洗浄装置
の断面図、第3図は洗浄槽内での電界力の模式図
、第4図はクリーンルーム内のダウンフローにお
けるイオン濃度の比較図を示す。 2……洗浄槽、6……被洗浄物、7……洗浄液

Claims (1)

  1. 【実用新案登録請求の範囲】 1 洗浄槽内の電気絶縁性を有する洗浄液に被洗
    浄物を浸漬し、被洗浄物の汚れを連続的に除去す
    る洗浄装置において、接地された洗浄槽と前記被
    洗浄物との間に高電圧を印加して、電界を形成さ
    せることを特徴とする洗浄装置。 2 接地された前記洗浄槽と前記被洗浄物との間
    の電界中で、超音波振動によりキヤビテーシヨン
    を生じさせることを特徴とする、実用新案登録請
    求の範囲第1項に記載の洗浄装置。
JP15836186U 1986-10-16 1986-10-16 Pending JPS6366189U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15836186U JPS6366189U (ja) 1986-10-16 1986-10-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15836186U JPS6366189U (ja) 1986-10-16 1986-10-16

Publications (1)

Publication Number Publication Date
JPS6366189U true JPS6366189U (ja) 1988-05-02

Family

ID=31081777

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15836186U Pending JPS6366189U (ja) 1986-10-16 1986-10-16

Country Status (1)

Country Link
JP (1) JPS6366189U (ja)

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