JPS6366924A - 光ｃｖｄによる固体薄膜の製造装置 - Google Patents

光ｃｖｄによる固体薄膜の製造装置

Info

Publication number
JPS6366924A
JPS6366924A JP62069695A JP6969587A JPS6366924A JP S6366924 A JPS6366924 A JP S6366924A JP 62069695 A JP62069695 A JP 62069695A JP 6969587 A JP6969587 A JP 6969587A JP S6366924 A JPS6366924 A JP S6366924A
Authority
JP
Japan
Prior art keywords
gas
reaction
chamber
photo
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62069695A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0351294B2 (ko
Inventor
Yoshihiro Hamakawa
圭弘 浜川
Masanori Okuyama
雅則 奥山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP62069695A priority Critical patent/JPS6366924A/ja
Publication of JPS6366924A publication Critical patent/JPS6366924A/ja
Publication of JPH0351294B2 publication Critical patent/JPH0351294B2/ja
Granted legal-status Critical Current

Links

JP62069695A 1987-03-23 1987-03-23 光ｃｖｄによる固体薄膜の製造装置 Granted JPS6366924A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62069695A JPS6366924A (ja) 1987-03-23 1987-03-23 光ｃｖｄによる固体薄膜の製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62069695A JPS6366924A (ja) 1987-03-23 1987-03-23 光ｃｖｄによる固体薄膜の製造装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP58157554A Division JPS6050168A (ja) 1983-08-29 1983-08-29 光ｃｖｄによる固体薄膜の製造方法

Publications (2)

Publication Number Publication Date
JPS6366924A true JPS6366924A (ja) 1988-03-25
JPH0351294B2 JPH0351294B2 (ko) 1991-08-06

Family

ID=13410259

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62069695A Granted JPS6366924A (ja) 1987-03-23 1987-03-23 光ｃｖｄによる固体薄膜の製造装置

Country Status (1)

Country Link
JP (1) JPS6366924A (ko)

Also Published As

Publication number Publication date
JPH0351294B2 (ko) 1991-08-06

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