JPS6367980U - - Google Patents

Info

Publication number
JPS6367980U
JPS6367980U JP16280186U JP16280186U JPS6367980U JP S6367980 U JPS6367980 U JP S6367980U JP 16280186 U JP16280186 U JP 16280186U JP 16280186 U JP16280186 U JP 16280186U JP S6367980 U JPS6367980 U JP S6367980U
Authority
JP
Japan
Prior art keywords
burn
semiconductor
furnace
static eliminator
low humidity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16280186U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16280186U priority Critical patent/JPS6367980U/ja
Publication of JPS6367980U publication Critical patent/JPS6367980U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Description

【図面の簡単な説明】
第１図は本考案に係る半導体ＩＣのバーンイン
装置の一実施例を示す概略断面図、第２図は低湿
度条件下での空気送風とイオン化空気送風による
帯電圧を示す特性図、第３図は従来例を示す概略
断面図、第４図は湿度差による帯電と放電との関
係を示す特性図である。 １……バーンイン炉、１ｂ……送風口、２……
バーンインソケツト、３……バーンイン基板、４
……半導体ＩＣ、５……電源、６……パルス発生
器、７……ヒータ、８……送風フアン、９……排
気用ダクト、１０……除電装置。

Claims (1)

    【実用新案登録請求の範囲】
  1. 半導体ＩＣに高温、低湿度中で電圧を印加する
    バーンイン炉を備え、この炉内への送風口に送風
    空気をイオン化する除電装置を設けたことを特徴
    とする半導体ＩＣのバーンイン装置。
JP16280186U 1986-10-22 1986-10-22 Pending JPS6367980U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16280186U JPS6367980U (ja) 1986-10-22 1986-10-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16280186U JPS6367980U (ja) 1986-10-22 1986-10-22

Publications (1)

Publication Number Publication Date
JPS6367980U true JPS6367980U (ja) 1988-05-07

Family

ID=31090408

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16280186U Pending JPS6367980U (ja) 1986-10-22 1986-10-22

Country Status (1)

Country Link
JP (1) JPS6367980U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06104321A (ja) * 1991-03-26 1994-04-15 Erich Reitinger 半導体ウエハー等のテスト装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06104321A (ja) * 1991-03-26 1994-04-15 Erich Reitinger 半導体ウエハー等のテスト装置

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