JPS636847Y2 - - Google Patents
Info
- Publication number
- JPS636847Y2 JPS636847Y2 JP10051082U JP10051082U JPS636847Y2 JP S636847 Y2 JPS636847 Y2 JP S636847Y2 JP 10051082 U JP10051082 U JP 10051082U JP 10051082 U JP10051082 U JP 10051082U JP S636847 Y2 JPS636847 Y2 JP S636847Y2
- Authority
- JP
- Japan
- Prior art keywords
- slit
- moving
- axis
- movement
- holders
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 description 11
- 238000010586 diagram Methods 0.000 description 7
- 238000001228 spectrum Methods 0.000 description 6
- 238000005259 measurement Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10051082U JPS595869U (ja) | 1982-07-02 | 1982-07-02 | 可変スリツト装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10051082U JPS595869U (ja) | 1982-07-02 | 1982-07-02 | 可変スリツト装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS595869U JPS595869U (ja) | 1984-01-14 |
| JPS636847Y2 true JPS636847Y2 (2) | 1988-02-26 |
Family
ID=30237739
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10051082U Granted JPS595869U (ja) | 1982-07-02 | 1982-07-02 | 可変スリツト装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS595869U (2) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2993682A1 (en) * | 2014-09-04 | 2016-03-09 | Fei Company | Method of performing spectroscopy in a transmission charged-particle microscope |
-
1982
- 1982-07-02 JP JP10051082U patent/JPS595869U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS595869U (ja) | 1984-01-14 |
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