JPS6371011A - Conveyor - Google Patents

Abstract

(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a conveying device, and is particularly applicable to conveying articles in a vacuum furnace, clean room, or other space isolated from the atmosphere. The present invention relates to a suitable conveyance device.

[Prior Art] Conventionally, the one shown in Fig. 5 is known as a conveying device used for conveying articles in a oriented direction or inside a container isolated from popular places such as a vacuum furnace or a clean room. It is being This is to transport goods C from the No. 1 work room a, both of which are isolated from the atmosphere, to the No. a traveling trolley f that travels on a traveling rail d while carrying an article C on the fork portion e, and a traveling trolley f that is swung by a drive means while engaging with an engagement bin Q of the traveling trolley f. It consists of a swinging lever h that moves the wheel back and forth.

Then, in No. Iva, the traveling trolley f carrying the article C on the fork part e is made to travel on the traveling rail d by the swing lever h, and the fork part e is deeply inserted into No. It is designed to be imported into vb. In this case, the swing link supporting the running rail d is swung to tilt the running rail d forward and downward, and the article C is transferred from the fork part e to the table j in the second chamber. In addition, k
is a door for opening and closing an entrance m divided by a partition wall 2.

[Problems to be Solved by the Invention] In the conventional example, there are cases in which the environmental conditions in the chambers No. A and No. Due to requests such as wanting to keep the connected V loading entrance m to the necessary minimum frontage area, we decided to use a traveling platform! There is a case where it is desired to insert the article C deeply into the chamber (2) while leaving the cart part (n) of the ILF in the chamber (a).

In such a case, it is necessary to extend the fork part e as long as possible so that the article C can be mounted on the tip side thereof.

However, if the fork part e is formed to be long in this way, the distance p from the loading position of the article C to the joint position of the fork part e and the truck part n becomes extremely long, and the required strength of the entire traveling truck f is reduced. In addition to the high demands, it became necessary to install a balance weight or the like on the truck part nll in terms of moment balance, and there was a problem that the weight of the traveling truck became extremely heavy.

In addition, forming the fork part e to be long in this way makes it necessary to lengthen the moving distance q of the traveling bogie f in the 1st workshop a, and it is necessary to increase the indoor space of the 1st va and to increase the length of the traveling rail d. This was not desirable as it led to the length of the process.

In addition to the above-mentioned problems, when transporting article C in rooms a and b isolated from the atmosphere, the structure must be simple and the drive source must be located on the atmosphere side to prevent breakdowns. There is a demand for a device that can be installed in a location where maintenance, etc., can be performed outside the VA or B, and it is desired to devise a device that satisfies these requirements.

[Means for Solving the Problems] The present invention provides a movable base that is supported by a fixed system via a set of mutually parallel first swing links, and that is movable in the horizontal direction while moving up and down; A transport base supported by the base via a pair of mutually parallel second swing links and moved in the horizontal direction while moving up and down, and a swing means for swinging the swing links to move these bases. and a synchronizing means for synchronizing the swinging of the first swinging link and the second swinging link in order to move the moving base and the transport base in the horizontal direction while canceling their vertical displacements. be done.

[Function] To describe the function of the present invention, as shown in FIG. As a result, it is swung in the horizontal direction while moving up and down relative to the fixed system 3.

On the other hand, the transport base 4 on which the article is mounted is swung like a pendulum by a pair of mutually parallel second swiveling links 5 swung by the swiveling means, and as a result, the transport base 4 is swung relative to the moving base 1. It is swung horizontally while moving up and down. The second display shows the swinging states of these swinging links 2 and 5 independently.
As shown in the figure.

By the way, if these swinging links 2 and 5 are swung in synchronization in a certain relationship, the vertical displacements occurring in the moving base 1 and the transport base 4 will be mutually reduced (by 1), and the transport base will be 4 can be moved approximately horizontally.The constant nll ratio is given as follows, for example.As shown in Fig. 2, the length of the first swing link 2 is Ll, and the second swing The length of the link 5 is assumed to be 12. Also, the swing angle range of these swing links 2°5 is set to θ1 and θ2 in one swing.

Therefore, in the swinging state, the first swing link 2 and the second swing link 5 swing within the ranges of 2θ1 and 2θ2, respectively. Here, in the illustrated example, the maximum vertical displacement position of these links 2 and 5 is made to coincide with the center position ff1) of both swings, and the maximum vertical displacement mδ1. Set δ2 equal.

That is, the maximum vertical displacement amounts δ and δ2 of the first swing link 2 and the second swing link 5 are respectively expressed as δ1 = Lt in the figure.
・(1-cosθ1)δ2-Ll −(1-co
s δ2 ), and here these maximum vertical displacements δ
! .

Ls, Ll, δ1 so that δ2 becomes δ1=δ2
Set ゜δ2.

Specifically, θ1. When θ2 and Ll are given, the length Ll of the second swing link 5 is determined as follows.

On the other hand, when Ll, Ll, and δ1 are given, the swing angle range θ2 of the second swing link 5 is determined as follows.

Then, with respect to θl and θ2 in the constant relationship given in this way, the swinging of the first swinging link 2 and the second swinging link 5 is synchronized, that is, the period of the first swinging link 2 and the period of the second swinging link 5 are synchronized. 2
The period of the swing link 5 may be made equal to the period of the swing link 5. With this setting, as shown in FIG. 1, the horizontal linear mobility of the transfer base 4 is ensured at least at the swing start position S, the swing start end position F, and the maximum vertical displacement position M, and also at other positions. However, the carrier base 4 can be moved substantially horizontally with a slight vertical displacement relative to the fixed system 3.

[Example] A preferred embodiment of the present invention will be described in detail below with reference to the accompanying drawings.

As shown in FIG. 3, 6 and 7 are the first character and the second chamber which are both isolated from the atmosphere and are connected, and the first v6 is a conveyor device for conveying the article 8 to the second chamber 7. will be equipped.

As shown in FIGS. 3 and 4, a support frame 3 forming a fixed system is provided in the upper part of the 1v6, and this support frame 3 includes a set of mutually parallel first swing links 2.
A movable base 1, which is moved horizontally while moving up and down, is supported via a and 2b. These first swing links 2
a, 2b together with the support frame 3 and the moving base 1,
The structure is configured to form a parallelogram linkage.

Further, a pair of these first tremor links 2a and 2b are arranged in parallel so as to sandwich the support frame 3 and the movable base 1 from their width directions. These first swing links 2
To explain the installation of a and 2b, one of the first
The swing link 2a has one end rotatably attached to the movable base 1 via a pin member 9, and the other end attached to a rotation shaft 10 provided on the support frame 3 with a key member 11.
It can be integrally attached via. Here is the rotating shaft body 10
is rotatably provided on the support frame 3 and extends from inside the first chamber 6 to the outside of the first chamber 6 toward the atmosphere. The other first swing link 2b is rotatably attached to the support frame 3 and the movable base 1 via the bin member 12 at both ends. Therefore, when the rotating shaft body 10 is rotated, one of the first swing links 2a is swung accordingly, and as a result, the movable base 1 is moved while the other first swing link 2b is swung. It has become so. In addition, the rotating shaft body 1
A shaft sealing means (not shown) for sealing the inside and outside of the first chamber 6 is provided at the portion where the shaft 0 penetrates the first chamber 6.

Above the movable base 1 configured in this way, a pair of parallel 21fJ links 5a and 5b are provided.
A transport base 4 is supported for transporting an article 8 that is moved horizontally while moving up and down.

These 21st Z shift links 5a, 5b are also configured to form a parallelogram link mechanism together with the moving base 1 and the conveyance base 4, similarly to the first swinging links 2a, 2b. Further, a pair of these second swing links 5a and 5b are also arranged in parallel in the width direction of the moving base 1 and the transport base 4, respectively. To explain how to attach these second swing links 5a and 5b, one end of the second swing link 5a is rotatably attached to the transport base 4 via a pin member 13, and the other end is attached to the moving frame. It is integrally attached to a rotating shaft 14 provided in 1 through a key member 15. Here, a pair of rotating shafts 14 are arranged on both sides of the movable frame 1 in the width direction, and are rotatably provided, respectively. The other second swing link 5b is rotatably attached to the moving base 1 and the transport base 4 via the bin member 16 at both ends. Therefore, when the rotating shaft 14 is rotated, one of the second swing links 5a is swung accordingly, and as a result, the transfer base 4 is moved while the other second swing link 5b is swung. It looks like this. The conveyance base 4 that is moved in this manner is formed with a fork portion 17 that extends toward the first side along the moving direction and on which the article 8 is mounted.

In particular, since the moving base 1 is suspended and supported from the upper support frame 3, and the transport base 4 is supported upwardly from the lower moving base 1, the vertical displacements are opposite to each other when moving in the horizontal direction. It will become.

The first rocking rib link 2a configured in this way.

2b and the second swing links 5a and 5b, these links 2 are provided to move the moving base 1 and the transport base 4.
A swinging means 18 is provided for swinging a, 2b, 5a, and 5b. This swinging means 18 mainly includes one cylinder that is telescopically operated, a lever 20 that is provided between this cylinder and the rotating shaft body 10 for transmitting the telescoping force, and one first swinging link 2a. and gears 23 and 24 that are provided at the moving base side end 21 of the 21st moving link 5a and the moving base side end 22 of the 21st moving link 5a and mesh with each other.

The cylinder 19 and the lever 20 are provided on the outside of the first v6 and are configured to rotate the rotating shaft body 10 connected to the first swing link 2a from the outside. Also gear 23.2
4 is integrally attached to the first swing link 2a and the second swing link 5a via bolts 25 and key members 15, respectively, and converts the swing of the first swing link 2a to the second swing link 2a at a predetermined gear ratio.
It is configured to be transmitted to the swing link 5a to swing it. In particular, the gears 23, 24 are composed of an even number of first swing links 2a, 2b, second swing links 5a,
The swinging directions of 5b are opposite to each other, and the transport base 4 and moving base 1 are configured to move in the same direction.

Further, these gears 23 and 24 cause the movable base 1 and the transfer base 4 to have the same maximum displacement at their maximum folding displacement position (vertical position in the figure), thereby canceling out their vertical displacements. It also functions as a synchronization means constituted by a predetermined gear ratio that synchronizes the swings of the first swing link 2a and the second swing link 5a so as to move the transport base 4 in the horizontal direction.

Specifically, as shown in FIG.
, 2b and the lengths Ll and L of the second swing links 5a and 5b.
2, and the relationship between the swing angle range θ and θ2 is Ll-(1-cos θt)-L2 φ(1-co
sθ2), the number of teeth N1. N
2 is set as N1 · θ2 = N2 · θ1.

On the other hand, a fork tilting means 27 for transferring the article 8 to the pedestal 26 after conveying the article 8 into the second chamber 7 is provided outside the upper part of the second chamber 6 . This four-fold tilting means 27 is composed of a cylinder 28 that is operated to expand and contract, and a link system 29 that transmits this expansion and contraction force to the support frame 3. By contracting the cylinder 28, the support frame 3 is moved to the rotating shaft. The fork part 17 is inclined downward with the center at 10.
is starting to appear around 1.

In addition, link system 29 is the first construction! For the part where 6 is suitable, the first
A shaft sealing means 30 is provided for sealing the inside and outside of the figure 6.

Next, the operation of the embodiment will be described.

When transporting the article 8 from the T-chamber 6 to the No. Iv6, first, the first swing links 2a and 2b are deeply drawn into the Iv6 to mount the article 8 on the conveyance base 4. Next, the swinging means 18 is operated to horizontally move the movable base 1 and the transport base 4 while vertically displacing them using the first swing links 2a, 2b and the second swing links 5a, 5b. At this time, the moving base 1 moves up and down relative to the support frame 3, and the transport base 4 moves up and down relative to the moving base 1, but the transport base 4 moves up and down relative to the support frame 3, which is a fixed system.
will move vJ while keeping it approximately horizontal.

Thereby, the article 8 can be moved approximately horizontally.

By the way, according to the above configuration, when the first swing links 2a and 2b are pulled into the chamber (1) 6, the moving base 1 and the conveyance base 4 are overlapped, giving the appearance of a conveyor carrying the upper article 8. The length of the base 4 can be shortened, and the first swing link 2
When a and 2b are swung toward the first chamber 7, the transport base 4 can be fully inserted into the first chamber 7.

Furthermore, in the first chamber 6, the apparent length of the upper conveyance base 4 can be reduced, so the space of the first chamber 6 can be reduced. In addition, the link configuration is simple, and the structure is simple, and the occurrence of failures can be suppressed as much as possible.

Furthermore, the device can be configured with a link or frame structure, and weight reduction can be achieved.

Furthermore, in this embodiment, since the swinging means 18 and the fork tilting means 27 are provided on the atmosphere side, the drive source is not exposed to a blank environment, ensuring soundness and making maintenance easier.

Next, we will give an example of the shell body of the main neck (see Figure 2).

Length of first swing link; L t -1000mm second
Length of the first swing link: L2 = 650mm Swing angle range of the first swing link; When set to θ1-32°, -39,9836' Moat 40" If set like this, the maximum displacement δ1° δ2 Both become δ1-62- 151.9511111.

Position δ3. δ4 is δz = 113.2HllIn δ4 = 112.78111ffl Therefore, the error is 0.4311I11.

[Effects of the Invention 1 In particular, the present invention exhibits the following excellent effects.

Since the transport base for transporting articles is moved from a fixed system almost horizontally using two swing links and a movable base, it is possible to reduce the space required for transport, reduce weight, and simplify the structure. Items can be properly transported in containers or blanks isolated from the atmosphere.

[Brief explanation of the drawing]

Fig. 1 is a schematic diagram showing the basic configuration of the present invention, Fig. 2 is a block diagram showing how to set up a dynamic link adopted in the present invention, and Fig. 3 is a preferred embodiment of the present invention. A side view showing an example, FIG. 4 is a sectional view taken along the line VI-VI in FIG. 3, and FIG.
The figure is a side view showing a conventional example. In the figure, 1 is a moving base, 2.2a, 2b are m1 swing links, 3 is a support frame illustrated as a fixed system, 4 is l[iAl:-S, 5, 5a, 5b are F2JZ links, 18 is The rocking means 22 and 23 are Ic gears as an example of synchronizing means.

Claims (3)

[Claims] (1) A movable base supported by a fixed system via a set of mutually parallel first swing links and moved in the horizontal direction while moving up and down; a transport base that is supported via two swing links and is moved horizontally while moving up and down; a swing means that swings the swing links to move these bases; and the moving base and the transport base. 1. A conveying device comprising synchronizing means for synchronizing the swinging of the first swinging link and the second swinging link in order to horizontally move the first swinging link and the second swinging link while canceling their vertical displacements. (2) The transport base is disposed above the movable base, and the first swing link and the second swing link swing in opposite directions along the movement direction of these bases, and the The conveying device according to claim 1, wherein the conveying base and the moving base are configured to move in the same direction. (3) The synchronizing means causes the moving base and the transport base to move in the horizontal direction while causing the same maximum displacement at their maximum vertical displacement positions and canceling their vertical displacements. The conveyance device according to claim 1 or 2, which is configured to synchronize the swinging movements of the swinging link and the second swinging link.